ESD protection device
An electrostatic discharge (ESD) device is disclosed having two PNP transistors. During a high-voltage ESD event a parasitic NPN transistor couples to one of the two PNP transistors to provide ESD protection.
1. A device comprising an electrostatic discharge protection clamp having an anode and a cathode each of which are adapted to limit a voltage appearing across protected terminals of an integrated circuit to which the electrostatic discharge protection clamp is coupled, comprising:
an active semiconductor region overlying a substrate comprising
a first P-well,
a second P-well,
a third P-well,
a first N-well between the second and third P-wells and between the first and third P-wells,
a second N-well between the first and second P-wells,
a first P-type contact region at the first P-well electrically connected to an anode/cathode terminal of the electrostatic discharge protection clamp,
a first N-type contact region at the first P-well electrically connected to the anode/cathode terminal,
a second P-type contact region at the third P-well electrically connected to a cathode/anode of the electrostatic discharge protection clamp,
a second N-type contact region at the third P-well electrically connected to the cathode/anode and between the first N-well and the second P-type contact.
2. The device of claim 1 , wherein the second P-Well is connected to the cathode/anode terminal.
3. The device of claim 1 wherein the first P-Well is located between the second P-well and the first N-well.
4. The device of claim 3 , wherein the second P well is electrically connected to the cathode/anode.
5. The device of claim 3 , wherein the first N-type contact region is between the first P-type contact region and the second P-well.
6. The device of claim 1 wherein the second P-Well is located between the first P-well and the first N-well.
7. The device of claim 6 , wherein the first N-type contact is between the first P-type contact and the second N-well.
8. The device of claim 7 further comprising;
a fourth P-well between the second P-well and the first N-well; and
a third N-well between the second P-well and the fourth P-well.
9. The device claim 8 , wherein the fourth P-well is electrically connected to the anode/cathode.
10. The device of claim 1 , wherein a buried N-type layer below the first, second, and third P-wells is electrically connected to the first and second N-wells.
11. A method of manufacturing an electrostatic discharge protection clamp adapted to limit a voltage appearing across protected terminals of an integrated circuit to which the electrostatic discharge protection clamp is coupled, comprising:
providing a substrate comprising an active semiconductor region;
forming a first P-well, a second P-well, and a third P-well;
forming a second N-well between the first and second P-wells;
forming a first P-type contact region at the first P-well;
forming a first N-type contact region at the first P-well;
forming a second P-type contact region at the third P-well;
forming a second N-type contact region at the third P-well between the first N-well and the second P-type contact;
forming an anode/cathode terminal electrically connected to the first P-contact and to the first N-contact; and
forming a cathode/anode terminal electrically connected to the second P-contact and to the second N-contact.
12. The method of claim 11 wherein forming the cathode/anode further comprises forming the cathode/anode terminal electrically connected to the second P-well.
13. The method of claim 11 wherein the first P-well is located between the second P-well and the first N-well.
14. The method of claim 13 , wherein the first N-type contact region is between the first P-type contact region and the second P-well.
15. The method of claim 11 wherein the second P-Well is located between the first P-well and the first N-well.
16. The method of claim 11 , wherein the second P-well is located between the first P-well and the first N-well, and the first N-type contact is between the first P-type contact and the second N-well.
17. The method of claim 16 further comprising;
forming a fourth P-well between the second P-well and the first N-well; and
forming a third N-well between the second P-well and the fourth P-well.
18. The device claim 17 , wherein the fourth P-well is electrically connected to the anode/cathode.
19. The device of claim 11 , wherein a buried N-type layer below the first, second, and third P-wells is electrically connected to the first and second N-wells.
20. An electrostatic discharge protection clamp adapted to limit a voltage appearing across protected terminals of an integrated circuit to which the electrostatic discharge protection clamp is coupled, comprising:
a substrate comprising a dielectric layer; and
a first electrostatic discharge protection device including:
a first PNP transistor at a first N-well of the integrated circuit, the first PNP transistor having a base region, a first current electrode region, and a second current electrode region;
a second PNP transistor at a second N-well of the integrated circuit, the second PNP transistor having a base region, a first current electrode region, and a second current electrode region, wherein the second N-well is distinct from the first N-well; and
a conductive buried layer formed over the substrate electrically connected to the base region of the first PNP transistor and to the base region of the second PNP transistor, wherein the second PNP transistor is distinct from the first PNP transistor.