Manufacturing method of metal oxide semiconductor transistor
A manufacturing method of MOS transistor, the MOS transistor includes a substrate, a gate oxide, a gate, a source/drain region and a silicide layer. The gate oxide is disposed on the substrate and the gate is disposed on the gate oxide. The source/drain region is disposed in the substrate at two sides of the gate. The silicide layer is disposed on the source/drain region, wherein the silicide layer includes a curved bottom surface and a curved top surface, both the curved top surface and the curved bottom surface bend toward the substrate and the curved top surface is sunken from two sides thereof, two ends of the silicide layer point tips raised up over the source/drain region and the silicide layer in the middle is thicker than the silicide layer in the peripheral, thereby forming a crescent structure. The present invention further provides a manufacturing method of the MOS transistor.
1. A manufacturing method of a MOS transistor, comprising:
providing a substrate; wherein a transistor is disposed in the substrate, the transistor comprises a gate dielectric layer, a gate on the gate dielectric layer and a source/drain region in the substrate at two sides of the gate, wherein the source/drain region is higher than a top surface of the substrate;
forming a sacrificial layer on the substrate to cover the transistor;
removing a part of the sacrificial layer to form a contact hole in the sacrificial layer to expose the source/drain region, wherein the contact hole continuously shrunk from top to bottom thereof; and
forming a silicide layer through the contact hole on the exposed source/drain region, wherein an entire portion of the silicide layer is higher than the top surface of the substrate and comprises a curved bottom surface, and two ends of the silicide layer point tips raised up over the source/drain region, wherein a bottom surface of the contact hole is higher than a top surface of the source/drain region after forming the silicide layer.
2. The manufacturing method of a MOS transistor as in claim 1 , wherein when forming the silicide layer, the sacrificial layer levels with the gate.
3. The manufacturing method of a MOS transistor as in claim 1 , wherein when forming the silicide layer, the sacrificial layer levels with the source/drain region.
4. The manufacturing method of a MOS transistor as in claim 1 , wherein when forming the silicide layer, there is no sacrificial layer on the substrate.
5. The manufacturing method of a MOS transistor as in claim 1 , further comprising forming a dielectric layer on the sacrificial layer and the contact hole is formed in the sacrificial layer and the dielectric layer, wherein the dielectric layer is disposed on the sacrificial layer.
6. The manufacturing method of a MOS transistor as in claim 1 , wherein the sacrificial layer comprises SOG, BARC, APF or photoresist.
7. The manufacturing method of a MOS transistor as in claim 1 , wherein the step of forming the source/drain region comprises forming an epitaxial layer.
8. The manufacturing method of a MOS transistor as in claim 1 , wherein the step of forming the silicide layer comprises:
performing a cleaning step;
forming a metal layer to at least cover the source/drain region;
performing an annealing process to make the metal layer react with the source/drain region; and
removing the metal layer not reacted with the source/drain region.
9. The manufacturing method of a MOS transistor as in claim 1 , wherein the step of forming the transistor comprises:
forming a dummy gate on the substrate;
removing the dummy gate;
forming a high-k dielectric layer on the substrate;
performing an annealing process toward the high-k dielectric layer;
forming a low resistance layer on the high-k dielectric layer; and
forming a protective layer on the surface of the low resistance layer.
10. The manufacturing method of a MOS transistor as in claim 1 , wherein an entirety of the contact hole is between 20 nm to 28 nm.
11. The manufacturing method of a MOS transistor as in claim 1 , wherein the silicide layer is thicker in the middle than two ends thereof.
12. The manufacturing method of a MOS transistor as in claim 1 , wherein a top surface of the silicide layer is lower than a top surface of the sacrificial layer.
13. The manufacturing method of a MOS transistor as in claim 1 , wherein a bottom surface of the contact hole is higher than the top surface of the substrate.