IP Library Granted Patent US 10,025,123
Granted Patent B1
US 10,025,123 · App. 14/969,906 · Granted Jul 17, 2018

Guided wave opto-acoustic device

Inventors: Peter Thomas Rakich (Albuquerque, NM); Heedeuk Shin (Rochester, NY); Ryan Camacho (Albuquerque, NM); Jonathan Albert Cox (Albuquerque, NM); Robert L. Jarecki, Jr. (Albuquerque, NM); Wenjun Qiu (Chicago, IL); Zheng Wang (Austin, TX)
Assignees: National Technology & Engineering Solutions of Sandia, LLC; Wenjun Qiu; Zheng Wang
G02F1/125
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Quick Facts
Patent No.
US 10,025,123
App. No.
14/969,906
Granted
Jul 17, 2018
Kind
B1
Abstract

The various technologies presented herein relate to various hybrid phononic-photonic waveguide structures that can exhibit nonlinear behavior associated with traveling-wave forward stimulated Brillouin scattering (forward-SBS). The various structures can simultaneously guide photons and phonons in a suspended membrane. By utilizing a suspended membrane, a substrate pathway can be eliminated for loss of phonons that suppresses SBS in conventional silicon-on-insulator (SOI) waveguides. Consequently, forward-SBS nonlinear susceptibilities are achievable at about 3000 times greater than achievable with a conventional waveguide system. Owing to the strong phonon-photon coupling achievable with the various embodiments, potential application for the various embodiments presented herein cover a range of radiofrequency (RF) and photonic signal processing applications. Further, the various embodiments presented herein are applicable to applications operating over a wide bandwidth, e.g. 100 MHz to 50 GHz or more.

Claims (26)

1. Apparatus comprising:

a suspended membrane;

at least one optical waveguiding member included in the membrane and at least partially extensive in a longitudinal optical propagation direction; and

at least one phononic resonator defined in the membrane, extensive in said longitudinal direction, and traversed by the optical waveguiding member.

2. The apparatus of claim 1 , wherein each phononic resonator comprises at least one acoustically reflective feature.

3. The apparatus of claim 2 , wherein the acoustically reflective feature is a slot.

4. The apparatus of claim 2 , wherein the acoustically reflective feature is a phononic crystal.

5. The apparatus of claim 2 , wherein the acoustically reflective feature is a Bragg grating.

6. The apparatus of claim 2 , wherein each phononic resonator comprises at least one pair of acoustically reflective features disposed on opposite sides of the optical waveguide.

7. The apparatus of claim 1 , wherein the optical waveguiding member traverses two or more phononic resonators.

8. The apparatus of claim 1 , wherein the membrane has a composition that is substantially silicon nitride and the optical waveguiding member has a composition that is substantially silicon.

9. The apparatus of claim 1 , wherein the membrane and the at least one phononic resonator are conformed to support the propagation of phonons having at least some frequencies in the range 100 MHz-50 GHz on a path that traverses the at least one phononic resonator.

10. The apparatus of claim 1 , wherein the membrane is supported, and offset from a silicon substrate, by a patterned layer of silicon dioxide.

11. The apparatus of claim 1 , further comprising:

a modulator arranged to modulate pump light received from a pump source in response to a radiofrequency waveform received from a radiofrequency generator;

an input combiner arranged to combine an optical input signal with the modulated pump light and to inject the combined light into the optical waveguiding member; and

an output coupling element arranged to extract an output optical signal from the optical waveguiding member.

12. A method, comprising:

injecting pump light and probe light into a waveguide core supported on a membrane in which at least one phononic resonator having a phononic resonance is defined;

extracting the probe light after the probe light has traversed the membrane in a longitudinal optical propagation direction; and

recovering an optical signal from the extracted probe light;

wherein the pump light is modulated at a frequency related to a said phononic resonance;

and wherein the injecting of light into the waveguide core generates phonons that propagate within the membrane in a direction transverse to the longitudinal optical propagation direction.

13. The method of claim 12 , wherein the waveguide core is silicon and the membrane layer is silicon nitride.

14. The method of claim 12 , wherein the phonons have a frequency in the range 100 MHz-50 GHz.

15. The method of claim 12 , wherein the phonons are incident upon a reflector surface that redirects the phonons in a direction substantially toward the waveguide core.

Assignments (1)
CHANGE OF NAME Recorded Feb 1, 2018
From: SANDIA CORPORATION
To: NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC
Reel/Frame 045217/0870 →
Continuity (2)
Division 14055774 · Oct 16, 2013
Provisional Application 61785163 · Mar 14, 2013
Cited By (2)
US 12,329,042 US 12,498,615