Patent Application
Utility
PCT National Stage
App. No. 14/912,169
· Confirmation No. 8622
METHOD FOR TREATMENT OF RECESSED STRUCTURES IN DIELECTRIC MATERIALS FOR SMEAR REMOVAL
Inventors:
Edith Steinhäuser, Stefanie Wiese, Laurence John Gregoriades, Julia Schiemann, Lutz Stamp
Applicant:
ATOTECH DEUTSCHLAND GMBH
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-03-18 | OATH |
Oath or Declaration filed | 53 | View | |
| 2018-12-17 | ABN |
Abandonment | 2 | View | |
| 2018-05-31 | CTFR |
Final Rejection | 25 | View | |
| 2018-05-31 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2018-05-31 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2018-03-16 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2018-03-16 | CLM |
Claims | 4 | View | |
| 2018-03-16 | REM |
Applicant Arguments/Remarks Made in an Amendment | 7 | View | |
| 2018-03-16 | REF.OTHER |
Other reference-Patent/Application/Search Documents | 24 | View | |
| 2018-03-16 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2018-03-16 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2017-12-18 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2017-12-18 | CTNF |
Non-Final Rejection | 36 | View | |
| 2017-12-18 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2017-12-18 | 892 |
List of references cited by examiner | 1 | View | |
| 2017-10-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2017-10-19 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2017-10-19 | CLM |
Claims | 4 | View | |
| 2017-10-19 | REM |
Applicant Arguments/Remarks Made in an Amendment | 7 | View | |
| 2017-10-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2017-07-27 | CTNF |
Non-Final Rejection | 34 | View | |
| 2017-07-27 | 892 |
List of references cited by examiner | 1 | View | |
| 2017-07-27 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2017-07-27 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2017-07-07 | RCEX |
Request for Continued Examination (RCE) | 3 | View | |
| 2017-07-07 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2017-07-07 | CLM |
Claims | 3 | View | |
| 2017-07-07 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2017-07-07 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-07-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2017-07-07 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2017-05-09 | CTFR |
Final Rejection | 27 | View | |
| 2017-05-09 | 892 |
List of references cited by examiner | 1 | View | |
| 2017-05-09 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2017-05-09 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2017-04-24 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2017-04-24 | CLM |
Claims | 3 | View | |
| 2017-04-24 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2017-04-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2017-04-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2017-02-17 | CTNF |
Non-Final Rejection | 15 | View | |
| 2017-02-17 | 892 |
List of references cited by examiner | 1 | View | |
| 2017-02-17 | FWCLM |
Index of Claims | 1 | View | |
| 2017-02-17 | SRNT |
Examiner's search strategy and results | 7 | View | |
| 2017-02-17 | 1449 |
List of References cited by applicant and considered by examiner | 4 | View | |
| 2017-02-17 | FOR |
Foreign Reference | 35 | View | |
| 2017-02-17 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2017-01-16 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2017-01-16 | CLM |
Claims | 3 | View | |
| 2017-01-16 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2017-01-16 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2017-01-16 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-11-16 | CTRS |
Requirement for Restriction/Election | 11 | View | |
| 2016-11-16 | 892 |
List of references cited by examiner | 1 | View | |
| 2016-11-16 | FWCLM |
Index of Claims | 1 | View | |
| 2016-07-14 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2016-04-04 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2016-04-04 | M903 |
Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed | 2 | View | |
| 2016-04-04 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-04-04 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2016-02-17 | PA.. |
Power of Attorney | 1 | View | |
| 2016-02-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-02-17 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 2 | View | |
| 2016-02-16 | A.PE |
Preliminary Amendment | 1 | View | |
| 2016-02-16 | SPEC |
Specification | 1 | View | |
| 2016-02-16 | CLM |
Claims | 4 | View | |
| 2016-02-16 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2016-02-16 | SPEC |
Specification | 17 | View | |
| 2016-02-16 | CLM |
Claims | 4 | View | |
| 2016-02-16 | ABST |
Abstract | 1 | View | |
| 2016-02-16 | 371P |
Documents submitted with 371 (National Stage) Applications | 24 | View | |
| 2016-02-16 | 371P |
Documents submitted with 371 (National Stage) Applications | 5 | View | |
| 2016-02-16 | 371P |
Documents submitted with 371 (National Stage) Applications | 1 | View | |
| 2016-02-16 | 371P |
Documents submitted with 371 (National Stage) Applications | 1 | View | |
| 2016-02-16 | 371P |
Documents submitted with 371 (National Stage) Applications | 10 | View | |
| 2016-02-16 | 371P |
Documents submitted with 371 (National Stage) Applications | 7 | View | |
| 2016-02-16 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2016-02-16 | FOR |
Foreign Reference | 10 | View | |
| 2016-02-16 | FOR |
Foreign Reference | 12 | View | |
| 2016-02-16 | FOR |
Foreign Reference | 67 | View | |
| 2016-02-16 | REF.OTHER |
Other reference-Patent/Application/Search Documents | 10 | View | |
| 2016-02-16 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-02-16 | N417 |
Electronic Filing System Acknowledgment Receipt | 5 | View | |
| 2016-02-16 | ADS |
Application Data Sheet | 10 | View | |
| 2016-02-16 | OATH |
Oath or Declaration filed | 3 | View | |
| 2016-02-16 | P.N.101.CONV |
PCT/RO/101 - Request form for new International Application - Conventional | 5 | View | |
| 2016-02-16 | FRPR |
Certified Copy of Foreign Priority Application | 20 | View | |
| 2016-02-16 | ABST |
Abstract | 1 | View | |
| 2016-02-16 | SPEC |
Specification | 16 | View | |
| 2016-02-16 | CLM |
Claims | 4 | View | |
| 2016-02-16 | OATH |
Oath or Declaration filed | 5 | View | |
| 2016-02-16 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Edith Steinhäuser
Berlin, GERMANY
Stefanie Wiese
Berlin, GERMANY
Laurence John Gregoriades
Berlin, GERMANY
Julia Schiemann
Berlin, GERMANY
Lutz Stamp
Berlin, GERMANY
Attorneys & Agents of Record
Classification
USPC
427/304
C23G1/103
B08B9/027
C11D7/08
C11D7/10
C11D7/263
C23C18/2086
C23C18/24
C23C18/30
C23C18/40
C23C18/405
H05K3/0055
H05K2203/0789
Prosecution
- Examiner
- BAREFORD, KATHERINE A
- Art Unit
- 1718
- Customer No.
- 23908
- Docket No.
- ATODP0181WOUS
- Confirmation No.
- 8622
Foreign Priority
13185890.4
·
2013-09-25
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20160205783A1
- Pub. Date
- 2016-07-14
RELEASE OF SECURITY INTEREST
Recorded 2021-03-18
SECURITY INTEREST
Recorded 2017-02-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-02-16
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Quick Facts
- App. No.
- 14/912,169
- Filed
- 2016-02-16
- Pub. No.
- US20160205783A1
- Examiner
- BAREFORD, KATHERINE A
- Art Unit
- 1718
External Links