Stress retention in fins of fin field-effect transistors
Embodiments of the present invention provide a structure and method of minimizing stress relaxation during fin formation. Embodiments may involve forming a looped spacer on an upper surface of a substrate and adjacent to at least a sidewall of a mandrel. The mandrel may be removed, leaving the looped spacer on the substrate. An exposed portion of the substrate may be removed to form a looped fin below the looped spacer. The spacer may be removed, leaving a looped fin. A looped fin formation may reduce stress relaxation compared to conventional fin formation methods. Embodiments may include forming a gate over a looped portion of a looped fin. Securing a looped portion in position with a gate may decrease stress relaxation in the fin. Thus, a looped fin with a looped portion of the looped fin under a gate may have substantially reduced stress relaxation compared to a conventional fin.
1. A method of forming fin field-effect transistor with a looped fin comprising:
forming a looped spacer around a first portion of a mandrel on an upper surface of a substrate;
wherein the looped spacer is adjacent to a first sidewall of the first portion of the mandrel, an inner edge of the first portion of the mandrel, and a second sidewall of the first portion of the mandrel;
removing the first portion of the mandrel;
removing an exposed portion of the substrate, wherein the removing the exposed portion of the substrate forms the looped fin below the looped spacer;
removing the looped spacer; and
forming a gate extending in a first direction on the upper surface of the substrate and on a curved portion of the looped fin, wherein at least a portion of the curved portion of the looped fin is under the gate and extends in the first direction.
2. The method of claim 1 , further comprising:
forming a confining layer on the upper surface of the substrate parallel to at least a portion of the curved portion of the looped fin.
3. The method of claim 1 , further comprising:
forming another gate on the upper surface of the substrate and the looped fin.
4. The method of claim 1 , wherein the looped fin comprises the curved portion on one end and another curved portion on another end.
5. The method of claim 1 , wherein the looped fin comprises a non-curved portion comprising one or more free surfaces.
6. The method of claim 1 , further comprising:
forming a confining layer on the upper surface of the substrate perpendicular to and contacting a non-curved portion of the looped fin, wherein the non-curved portion comprises one or more free surfaces.
7. The method of claim 1 , wherein the looped fin comprises a semiconductor material having a compressive stress.
8. The method of claim 1 , wherein the method is performed on one or more portions of the substrate to form one or more curved portions of the looped fin.
9. A method of forming a fin field-effect transistor with a looped fin comprising:
forming a mandrel on an upper surface of a semiconductor on insulator (SOI) layer, wherein the SOI layer comprises a dielectric layer on a first semiconductor layer and a second semiconductor layer on the dielectric layer;
removing a portion of the mandrel down to the upper surface of the second semiconductor layer,
wherein removing the portion of the mandrel produces a first remaining portion of the mandrel and a second remaining portion of the mandrel,
forming a looped spacer on the upper surface of the second semiconductor layer around an inner region of the first remaining portion of the mandrel,
wherein the inner region comprises a first sidewall extending vertically from the SOI layer, an inner edge extending vertically from the SOI layer, and a second sidewall extending vertically from the substrate, and
wherein the looped spacer is adjacent to the first sidewall, the inner edge, and the second sidewall;
removing the first remaining portion of the mandrel and the second remaining portion of the mandrel;
removing an exposed portion of the semiconductor layer, wherein the removing the exposed portion of the semiconductor layer forms the looped fin below the looped spacer;
removing the looped spacer; and
forming a gate extending in a first direction on a curved portion of the looped fin, wherein at least a portion of the curved portion of the looped fin is under the gate and extends in the first direction.
10. The method of claim 9 , further comprising:
forming a confining layer on the upper surface of the dielectric layer parallel to at least a portion of the curved portion of the looped fin.
11. The method of claim 9 , further comprising:
forming another gate on the upper surface of the dielectric and the looped fin.
12. The method of claim 9 , wherein the looped fin comprises a non-curved portion comprising one or more free surfaces.
13. The method of claim 9 , further comprising:
forming a confining layer on the upper surface of the SOI layer perpendicular to and contacting a non-curved portion of the looped fin, wherein the non-curved portion comprises one or more free surfaces.
14. The method of claim 9 , wherein the looped fin comprises a semiconductor material having a compressive stress.
15. The method of claim 9 , wherein the method is performed on one or more portions of the SOI layer to form one or more curved portions of the looped fin.