Asymmetric finFET memory access transistor
View Patent ↗A field effect transistor device comprises a semiconductor substrate, a doped source layer arranged on the semiconductor substrate, an insulator layer arranged on the doped source layer, a fin arranged on the insulator layer, a source region extension portion extending from the doped source layer and through the fin, a gate stack arranged over a channel region of the fin and adjacent to the source region extension portion, a drain region arranged on the fin adjacent to the gate stack; the drain region having a graduated doping concentration.
1. A field effect transistor device, comprising:
a semiconductor substrate;
a doped source layer arranged on the semiconductor substrate;
an insulator layer arranged on the doped source layer;
a fin arranged on the insulator layer;
a source region extension portion extending from the doped source layer and through the fin;
a gate stack arranged over a channel region of the fin and adjacent to the source region extension portion;
a drain region arranged on the fin adjacent to the gate stack; the drain region having a graduated doping concentration.
2. The device of claim 1 , wherein a dopant concentration of the doped source layer is greater than the graduated doping concentration of the drain region.
3. The device of claim 1 , wherein the source region extension portion includes a doped semiconductor material.
4. The device of claim 1 , wherein the fin includes a semiconductor portion and a nitride portion.
5. The device of claim 1 , wherein the insulator layer is arranged about the source region extension portion.
6. A field effect transistor device, comprising:
a semiconductor substrate;
a doped source layer arranged on the semiconductor substrate;
an insulator layer arranged on the doped source layer;
a fin arranged in contact with the insulator layer;
a source region extension portion extending from the doped source layer and through the fin;
a gate stack arranged over a channel region of the fin and adjacent to the source region extension portion;
a drain region arranged on the fin adjacent to the gate stack; the drain region having a graduated doping concentration.