Silicon carbide semiconductor device having a trench with side walls and method for manufacturing same
A silicon carbide semiconductor device includes: a silicon carbide off substrate including a main surface having an off angle relative to a basal plane, the main surface being provided with a trench, the trench having a plurality of side walls and a bottom portion; a gate insulating film covering the side walls and the bottom portion; and a gate electrode provided on the gate insulating film, each of the side walls having an angle of more than 65° and not more than 80° relative to the basal plane in the trench, opening directions of the plurality of side walls being all at a silicon plane side or a carbon plane side.
1. A silicon carbide semiconductor device comprising:
a silicon carbide off substrate including a main surface having an off angle relative to a basal plane, the main surface being provided with a trench, the trench having a plurality of side walls and a bottom portion;
a gate insulating film covering the side walls and the bottom portion; and
a gate electrode provided on the gate insulating film,
each of the side walls having an angle of more than 65° and not more than 80° relative to the basal plane in the trench,
opening directions of the plurality of side walls being all at a silicon plane side or a carbon plane side, wherein
the plurality of side walls include a first side wall and a second side wall facing each other, and
a difference between an angle of the first side wall relative to the basal plane and an angle of the second side wall relative to the basal plane is not more than the off angle.
2. The silicon carbide semiconductor device according to claim 1 , wherein the silicon carbide off substrate has an off direction corresponding to a <11-20> direction.
3. The silicon carbide semiconductor device according to claim 1 , wherein the off angle of the silicon carbide off substrate is not less than 1° and not more than 8°.
4. The silicon carbide semiconductor device according to claim 1 , wherein when viewed in a plan view, the trench has a closed shape provided by the plurality of side walls continuous to one another, and all the side walls are covered with the gate insulating film.
5. The silicon carbide semiconductor device according to claim 1 , wherein the opening directions of the plurality of side walls are all at the silicon plane side.
6. The silicon carbide semiconductor device according to claim 5 , wherein a hydrogen concentration in a region within 10 nm from an interface between the silicon carbide off substrate and the gate insulating film is not less than 1×10 18 /cm 3 .
7. The silicon carbide semiconductor device according to claim 1 , wherein the opening directions of the plurality of side walls are all at the carbon plane side.
8. The silicon carbide semiconductor device according to claim 7 , wherein a nitrogen concentration in a region within 10 nm from an interface between the silicon carbide off substrate and the gate insulating film is not less than 1×10 18 /cm 3 .
9. The silicon carbide semiconductor device according to claim 1 , wherein in a cross section passing through the center of the trench, parallel to the depth direction of the trench and not perpendicular to the off direction, a shape of the trench is asymmetrical.
10. A method for manufacturing a silicon carbide semiconductor device comprising:
a step of preparing a silicon carbide off substrate having a main surface;
a first etching step of performing anisotropic etching onto the main surface to form a trench having a plurality of side walls and a bottom portion; and
a second etching step of performing isotropic etching onto each of the side walls and the bottom portion to provide each of the side walls with an angle of more than 65° and not more than 80° relative to the basal plane, wherein
the plurality of side walls include a first side wall and a second side wall facing each other, and
a difference between an angle of the first side wall relative to the basal plane and an angle of the second side wall relative to the basal plane is not more than the off angle.
11. The method for manufacturing the silicon carbide semiconductor device according to claim 10 , wherein removal depth of the silicon carbide off substrate attained by the first etching step is deeper than removal depth of the silicon carbide off substrate attained by the second etching step.
12. The method for manufacturing the silicon carbide semiconductor device according to claim 10 , wherein the first etching step includes a step of etching the main surface to provide the side wall with an angle of not less than 80° relative to the basal plane.
13. The method for manufacturing the silicon carbide semiconductor device according to claim 10 , wherein an opening direction of the side wall is at a silicon plane side, the method further comprising:
a step of forming a gate insulating film covering the side wall and the bottom portion; and
a step of introducing hydrogen into an interface between the silicon carbide off substrate and the gate insulating film.
14. The method for manufacturing the silicon carbide semiconductor device according to claim 10 , wherein an opening direction of the side wall is at a carbon plane side,
the method further comprising:
a step of forming a gate insulating film covering the side wall and the bottom portion; and
a step of introducing nitrogen into an interface between the silicon carbide off substrate and the gate insulating film.
15. The method for manufacturing the silicon carbide semiconductor device according to claim 10 , wherein in a cross section passing through the center of the trench, parallel to the depth direction of the trench and not perpendicular to the off direction, a shape of the trench is asymmetrical.