Method for manufacturing silicon carbide semiconductor device
An insulating layer is formed on a substrate made of silicon carbide. By performing etching using a mask layer formed on the insulating layer, a contact hole is formed in the insulating layer to expose a contact region, which is a portion of a main surface of the substrate. The step of forming the contact hole includes a step of providing the contact region with a surface roughness Ra of not less than 0.5 nm. An electrode layer is formed in contact with the contact region. By heating the electrode layer and the substrate, siliciding reaction is caused between the electrode layer and the contact region.
1. A method for manufacturing a silicon carbide semiconductor device comprising steps of:
forming an insulating layer on a substrate having a main surface and made of silicon carbide;
forming a mask layer on said insulating layer, said mask layer having an opening;
forming a contact hole in said insulating layer to expose a contact region by etching said insulating layer using said mask layer, said contact region being a portion of said main surface of said substrate, the step of forming said contact hole including a step of providing said contact region with a surface roughness Ra of not less than 0.5 nm;
forming an electrode layer in contact with said contact region of said substrate; and
causing siliciding reaction between said electrode layer and said contact region of said substrate by heating said electrode layer and said substrate,
wherein the step of providing said contact region with a surface roughness Ra of not less than 0.5 nm includes a step of making said contact region rough, and
wherein the step of making said contact region rough includes steps of: subjecting said contact region to oxygen plasma; and etching said contact region after the step of subjecting said contact region to the oxygen plasma, and the step of etching said contact region is performed under conditions that an etching rate for silicon carbide is larger than an etching rate for silicon oxide.
2. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein said substrate has a hexagonal crystal structure.
3. The method for manufacturing the silicon carbide semiconductor device according to claim 2 , wherein said main surface of said substrate has an off angle of not more than 10° relative to a {0001} plane.
4. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein the step of forming said electrode layer includes a step of depositing a material having at least one of Ni atom and Ti atom.
5. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein the step of forming said insulating layer includes a step of providing said insulating layer with a surface roughness Ra of not less than 0.5 nm.
6. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein the step of making said contact region rough is repeatedly performed for a plurality of times.
7. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein the step of etching said contact region includes a step of performing dry etching using a gas including sulfur hexafluoride.