High-voltage semiconductor device with finger-shaped insulation structure
A high-voltage semiconductor device includes a semiconductor substrate, a gate structure, a drain, an insulation structure, and a plurality of conductive structures. The insulation structure is disposed in the semiconductor substrate and disposed between the gate structure and the drain. The insulation structure includes a plurality of insulation units disposed separately from one another. Each of the conductive structures is embedded in one of the insulation units.
1. A high-voltage semiconductor device, comprising:
a semiconductor substrate;
a gate structure disposed on the semiconductor substrate;
a drain disposed in the semiconductor substrate;
an insulation structure disposed in the semiconductor substrate and disposed between the gate structure and the drain, wherein the insulation structure comprises a plurality of insulation units separated from one another; and
a plurality of conductive structures, wherein each of the conductive structures is embedded in one of the insulation units, and a topmost surface of each of the conductive structures and a topmost surface of the insulation unit corresponding to the conductive structure are coplanar.
2. The high-voltage semiconductor device of claim 1 , wherein the conductive structure is disposed between the gate structure and the drain in a first direction, and the insulation units of the insulation structure are repeatedly disposed in a second direction.
3. The high-voltage semiconductor device of claim 2 , wherein the first direction is perpendicular to the second direction.
4. The high-voltage semiconductor device of claim 2 , wherein each of the insulation units extends in the first direction, and the insulation structure comprises a finger-shaped insulation structure.
5. The high-voltage semiconductor device of claim 1 , wherein an electrical potential of each of the conductive structures is equal to an electrical potential of the gate structure.
6. The high-voltage semiconductor device of claim 1 , wherein an electrical potential of each of the conductive structures is equal to an electrical potential of the drain.
7. The high-voltage semiconductor device of claim 1 , wherein an electrical potential of each of the conductive structures is different from an electrical potential of the gate structure and/or an electrical potential of the drain.
8. The high-voltage semiconductor device of claim 1 , wherein the gate structure overlaps a part of the insulation structure in a vertical direction.
9. The high-voltage semiconductor device of claim 1 , further comprising:
a first well disposed in the semiconductor substrate; and
a second well disposed in the semiconductor substrate, wherein the first well and the second well are disposed in the semiconductor substrate at on two opposite sides of the gate structure, and a conductivity type of the first well is different from a conductivity type of the second well.
10. The high-voltage semiconductor device of claim 9 , wherein the drain and the insulation structure are disposed in the first well.
11. The high-voltage semiconductor device of claim 10 , wherein a part of the first well is disposed between two adjacent insulation units in the insulation structure.
12. The high-voltage semiconductor device of claim 9 , further comprising a source disposed in the second well.