Surface treatment apparatus and method for semiconductor substrate
In one embodiment, a surface treatment apparatus for a semiconductor substrate includes a holding unit, a first supply unit, a second supply unit, a third supply unit, a drying treatment unit, and a removal unit. The holding unit holds a semiconductor substrate with a surface having a convex pattern formed thereon. The first supply unit supplies a chemical solution to the surface of the semiconductor substrate, to perform cleaning and oxidation. The second supply unit supplies pure water to the surface of the semiconductor substrate, to rinse the semiconductor substrate. The third supply unit supplies a water repelling agent to the surface of the semiconductor substrate, to form a water repellent protective film on the surface of the convex pattern. The drying treatment unit dries the semiconductor substrate. The removal unit removes the water repellent protective film while making the convex pattern remain.
1. A surface treatment method for a semiconductor substrate, comprising:
forming a stacked body comprising a silicon nitride film and a silicon oxide film thereon on a silicon substrate containing an OH group;
forming a resist film on the silicon oxide film in the stacked body;
patterning the silicon oxide film by a dry etching;
forming a plurality of convex patterns by peeling the resist film;
washing the surface of the convex patterns with use of a chemical solution;
after the washing, while supplying a pure water on a surface of the silicon substrate, irradiating the surface of the silicon substrate with a UV light, to oxidize the surface of the silicon substrate;
supplying a silane coupling agent on the surface of the silicon substrate to form a water repellent protective film including R—Si—OH on the surface of the convex patterns by a silylation reaction between the OH group of the silicon substrate and R—Si—OH of the silane coupling agent;
rinsing the silicon substrate with use of the pure water after forming the water repellent protective film; and
drying the silicon substrate after the rinsing.
2. The surface treatment method of claim 1 ,
wherein after forming the repellent protective film, while supplying the pure water on the surface of the silicon substrate, irradiating the surface of the silicon substrate with a UV light to remove the water repellent protective film and to rinse the silicon substrate.
3. The surface treatment method of claim 1 ,
wherein the resist film is formed as a resist layer comprising a line-and-space pattern on the silicon oxide film with use of a photolithography technique, and the silicon nitride film is formed by patterning by the dry etching of the plurality of convex patterns.
4. The surface treatment method of claim 1 ,
wherein after washing the surface of the convex patterns with use of the chemical solution, before oxidizing the surface of the silicon substrate, the silicon substrate is rinsed with use of the pure water to remove the chemical solution.
5. The surface treatment method of claim 1 ,
wherein after oxidizing the surface of the silicon substrate, before forming the water repellent protective film, an IPA is supplied to rinse the surface of the silicon substrate with alcohol.
6. The surface treatment method of claim 1 ,
wherein after forming the water repellent protective film, before rinsing the silicon substrate with use of the pure water, an IPA is supplied to rinse the surface of the silicon substrate with alcohol.
7. The surface treatment method of claim 1 ,
wherein the convex patterns are formed by a side-wall transfer process.
8. The surface treatment method for a silicon substrate according to claim 1 ,
wherein a size of each convex pattern is 30 nm or less; and
an aspect ratio of each convex pattern is 10 or more.
9. A surface treatment method for a semiconductor substrate, comprising:
forming a stacked body comprising a silicon nitride film and a silicon oxide film thereon on a silicon substrate containing an OH group;
forming a resist film on the silicon oxide film in the stacked body;
patterning the silicon oxide film by a dry etching;
forming a plurality of convex patterns by peeling the resist film;
washing the surface of the convex patterns with use of a chemical solution while rotating the silicon substrate;
after the washing, while rotating the silicon substrate, supplying a pure water on a surface of the silicon substrate, irradiating the surface of the silicon substrate with a UV light, to oxidize the surface of the silicon substrate;
while rotating the silicon substrate, supplying a silane coupling agent on the surface of the silicon substrate to form a water repellent protective film on the surface of the convex patterns by an ester-reaction of the silane coupling agent;
after forming the water repellent protective film, rinsing the silicon substrate with use of the pure water while rotating the silicon substrate; and
drying the silicon substrate while rotating the silicon substrate after the rinsing.
10. The surface treatment method of claim 9 ,
wherein the resist film is formed as a resist layer comprising a line-and-space pattern on the silicon oxide film with use of a photolithography technique, and
the silicon nitride film is formed by patterning by the dry etching of the plurality of convex patterns.
11. The surface treatment method of claim 9 ,
wherein after washing the surface of the convex patterns, before oxidizing the surface of the silicon substrate, the silicon substrate is rinsed with use of the pure water to remove the chemical solution.
12. The surface treatment method of claim 9 ,
wherein after oxidizing the surface of the silicon substrate, before forming the water repellent protective film, an IPA is supplied to rinse the surface of the silicon substrate with alcohol.
13. The surface treatment method for a silicon substrate according to claim 9 ,
wherein a size of each convex pattern is 30 nm or less; and
an aspect ratio of each convex pattern is 10 or more.
14. A surface treatment method for a semiconductor substrate, comprising:
forming a stacked body comprising a silicon nitride film and a silicon oxide film thereon on a silicon substrate containing an OH group;
forming a resist film on the silicon oxide film in the stacked body;
patterning the silicon oxide film by a dry etching;
forming a plurality of convex patterns by peeling the resist film;
washing the surface of the convex patterns with use of a chemical solution;
after the washing, rinsing the silicon substrate with use of a pure water;
after rinsing the silicon substrate with use of the pure water, irradiating a light to forcibly oxidize the surface of the convex patterns including a side surface of the silicon nitride film and the surface of the silicon oxide film;
supplying a silane coupling agent on the surface of the silicon substrate to form a water repellent protective film including R—Si—OH on the surface of the convex patterns by a silylation reaction between the OH group of the silicon substrate and R—Si—OH of the silane coupling agent;
after forming the water repellent protective film, rinsing the silicon substrate with use of the pure water; and
drying the silicon substrate after the rinsing,
wherein gaps between two convex patterns adjacently disposed among the convex patterns vary one another at a tip side of the convex patterns; and
each of the convex patterns comprises a first side surface having a first angle to the surface of the silicon substrate and a second side surface that are connected to the first side surface and has a second angle smaller than the first angle to the surface of the silicon substrate, the first side surface being disposed at a side nearer to the surface of the silicon substrate than the second side surface.
15. The surface treatment method of claim 14 ,
wherein the resist film as a resist layer comprising a line-and-space pattern on the silicon oxide film with use of a photolithography technique, and the silicon nitride film is formed by patterning by the dry etching of the plurality of convex patterns.
16. The surface treatment method of claim 14 ,
wherein after washing the surface of the convex patterns, before oxidizing the surface of the silicon substrate, the silicon substrate is rinsed with use of the pure water to remove the chemical solution.
17. The surface treatment method of claim 14 ,
wherein after oxidizing the surface of the silicon substrate, before forming the water repellent protective film, an IPA is supplied to rinse the surface of the silicon substrate with alcohol.
18. The surface treatment method of claim 14 ,
wherein after forming the water repellent protective film, before rinsing the silicon substrate with use of the pure water, an IPA is supplied to rinse the surface of the silicon substrate with alcohol.
19. The surface treatment method of claim 14 ,
wherein the convex patterns are formed by a side-wall transfer process.
20. The surface treatment method for a silicon substrate according to claim 14 ,
wherein a size of each convex pattern is 30 nm or less; and
an aspect ratio of each convex pattern is 10 or more.