Wafer level chip scale package (WLCSP) having edge protection
View Patent ↗A wafer level chip scale package (WLCSP) includes a semiconductor substrate, a back end of line (BEOL) layer on the semiconductor substrate and having a peripheral edge recessed inwardly from an adjacent peripheral edge of the semiconductor substrate. A first dielectric layer is over the BEOL layer and wraps around the peripheral edge of the BEOL layer. A redistribution layer is over the first dielectric layer and a second dielectric layer is over the redistribution layer.
1. A wafer level chip scale package (WLCSP) comprising:
a semiconductor substrate;
a back end of line (BEOL) layer on said semiconductor substrate, said BEOL layer comprising at least one insulating layer and an uppermost passivation layer, and having a peripheral edge recessed inwardly from an adjacent peripheral edge of said semiconductor substrate;
a first dielectric layer over said BEOL layer and wrapping around the peripheral edge of said BEOL layer to confine the peripheral edge of the BEOL layer in compressive stress and having a peripheral edge recessed inwardly from an adjacent peripheral edge of the semiconductor substrate;
a redistribution layer over said first dielectric layer; and
a second dielectric layer over said redistribution layer and having a peripheral edge recessed inwardly from the adjacent peripheral edge of the first dielectric layer.
2. The WLCSP according to claim 1 wherein said uppermost passivation layer has a plurality of bond pad openings therein, and a plurality of bond pads with each bond pad exposed through a respective one of said plurality of bond pad openings.
3. The WLCSP according to claim 2 further wherein said second dielectric layer has a plurality of solder ball openings therein; and further comprising a plurality of solder balls with each solder ball extending through a respective one of said plurality of solder ball openings.
4. The WLCSP according to claim 3 further wherein said redistribution layer comprises a plurality of conductive traces with each conductive trace extending between a given bond pad and a corresponding solder ball.
5. The WLCSP according to claim 1 further wherein said semiconductor substrate comprises silicon.
6. A wafer level chip scale package (WLCSP) comprising:
a semiconductor substrate;
a back end of line (BEOL) layer on said semiconductor substrate, said BEOL layer comprising at least one insulating layer and an uppermost passivation layer, and having a peripheral edge recessed inwardly from an adjacent peripheral edge of said semiconductor substrate;
a first dielectric layer over said BEOL layer and wrapping around the peripheral edge of said BEOL layer to confine the peripheral edge of the BEOL layer in compressive stress and having a peripheral edge recessed inwardly from an adjacent peripheral edge of said semiconductor substrate;
a redistribution layer over said first dielectric layer and having a peripheral edge; and
a second dielectric layer over said redistribution layer and wrapping around the peripheral edge of the redistribution layer and having a peripheral edge recessed inwardly from the adjacent peripheral edge of said first dielectric layer.
7. The WLCSP according to claim 6 wherein said uppermost passivation layer has a plurality of bond pad openings therein, and a plurality of bond pads with each bond pad exposed through a respective one of said plurality of bond pad openings.
8. The WLCSP according to claim 7 further wherein said second dielectric layer has a plurality of solder ball openings therein; and further comprising a plurality of solder balls with each solder ball extending through a respective one of said plurality of solder ball openings.
9. The WLCSP according to claim 8 further wherein said redistribution layer comprises a plurality of conductive traces with each conductive trace extending between a given bond pad and a corresponding solder ball.
10. The WLCSP according to claim 6 further wherein said semiconductor substrate comprises silicon.
11. A method for making a wafer level chip scale package (WLCSP) comprising:
forming a back end of line (BEOL) layer on a semiconductor substrate, said BEOL layer comprising at least one insulating layer and an uppermost passivation layer, and having a peripheral edge recessed inwardly from an adjacent peripheral edge of the semiconductor substrate;
forming a first dielectric layer over the BEOL layer and wrapping around the peripheral edge of the BEOL layer to confine the peripheral edge of the BEOL layer in compressive stress and having a peripheral edge recessed inwardly from an adjacent peripheral edge of the semiconductor substrate;
forming a redistribution layer over the first dielectric layer; and
forming a second dielectric layer over the redistribution layer and having a peripheral edge recessed inwardly from the adjacent peripheral edge of the first dielectric layer.
12. The method according to claim 11 wherein the uppermost passivation layer has a plurality of bond pad openings therein, and a plurality of bond pads with each bond pad exposed through a respective one of the plurality of bond pad openings.
13. The method according to claim 12 wherein the second dielectric layer has a plurality of solder ball openings therein; and further comprising a plurality of solder balls with each solder ball extending through a respective one of the plurality of solder ball openings.
14. The method according to claim 13 wherein the redistribution layer comprises a plurality of conductive traces with each conductive trace extending between a given bond pad and a corresponding solder ball.
15. The method according to claim 11 wherein the semiconductor substrate comprises silicon.