IP Library Granted Patent US 9,825,093
Granted Patent B2
US 9,825,093 · App. 14/832,108 · Granted Nov 21, 2017

FinFET PCM access transistor having gate-wrapped source and drain regions

Inventors: Chung H. Lam (Peekskill, NY); Chung-Hsun Lin (White Plains, NY); Darsen D. Lu (Mount Kisco, NY); Philip J. Oldiges (Lagrangeville, NY)
Assignee: GLOBALFOUNDRIES INC.
H01L27/2436H01L21/31105H01L21/823431H01L21/823456H01L29/0847H01L29/41791H01L29/42376H01L29/66795H01L29/66803H01L29/785H01L45/06
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Quick Facts
Patent No.
US 9,825,093
App. No.
14/832,108
Granted
Nov 21, 2017
Kind
B2
Abstract

Embodiments are directed to a method of forming portions of a fin-type field effect transistor (FinFET) device. The method includes forming at least one source region having multiple sides, forming at least one drain region having multiple sides, forming at least one channel region having multiple sides, forming at least one gate region around the multiple sides of the at least one channel region and forming the at least one gate region around the multiple sides of the at least one drain region.

Claims (32)

1. A fin-type field effect transistor (FinFET) device comprising:

at least one source region having multiple sides;

at least one drain region having multiple sides, the at least one drain region formed adjacent the at least one source region;

at least one channel region having multiple sides, the at least one channel region positioned substantially between and below the at least one source region and the at least one drain region;

at least one gate region formed substantially above the at least one channel region;

wherein the at least one gate region is further formed to wrap around the multiple sides of the at least one drain region and a portion of the multiple sides of the at least one source region; and

a common source substrate coupled to the at least one source region.

2. The device of claim 1 , wherein the at least one drain region comprises a drain contact region coupled to a drain pillar region.

3. The device of claim 2 , wherein the drain contact region comprises a level of doping equal to approximately one dopant atom per 10,000 atoms.

4. The device of claim 2 , wherein the drain pillar region comprises a level of doping equal to approximately one dopant atom per 100,000,000 atoms.

5. A fin-type field effect transistor (FinFET) device comprising:

a first drain region having multiple sides;

a second drain region having multiple sides, the second drain region positioned adjacent and separate from the first drain region;

a shared source region having multiple sides, the shared source region positioned between the first drain region and the second drain region;

a first gate region wrapped around the multiple sides of the first drain region and a portion of the multiple sides of the shared source region; and

a second gate region wrapped around the multiple sides of the second drain region and a distinct portion of the multiple sides of the shared source region,

wherein the first gate region and the second gate region combine to wrap around the entirety of the multiple sides of the shared source region.

6. The device of claim 5 , wherein:

the first gate region is wrapped around a first side of the multiple sides of the shared source region; and

the second gate region is wrapped around a second side of the multiple sides of the shared source region, the second side of the multiple sides of the shared source region opposite the first side of multiple sides of the shared source region.

7. The device of claim 6 , further comprising:

a dielectric region positioned between the first gate region and the second gate region, the dielectric region covering opposite sides of the multiple sides of the shared source region formed between the first side and the second side.

8. The device of claim 5 , further comprising:

a first channel region having multiple sides, the first channel region positioned substantially between and below the shared source region and the first drain region; and

a second channel region having multiple sides, the second channel region positioned substantially between and below the shared source region and the second drain region.

9. A single fin-type field effect transistor (FinFET) device for a phase change memory (PCM), the single FinFET device comprising:

a drain region having multiple sides;

a shared source region having multiple sides, the shared source region positioned adjacent and separate from the drain region;

a channel region having multiple sides, the channel region positioned substantially between and below the shared source region and the drain region;

a gate region wrapped around the multiple sides of the drain region and a portion of the multiple sides of the shared source region,

wherein the shared source region is shared and included in a distinct FinFET device for the PCM; and

a common source substrate coupled to the shared source region.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 8, 2016
From: GLOBALFOUNDRIES U.S. 2 LLC
To: GLOBALFOUNDRIES INC.
Reel/Frame 038224/0720 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 10, 2016
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 037941/0646 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 21, 2015
From: LAM, CHUNG H.; LIN, CHUNG-HSUN; LU, DARSEN D.; OLDIGES, PHILIP J.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 036390/0195 →
Continuity (1)
Related Publication 20170053966A1 · Feb 23, 2017