Channel strain and controlling lateral epitaxial growth of the source and drain in FinFET devices
View Patent ↗A multi-gate finFET structure and formation thereof. The multi-gate finFET structure has a first gate structure that includes an inner side and an outer side. Adjacent to the first gate structure is a second gate structure. The inner side of the first gate structure faces, at least in part, the second gate structure. A stress-inducing material fills a fin cut trench that is adjacent to the outer side of the first gate structure. An epitaxial semiconductor layer fills, at least in part, an area between the first gate structure and the second gate structure.
1. A multi-gate finFET structure comprising:
a first gate structure, wherein the first gate structure includes an inner side and an outer side;
a second gate structure that is adjacent to the first gate structure such that the inner side of the first gate structure faces, at least in part, the second gate structure;
a stress-inducing material that fills a fin cut trench that is adjacent to the outer side of the first gate structure; and
an epitaxial semiconductor layer, wherein the epitaxial semiconductor layer fills, at least in part, an area between the first gate structure and the second gate structure.
2. The multi-gate finFET structure of claim 1 further comprising:
a MOL ILD layer, wherein the MOL ILD layer abuts portions of the epitaxial semiconductor layer.
3. The multi-gate finFET structure of claim 1 , wherein the first and second gate structures are each one of a sacrificial gate or a true gate.
4. The multi-gate finFET structure of claim 1 , wherein one or both of the first and second gate structures include one or more of: silicon, doped polysilicon with metal silicide, tungsten, titanium, tantalum, aluminum, nickel, ruthenium, palladium, platinum, tungsten nitride, aluminum nitride, titanium nitride, tungsten silicide, nickel silicide, and titanium silicide.
5. The multi-gate finFET structure of claim 1 , wherein the stress-inducing material is a stress nitride.
6. The multi-gate finFET structure of claim 1 , wherein the stress-inducing material is one or both of: a tensile silicon nitride layer and a compressive silicon nitride layer.
7. The multi-gate finFET structure of claim 1 , wherein the epitaxial semiconductor layer is a silicon-germanium layer.
8. The multi-gate finFET structure of claim 1 further comprising a fin, wherein:
the fin terminates at, and abuts, the stress-inducing material;
the fin includes a gate dielectric layer on top of a channel;
the gate dielectric layer lies between and is in contact with 1) the channel and the first gate structure, and 2) the channel and the second gate structure; and
the epitaxial semiconductor layer penetrates the gate dielectric layer and makes contact with the channel.
9. The multi-gate finFET structure of claim 2 , wherein the MOL ILD layer is one or both of: silicon dioxide and a low-κ dielectric material.
10. The multi-gate finFET structure of claim 8 , wherein the channel includes one or more of: silicon, an alloy of silicon-germanium, a III-V compound semiconductor, and a II-VI compound semiconductor.
11. A method of forming a multi-gate finFET structure comprising:
depositing a stress-inducing material into a fin cut trench that is adjacent to an outer side of a first gate structure such that a channel, which is controlled by the first gate structure, has a first amount of strain; and
growing an epitaxial semiconductor layer between the first gate structure and a second gate structure, wherein the first amount of strain is increased to a second amount of strain as a result of the growth of the epitaxial semiconductor layer.
12. The method of claim 11 , the method comprising:
forming the first gate structure, wherein the first gate structure includes an inner side and the outer side;
forming a second gate structure that is adjacent to the first gate structure such that the inner side of the first gate structure faces, at least in part, the second gate structure;
forming the fin cut trench that is adjacent to the outer side of the first gate structure; and
forming the epitaxial semiconductor layer such that the epitaxial semiconductor layer fills, at least in part, an area between the first gate structure and the second gate structure.
13. The method of claim 11 , wherein the stress-inducing material includes one or more of: a stress nitride layer, a tensile silicon nitride layer and a compressive silicon nitride layer.
14. The method of claim 11 , wherein each of the first and second gate structures are one of: a sacrificial gate or a true gate.
15. The method of claim 11 , wherein the first and second gate structures include silicon, doped polysilicon with metal silicide, tungsten, titanium, tantalum, aluminum, nickel, ruthenium, palladium, platinum, tungsten nitride, aluminum nitride, titanium nitride, tungsten silicide, nickel silicide, and titanium silicide.
16. The method of claim 11 , wherein the epitaxial semiconductor layer is a silicon-germanium layer.
17. The method of claim 11 , wherein the channel includes one or more of: silicon, an alloy of silicon-germanium, a III-V compound semiconductor, and a II-VI compound semiconductor.
18. The method of claim 11 further comprising:
depositing a MOL ILD layer on an intermediate of the multi-gate finFET structure; and
controlling lateral source drain epitaxial growth of the epitaxial semiconductor layer.
19. The method of claim 11 , wherein the stress-inducing material fills a majority of the fin cut trench.
20. The method of claim 18 , wherein the MOL ILD layer is one or both of: silicon dioxide and a low-κ dielectric material.