Semiconductor packaging structure and forming method therefor
The present invention provides a semiconductor package structure, including: a chip, wherein bonding pads and a passivation layer are arranged on the surface of the chip, the passivation layer is provided with first openings for exposing the bonding pads, and a seed layer connected with the bonding pads and columnar salient points stacked on the seed layer are arranged on the bonding pads; lead frames, wherein each lead frame is provided with a plurality of discrete pins, and internal pins and external pins are respectively arranged on two opposite surfaces of the pins; the chip being flipped on the lead frames, and the columnar salient points being connected with the internal pins; a plastic package layer, wherein the plastic package layer is used for sealing the chip, the columnar salient points and the lead frames and exposing the external pins. By adopting the present invention, a transverse area occupied by the package structure is decreased, the volume of the entire package structure is correspondingly decreased, and the integration level of the package structure is improved. The present invention further provides a forming method of the semiconductor package structure.
1. A forming method of a semiconductor package structure, comprising:
providing a semiconductor chip, wherein bonding pads and a passivation layer are arranged on a surface of the chip, and the passivation layer is provided with first openings for exposing the bonding pads;
sequentially forming a heat resistant metal layer and a metal infiltrating layer on the bonding pads and the passivation layer of the chip, wherein the heat resistant metal layer includes titanium, chromium, or tantalum and the metal infiltrating layer includes copper, aluminum, or nickel;
forming photoresist on the metal infiltrating layer, wherein the photoresist is provided with a second opening for exposing the metal infiltrating layer on the bonding pads of the chip;
sequentially forming an adhesive metal layer including copper and a barrier metal layer including nickel on the metal infiltrating layer in the second opening;
forming a welding flux on the barrier metal layer;
removing the photoresist;
etching the heat resistant metal layer and the metal infiltrating layer on the passivation layer until the passivation layer and a portion of the bonding pads is exposed;
refluxing the welding flux to form columnar salient points;
providing lead frames, wherein each lead frame is provided with a plurality of discrete pins, and internal pins and external pins are respectively arranged on two opposite surfaces of the pins;
flipping the chip provided with the columnar salient points on the lead frames, wherein the columnar salient points are electrically connected with the internal pins; and
forming a plastic package layer used for sealing the chip, the columnar salient points and portions of the lead frames and exposing the external pins.
2. The forming method of the semiconductor package structure of claim 1 , wherein the second opening is smaller than the first opening.
3. The forming method of the semiconductor package structure of claim 1 , wherein the material of the adhesive metal layer is copper.
4. The forming method of the semiconductor package structure of claim 3 , wherein a thickness of the adhesive metal layer is 5-50 μm.
5. The forming method of the semiconductor package structure of claim 1 , wherein the material of the barrier metal layer is nickel.
6. The forming method of the semiconductor package structure of claim 5 , wherein a thickness of the barrier metal layer is 1.5-3 μm.
7. The forming method of the semiconductor package structure of claim 1 , wherein a material of the welding flux is pure tin or a tin alloy.
8. The forming method of the semiconductor package structure of claim 7 , wherein a thickness of the welding flux is 5-70 μm.