Method and apparatus for plasma dicing a semi-conductor wafer
View Patent ↗The present invention provides a method for plasma dicing a substrate. The method comprising providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; placing the substrate onto a support film on a frame to form a work piece work piece; loading the work piece onto the work piece support; providing a cover ring disposed above the work piece; generating a plasma through the plasma source; and etching the work piece through the generated plasma.
1. An apparatus for plasma dicing a substrate comprising:
a process chamber having a vertical side wall;
an inductively coupled plasma source adjacent to the vertical side wall of the process chamber;
a work piece support within the process chamber, the work piece support having an electrostatic chuck;
a screen connected to the vertical side wall of the process chamber, said screen having a plurality of holes, said screen is vertically positioned below said inductively coupled plasma source and said screen is vertically positioned above the work piece support; and
a cover ring connected to the vertical side wall of the process chamber such that said cover ring is vertically positioned above the work piece support and said cover ring is vertically positioned below said screen, said cover ring having an inner opening diameter vertically disposed above the electrostatic chuck, said inner opening diameter of said cover ring is smaller than an outer diameter of the electrostatic chuck.
2. The apparatus according to claim 1 wherein the electrostatic chuck is monopolar.
3. The apparatus according to claim 2 wherein the electrostatic chuck further comprising a dielectric having a thickness greater than 100 microns.
4. The apparatus according to claim 1 wherein said cover ring further comprising a plurality of through holes positioned outside the outer diameter of the electrostatic chuck.
5. The apparatus according to claim 4 wherein said cover ring is a stationary cover ring.
6. The apparatus according to claim 5 wherein said cover ring further comprising a plurality of fluid channels.