Memory cells and methods of forming memory cells
Some embodiments include a memory cell having a first electrode, and an intermediate material over and directly against the first electrode. The intermediate material includes stabilizing species corresponding to one or both of carbon and boron. The memory cell also has a switching material over and directly against the intermediate material, an ion reservoir material over the switching material, and a second electrode over the ion reservoir material. Some embodiments include methods of forming memory cells.
1. A memory cell, comprising:
a first electrode comprising titanium;
an intermediate material over and directly against the first electrode, the intermediate material comprising stabilizing species corresponding to one or both of carbon and boron;
a switching material over and directly against the intermediate material;
an ion reservoir material over the switching material;
a second electrode over the ion reservoir material, the second electrode comprising tungsten; and
wherein the intermediate material comprises a gradient of stabilizing species concentration, with said concentration being lowest directly adjacent the first electrode and being highest directly adjacent the switching material.
2. The memory cell of claim 1 wherein the intermediate material comprises a thickness within a range of from greater than 0 angstroms to less than or equal to about 50 angstroms.
3. The memory cell of claim 1 wherein the intermediate material comprises a thickness within a range of from greater than or equal to about 10 angstroms to less than or equal to about 50 angstroms.
4. The memory cell of claim 1 wherein a surface of the intermediate material directly against the switching material comprises a total concentration of said stabilizing species of from about 15 atomic percent to about 100 atomic percent.
5. The memory cell of claim 1 wherein a surface of the intermediate material directly against the switching material comprises a total concentration of said stabilizing species of from about 90 atomic percent to about 100 atomic percent.
6. The memory cell of claim 1 wherein a surface of the intermediate material directly against the switching material comprises a total concentration of said stabilizing species of about 100 atomic percent.
7. The memory cell of claim 1 wherein:
a surface of the intermediate material directly against the switching material comprises a total concentration of said stabilizing species of from about 90 atomic percent to about 100 atomic percent; and
a surface of the intermediate material directly against the first electrode comprises a total concentration of said stabilizing species of from about 0 atomic percent to less than or equal to about 10 atomic percent.
8. The memory cell of claim 1 wherein the intermediate material comprises carbon.
9. The memory cell of claim 1 wherein the intermediate material comprises boron.
10. The memory cell of claim 1 wherein the intermediate material comprises carbon and boron.