Semiconductor device, semiconductor stacked module structure, stacked module structure and method of manufacturing same
A method of manufacturing a semiconductor device having an insulating substrate, a semiconductor element which is mounted on one main surface of the insulating substrate via adhesive, with an element circuit surface of the semiconductor element facing upwards, a first insulating material layer (A) which seals the element circuit surface of the semiconductor element and the insulating substrate peripheral thereto, a first metal thin film wire layer provided on the first insulating material layer (A) and a portion of which is exposed to an external surface, a first insulating material layer (B) provided on the first metal thin film wire layer, a second insulating material layer provided on a main surface of the insulating substrate where the semiconductor element is not mounted, a second metal thin film wire layer provided inside the second insulating material layer.
1. A method of manufacturing a semiconductor device, the method comprising the steps of:
disposing a plurality of semiconductor elements by positioning the elements such that element circuit surfaces thereof face upwards, on one main surface of an insulating substrate, and fixing the surfaces on the opposite side to the element circuit surfaces of the semiconductor elements, to an insulating substrate;
forming a first insulating material layer on the element circuit surfaces of the semiconductor elements and the insulating substrate;
forming openings in the first insulating material layer;
forming a first metal thin film wire layer, portions of which extend to a peripheral region of the semiconductor elements, on the first insulating material layer, and forming conducting sections which are electrically connected with electrodes arranged on the element circuit surfaces of the semiconductor elements inside the openings in the first insulating material layer;
forming a first insulating material layer on top of the first metal thin film wire layer, the conducting sections and the first insulating material layer;
forming openings passing through the insulating substrate and reaching the first metal thin film wire layer on the first insulating material layer;
forming a second metal thin film wire layer by forming a metal thin film on the surface of the insulating substrate on the opposite side to the surface where the semiconductor elements are disposed and on the surface of the openings passing through the insulating substrate, and of forming vias to electrically connect the second metal thin film wire layer and the first metal thin film wire layer;
forming the second insulating material layer on the second metal thin film wire layer;
forming external electrodes on the first metal thin film wire layer; and
separating semiconductor devices including one or a plurality of semiconductor chips by cutting the insulating substrate, the first insulating material layer and the second insulating material layer, at prescribed positions.