Multilayer ceramic substrate and manufacturing thereof
A multilayer ceramic substrate includes stacked ceramic layers, and external electrodes including first conductive layers penetrating through one region of an outermost layer of the stacked ceramic layers to thereby be embedded therein, and second and third conductive layers sequentially stacked on the first conductive layers. Each of the first and second conductive layers is formed of a ceramic powder and a metal powder.
1. A multilayer ceramic substrate comprising:
a ceramic layer including a plurality of ceramic sheets stacked on one another; and
external electrodes each including a first conductive layer penetrating through one region of an outermost ceramic sheet of the ceramic layer to thereby be embedded therein, and second and third conductive layers sequentially stacked on the first conductive layer; and
a plurality of internal electrodes and a plurality of via electrodes provided in the plurality of ceramic sheets of the ceramic layer,
wherein each of the first and second conductive layers is formed of a mixture of a ceramic powder and a metal powder, and some of the plurality of via electrodes contact the first conductive layer which has an embedded portion wider than the contacting via electrode,
wherein a concentration of the ceramic powder increases from the third conductive layer to the first conductive layer.
2. The multilayer ceramic substrate of claim 1 , wherein a concentration of the ceramic powder in the first conductive layer is higher than that in the second conductive layer.
3. The multilayer ceramic substrate of claim 1 , wherein a compositional ratio of the ceramic powder and the metal powder in the first conductive layer is (20 to 30) wt % to (70 to 80) wt %.
4. The multilayer ceramic substrate of claim 1 , wherein a compositional ratio of the ceramic powder and the metal powder in the second conductive layer is (5 to 10) wt % to (90 to 95) wt %.
5. The multilayer ceramic substrate of claim 1 , wherein the third conductive layer is formed of the metal powder.
6. The multilayer ceramic substrate of claim 1 , wherein the second conductive layer protrudes from an external surface of the ceramic layer.
7. The multilayer ceramic substrate of claim 1 , wherein W 1 and W 2 satisfy W 1 ≤W 2 , in which W 1 is a width of the first conductive layer and W 2 is a width of the second conductive layer.
8. The multilayer ceramic substrate of claim 1 , wherein the ceramic layer and the external electrode are co-fired.
9. The multilayer ceramic substrate of claim 1 , wherein the ceramic powder of the first and second conductive layers is the same as that of the ceramic layer.
10. The multilayer ceramic substrate of claim 9 , wherein the ceramic powder of the first and second conductive layers further contains at least one selected from magnesium carbonate (MgCO 3 ), barium carbonate (BaCO 3 ), calcium carbonate (CaCO 3 ), and silica (SiO 2 ).
11. The multilayer ceramic substrate of claim 1 , wherein the third conductive layer covers an upper surface and side surfaces of the second conductive layer.
12. The multilayer ceramic substrate of claim 1 , wherein the outermost ceramic sheet of the ceramic layer is at least one of uppermost or lowermost ceramic sheet thereof.