Method to achieve ultra-high chip-to-chip alignment accuracy for wafer-to-wafer bonding process

1. A method of improving chip-to-chip alignment accuracy for circuitry-including wafer-to-wafer bonding, comprising:

providing a first stage for holding a first circuitry-including wafer and a second stage for holding a second circuitry-including wafer, each stage including a plurality of adjacent thermal actuators arranged in an array integrated with the stage;

determining planar distortions of a bonding surface of the first and second circuitry-including wafers;

mapping the planar distortions for each wafer based on the relative planar distortions thereon;

deducing necessary local thermal expansion measurements for each wafer to compensate for the relative distortions based on the mapping;

translating the thermal expansion measurements into a non-uniform wafer temperature profile model and a local heat flux profile model for each wafer;

aligning the first and second circuitry-including wafers; and

bonding the first and second wafers together while simultaneously thermally treating at least one of the wafers in situ by individually adjusting the temperature of one or more thermal actuators in the array in accordance with the wafer temperature profile model and the local heat flux model to induce thermal expansion over a surface area corresponding to the dimensions of each adjusted thermal actuator.

2. The method of claim 1 wherein the thermal actuator array has X-Y planar dimensions greater than the diameter of each wafer.

3. The method of claim 1 wherein the plurality of thermal actuators includes at least one of a Peltier element and a resistive element.

4. The method of claim 1 wherein the thermal actuator array is thermally ground via a thermal ground plane electrically interconnected with the thermal actuator array.

5. The method of claim 1 further comprising the step of, prior to deducing necessary local thermal expansion measurements for each wafer, determining whether the planar distortions for each wafer are within a prescribed tolerance.

6. The method of claim 1 wherein the thermally treating includes correcting for at least one of a local error and a substrate bow.

7. The method of claim 1 wherein the non-uniform wafer temperature profile model and local heat flux profile model, respectively, comprise at least a thermal diffusivity of the wafer, a mass density of the wafer, and a thermal conductivity of the wafer.

8. The method of claim 1 wherein determining planar distortions of a bonding surface of the first and second circuitry-including wafers comprises determining the position of at least one distortion mark on each wafer.

9. The method of claim 1 wherein mapping the planar distortions for each wafer includes creating an alignment model for each wafer based on the relative planar distortions thereon, and wherein the alignment model incorporates translation data, rotation data, magnification data and substrate bow data.

10. A system for improving chip-to-chip alignment accuracy for circuitry-including wafer-to-wafer bonding, comprising:

separate stages for holding a first circuitry-including wafer and a second circuitry-including wafer, each stage including a plurality of adjacent thermal actuators arranged in an array integrated with the stage;

a processor; and

a memory having a set of instructions recorded thereon which can be carried out by the processor to cause:

determining planar distortions of a bonding surface of the first and second circuitry-including wafers;

mapping the planar distortions for each wafer based on the relative planar distortions thereon;

deducing necessary local thermal expansion measurements for each wafer to compensate for the relative distortions based on the mapping;

translating the thermal expansion measurements into a non-uniform wafer temperature profile model and a local heat flux profile model for each wafer;

aligning the first and second circuitry-including wafers; and

bonding the first and second wafers together while simultaneously thermally treating at least one of the wafers in situ by individually adjusting the temperature of one or more thermal actuators in the array in accordance with the wafer temperature profile model and the local heat flux model to induce thermal expansion over a surface area corresponding to the dimensions of each adjusted thermal actuator.

11. The system of claim 10 wherein the thermal actuator array has X-Y planar dimensions greater than the diameter of each wafer.

12. The system of claim 10 wherein the plurality of thermal actuators includes at least one of a Peltier element and a resistive element.

13. The system of claim 10 wherein the thermal actuator array is thermally ground via a thermal ground plane electrically interconnected with the thermal actuator array.

14. The system of claim 10 , wherein the thermally treating includes correcting for at least one of a local error and a substrate bow.

15. The system of claim 10 wherein the non-uniform wafer temperature profile model and local heat flux profile model, respectively, comprise at least a thermal diffusivity of the wafer, a mass density of the wafer, and a thermal conductivity of the wafer.

16. The system of claim 10 wherein determining planar distortions of a bonding surface of a first circuitry-including wafer and a second circuitry-including wafer comprises determining the position of at least one distortion mark on each wafer.

17. The system of claim 10 wherein mapping the planar distortions for each wafer includes creating an alignment model for each wafer based on the relative planar distortions thereon, and wherein the alignment model incorporates translation data, rotation data, magnification data and substrate bow data.