Composition for forming topcoat layer and resist pattern formation method employing the same
View Patent ↗To provide a composition for forming a topcoat layer enabling to produce a pattern excellent in roughness and in pattern shape, and also to provide a pattern formation method employing that. A composition for forming a topcoat layer, containing a solvent and a triphenylene derivative having a hydrophilic group; and also a method of forming a pattern by casting the above composition on a resist surface and then by subjecting it to exposure and development. The composition may further contain a polymer.
1. A composition for forming a topcoat layer, containing a solvent and a triphenylene derivative having a hydrophilic group, wherein said triphenylene derivative is a polymer which comprises a repeating unit containing a triphenylene skeleton represented by the following formula (2A) or (2B):
in which
each R is hydrogen or a hydrophilic group selected from the group consisting of hydroxyl group, carboxyl group, sulfo group, amino group, amido group, nitro group, cyano group, and polyalkyleneoxide group, provided that at least three of the Rs are the hydrophilic groups;
R 1 is hydrogen or methyl group;
each R′ is hydrogen, a hydrophilic group selected from the group consisting of hydroxyl group, carboxyl group, sulfo group, aminog group, amido group, nitro group, cyano group, and polyalkyleneoxide group, or a repeating unit represented by the formula (2B), provided that at least three of the R′s are the hydrophilic groups; and
L is a divalent linking group.
2. The composition according to claim 1 for forming a topcoat layer, wherein said polymer is represented by formula (2B).
3. The composition according to claim 1 for forming a topcoat layer, wherein said polymer is represented by formula (2A).
4. A pattern formation method comprising the steps of:
casting a resist composition on a substrate, to form a resist layer,
coating the resist layer with a composition for forming a topcoat layer,
heating to harden the composition on the resist layer,
subjecting the resist layer to exposure by use of extreme UV light, and
developing the exposed resist layer with an alkali aqueous solution, wherein the composition for forming a topcoat layer contains a solvent and a triphenylene derivative having a hydrophilic group.
5. The pattern formation method according to claim 4 , wherein said extreme UV light has a wavelength in the range of 5 to 20 nm.
6. The pattern formation method according to claim 4 , wherein the formed topcoat layer has a thickness of 1 to 100 nm.
7. The pattern formation method according to claim 1 , wherein said heating step is carried out at a temperature of 25 to 150° C.
8. The pattern formation method according to claim 1 , wherein said triphenylene derivative is a polymer which comprises a repeating unit containing a triphenylene skeleton.
9. The pattern formation method according to claim 8 , wherein said polymer is represented by the following formula (2B):
in which
each R′ is hydrogen, a hydrophilic group selected from the group consisting of hydroxyl group, carboxyl group, sulfo group, amino group, amido group, nitro group, cyano group, and polyalkyleneoxide group, or a repeating unit represented by the formula (2B), provided that at least three of the R′s are the hydrophilic groups; and
L is a divalent linking group.
10. The pattern formation method according to claim 8 , wherein said polymer is represented by the following formula (2A):
in which
each R is hydrogen or a hydrophilic group selected from the group consisting of hydroxyl group, carboxyl group, sulfo group, amino group, amido group, nitro group, cyano group, and polyalkyleneoxide group, provided that at least three of the Rs are the hydrophilic groups; and
R 1 is hydrogen or methyl group.