Devices, systems and methods including magnetic structures
A magnetic device may include a magnetic structure, a device structure, and an associated circuit. The magnetic structure may include a patterned layer of material having a predetermined magnetic property. The patterned layer may be configured to, e.g., provide a magnetic field, sense a magnetic field, channel or concentrate magnetic flux, shield a component from a magnetic field, or provide magnetically actuated motion, etc. The device structure may be another structure of the device that is physically connected to or arranged relative to the magnetic structure to, e.g., structurally support, enable operation of, or otherwise incorporate the magnetic structure into the magnetic device, etc. The associated circuit may be electrically connected to the magnetic structure to receive, provide, condition or process of signals of the magnetic device.
1. A magnetic device, comprising:
a cap mounted on a semiconductor substrate;
a magnetic structure including a patterned layer of magnetic material, the magnetic structure being disposed on top of a surface of the cap opposite to the semiconductor substrate; and
a circuit electrically coupled to the magnetic structure.
2. The magnetic device of claim 1 , wherein the patterned layer of magnetic material includes a shaped portion including at least one of: a circular region, a square region, a rectangular region, or a spiral-shaped region.
3. The magnetic device of claim 1 , wherein the patterned layer of magnetic material includes a plurality of shaped portions including at least one of: a plurality of concentric rings, a plurality of rectangular regions, a plurality of linear regions, a plurality of arcuate regions, a plurality of t-shaped regions, or a plurality of l-shaped regions.
4. The magnetic device of claim 1 , wherein the magnetic material includes at least one of:
magnetoresistive material that has an electrical resistance that varies as a function of a magnetic field experienced by the magnetic material;
a material that produces a magnetic field;
a magnetic flux conductor that has a permeability to magnetic fields above a predetermined threshold; or
a surface at an angle relative to a substrate on which the magnetic material is formed.
5. The magnetic device of claim 1 , further comprising a micromechanical structure on the semiconductor substrate and under the cap.
6. The magnetic device of claim 1 , wherein at least one of:
the magnetic structure outputs an electrical signal representing a magnetic field about the magnetic structure, and the circuit receives and processes the electrical signal representing the magnetic field; or
the magnetic structure produces an electrical signal in response to movement of a micromechanical structure that is disposed between the cap and the semiconductor substrate.
7. The magnetic device of claim 1 , further comprising a transmitting element to communicate a signal as a function of an electrical signal output by the magnetic structure.
8. The magnetic device of claim 1 , wherein the magnetic structure forms at least part of a magnetic sensor.
9. A magnetic device, comprising:
a semiconductor substrate;
a cap mounted on the semiconductor substrate;
a micromechanical structure on the semiconductor substrate and under the cap;
a magnetic structure disposed vertically relative to the cap, the magnetic structure including a patterned layer of magnetic material; and
a circuit electrically coupled to the magnetic structure.
10. The magnetic device of claim 9 , wherein the magnetic structure is below the cap, and wherein the micromechanical structure comprises a reed relay that includes the magnetic structure.
11. The magnetic device of claim 10 , further comprising a second magnetic structure that includes a patterned second layer material under the micromechanical structure.
12. The magnetic device of claim 9 , wherein the magnetic structure is on top of a surface of the cap that is opposite to the semiconductor substrate.
13. The magnetic device of claim 12 , further comprising conductive wiring to electrically connect the magnetic structure to the circuit, wherein the circuit is in the semiconductor substrate.
14. The magnetic device of claim 12 , further comprising a conductive coil on top of the surface of the cap.
15. The magnetic device of claim 9 , further comprising a magnetic flux concentrator extending along a sidewall of the cap and in a direction substantially orthogonal to the magnetic structure.
16. The magnetic device of claim 9 , wherein the micromechanical structure comprises a beam, and the beam comprises the magnetic structure.
17. The magnetic device of claim 9 , wherein the micromechanical structure comprises a beam, and the beam comprises the magnetic structure and another material.
18. A magnetic device, comprising:
a magnetic sensor including patterned magnetoresistive material, the magnetic sensor having an operational sensitivity to magnetic fields in a first direction;
a circuit electrically coupled to the magnetic sensor; and
a magnetic flux concentrator to channel and/or concentrate magnetic flux of a magnetic field toward the magnetic sensor so as to enable the magnetic sensor to sense a magnetic field in a second direction, the second direction being different than the first direction, the magnetic flux concentrator comprising a patterned layer of magnetic material on a substrate.
19. The magnetic device of claim 18 , wherein the magnetic flux concentrator comprises a second patterned layer of magnetic material adjacent to the patterned layer, the magnetic material of the second patterned layer having a different flux surface area than the magnetic material of the patterned layer.
20. The magnetic device of claim 19 , wherein the magnetic material of the second patterned layer is at least one of:
on the substrate and extends to a different height from the substrate than the magnetic material of the patterned layer; or
on a surface of a recess in the substrate.
21. The magnetic device of claim 18 , further comprising a cap on the substrate, wherein the magnetic sensor is on top of the cap.
22. The magnetic device of claim 18 , wherein the magnetic sensor comprises an anisotropic magnetoresistive sensor.
23. The magnetic device of claim 18 , further comprising a cap on the substrate, wherein the magnetic flux concentrator is disposed along a sidewall of the cap.
24. The magnetic device of claim 23 , wherein the magnetic sensor is disposed on the substrate laterally from the cap.
25. The magnetic device of claim 18 , wherein the first direction is a horizontal direction and the second direction is a vertical direction.
26. The magnetic device of claim 18 , wherein the magnetic material is patterned so as to enhance sensitivity of the magnetic sensor to magnetic fields.