Method for pattern measurement, method for setting device parameters of charged particle radiation device, and charged particle radiation device
View Patent ↗An object of the present invention is to provide a method for pattern measurement and a charged particle radiation device in which a pattern formed by using a DSA technique can be very precisely measured and inspected. According to an aspect for achieving the object, a method for pattern measurement or a charged particle radiation device for realizing the measurement is proposed as follows. A charged particle is radiated to a polymer compound used for a self-organization lithography technique, and a specific polymer is considerably contracted as compared to the other polymer among multiple polymers forming the polymer compound. Thereafter, dimensions between multiple edges of the other polymer are measured, based on a signal obtained by scanning a region including the other polymer with the charged particle beam.
1. A method for pattern measurement in which dimension measurement is performed for a pattern formed on a sample, based on detection of charged particles obtained by scanning the sample with a charged particle beam, the method comprising the steps of:
irradiating a polymer compound including at least a first polymer and a second polymer used in a self-organizing lithography technique with a charged particle beam apparatus used for the dimension measurement to contract a volume of the first polymer more than a volume of the second polymer;
after the contraction of the volume of the first polymer, scanning a region including multiple edges of the second polymer with the charged particle beam apparatus;
detecting the charged particles obtained by scanning the region with the charged particle beam with a detector; and
measuring, with a processor in communication with the detector, a dimension between the edges based on the charged particles obtained by scanning the region with the charged particle beam.
2. The method for pattern measurement according to claim 1 ,
wherein luminance in an edge portion of the first polymer is obtained, based on detection of a signal obtained by scanning with the charged particle beam, and
wherein radiation of the charged particle is completed, or measurement using the charged particle beam starts, based on information relating to the luminance.
3. The method for pattern measurement according to claim 2 ,
wherein the signal is detected by the detector which is disposed in a direction oblique from the charged particle beam.
4. The method for pattern measurement according to claim 1 ,
wherein the charged particles for contracting the volume of the first polymer are the charged particle beam or charged particles discharged from another charged particle source which is different from a charged particle source discharging the charged particle beam.
5. The method for pattern measurement according to claim 4 ,
wherein the another charged particle source is a planar electron source having a plane which is parallel to a surface of the sample.
6. A charged particle radiation device in which dimension measurement is performed for a pattern formed on a sample, based on detection of charged particles obtained by scanning the sample with a charged particle beam, comprising:
a charged particle beam apparatus that
is used for the dimension measurement,
irradiates a polymer compound including at least a first polymer and a second polymer used in a self-organizing lithography technique to contract a volume of the first polymer more than a volume of the second polymer, and
after the contraction of the volume of the first polymer, scans a region including multiple edges of the second polymer;
a detector that detects the charged particles obtained by scanning the region with the charged particle beam; and
a control device that is in communication with the detector and measures a dimension between the edges based on the charged particles obtained by scanning the region with the charged particle beam.
7. The charged particle radiation device according to claim 6 ,
wherein the control device obtains luminance in an edge portion of the first polymer, based on detection of a signal obtained by scanning with the charged particle beam, and completes radiation of the charged particles, or starts measurement using the charged particle beam, based on information relating to the luminance.
8. The charged particle radiation device according to claim 7 , wherein
the detector is disposed in a direction oblique from the charged particle beam, and
the control device completes the radiation of the charged particles, or starts the measurement using the charged particle beam, based on an output from the detector.
9. The charged particle radiation device according to claim 6 ,
wherein the charged particles for contracting the volume of the first polymer is the charged particle beam or charged particles discharged from another charged particle source which is different from a charged particle source discharging the charged particle beam.
10. The charged particle radiation device according to claim 9 ,
wherein the another charged particle source is a planar electron source having a plane which is parallel to a surface of the sample.