Interposer with lattice construction and embedded conductive metal structures
A lattice structure is formed in a non-silicon interposer substrate to create large cells that are multiples of through hole pitches to act as islands for dielectric fields. Each unit cell is then filled with a dielectric material. Thereafter, holes (i.e., through holes or blind holes) are created within the dielectric material in the cells. After hole formation, a conductive metal is formed into each of the holes providing an interposer. This method can enable fine pitch processing in organic-based materials, isolates the thermal coefficient of expansion (TCE) stress from metal vias to low TCE carriers and creates a path to high volume, low costs components in panel form.
1. An interposer comprising:
a lattice structure comprising a non-silicon interposer material and having a plurality of unit cells, wherein each unit cell of said plurality of unit cells extends below a topmost surface of said non-silicon interposer material and includes a plurality of conductive structures embedded in, and laterally surrounded by, a dielectric material, wherein a topmost surface of said lattice structure is coplanar with a topmost surface of said dielectric material.
2. The interposer of claim 1 , wherein said non-silicon interposer material has a thermal coefficient of expansion from 0 ppm/° C. to 15 ppm/° C.
3. The interposer of claim 2 , wherein said non-silicon interposer material is glass.
4. The interposer of claim 1 , wherein each unit cell of said plurality of unit cells is a square, a rectangle, or a triangle.
5. The interposer of claim 1 , wherein said conductive structure comprises a first conductive structure in direct contact with sidewall surfaces of said dielectric material and within each hole, another dielectric material in direct contact with sidewall surfaces of said first conductive structure, and a second conductive structure in direct contact with sidewall surfaces of said another dielectric material.
6. The interposer of claim 5 , further comprising a further dielectric material in direct contact with sidewall surfaces of said second conductive structure, and a further conductive structure in direct contact with sidewall surfaces of said further dielectric material.
7. A semiconductor structure comprising:
a non-silicon interposer disposed between a first substrate and a second substrate, wherein said non-silicon interposer comprises a lattice structure comprising a non-silicon interposer material and having a plurality of unit cells, wherein each unit cell of said plurality of unit cells extends below a topmost surface of said non-silicon interposer material and includes a plurality of conductive structures embedded in, and laterally surrounded by, a dielectric material, wherein a topmost surface of said lattice structure is coplanar with a topmost surface of said dielectric material.
8. The semiconductor structure of claim 7 , wherein said non-silicon interposer material has a thermal coefficient of expansion of from 0 ppm/° C. to 15 ppm/° C.
9. The semiconductor structure of claim 8 , wherein said non-silicon interposer material is glass.
10. The semiconductor structure of claim 7 , wherein each unit cell of said plurality of unit cells is a square, a rectangle, or a triangle.
11. The semiconductor structure of claim 7 , wherein said conductive structure comprises a first conductive structure in direct contact with sidewall surfaces of said dielectric material and within each hole, another dielectric material in direct contact with sidewall surfaces of said first conductive structure, and a second conductive structure in direct contact with sidewall surfaces of said another dielectric material.
12. The semiconductor structure of claim 7 , further comprising a further dielectric material in direct contact with sidewall surfaces of said second conductive structure, and a further conductive structure in direct contact with sidewall surfaces of said further dielectric material.
13. The interposer of claim 1 , wherein each unit cell extends entirely through said non-silicon interposer material.
14. The interposer of claim 1 , wherein each unit cell has a bottommost surface that exposes a sub-surface of said non-silicon interposer material.
15. The interposer of claim 1 , wherein a first set of said unit cells extends entirely through said non-silicon interposer material, while a second set of said units cells extends partially through said non-silicon interposer material.
16. The interposer of claim 1 , wherein each unit cell is a hole located in said non-silicon interposer material.