Granted Patent B2

US 10,155,879 · App. 14/975,969 · Granted Dec 18, 2018

Abstract

Claims (89)

1. A non-aqueous, graftable coating composition comprised of a homogenous solution of a polymer and a spin casting organic solvent, wherein

the composition does not contain acidic compounds, coloring particles, pigments or dyes, and

the polymer has a linear polymer chain structure which is comprised of repeat units derived from monomers containing a single polymerizable olefinic carbon double bond, and

the polymer contains at least one triarylmethyl chalcogenide containing moiety which is selected from the group consisting of repeat units having structure (I), an end chain group unit of structure (II), and mixtures thereof, and the polymer does not contain any repeat units or end groups containing water ionizable groups, ionic groups, free thiol groups, or free hydroxy groups,

where A 1 , A 2 , and A 3 are independently an aryl or a substituted aryl, and

Y is a chalcogen selected from S, Se or Te, and

X 1 and X 2 are individually selected organic spacers, and

P 1 is an organic polymer repeat unit moiety derived from a monomer containing a single polymerizable olefinic carbon double bond, and

P 2 is an end group moiety derived from a monomer containing a single polymerizable olefinic carbon double bond, and

represents a direct valence bond to the linear polymer.

2. The composition of claim 1 where in the polymer at least one of A 1 , A 2 , or A 3 is a substituted aryl substituted with an alkyloxy moiety.

3. The composition of claim 1 where the polymer is a random copolymer further comprised of repeat units derived from monomers containing a single polymerizable carbon double bond which do not contain a pendant triarylmethyl chalcogenide.

4. The composition of claim 1 where in the polymer the organic spacers X 1 , and X 2 are independently selected from an alkylene, fluoroalkylene, an oxyalkylene, oxyfluoroalkylene, an arylene, a fluoroarylene, an oxyarylene, a carbonylalkylene, a carbonyloxyalkylene, an oxycarbonyloxyalkylene, or a carbonyl —N(R′)—) alkylene, where R′ is hydrogen, an alkyl, or an aryl.

5. The composition of claim 1 where in the polymer the repeat units (I) have structure (Ia), and the end chain group units (II) have structure (IIa),

where R 1 , R 2 , R 3 , R 4 , R 5 , R 1a , R 2a , R 3a , R 4a , R 5a , R 1b , R 2b , R 3b , R 4b , and R 5b are independently a hydrogen, an alkyl, an alkyloxy, an alkyloxycarbonyl, an alkoxyloxycarbonyloxy, a fluoroalkyl, a fluoroalkyloxy, an aryloxy, an aryloxycarbonyl, an aryloxycarbonyloxy, a trialkylsilyl, a trialkylsilyloxy, Cl, Br, or I.

6. The composition of claim 5 where in the polymer, the repeat units of structure (Ia) are selected from ones having structure (III), structure (IV), structure (V), structure (VI) and mixtures thereof;

where R 6 is a hydrogen, Cl, Br, CN, an alkyl, or a fluoroalkyl, and

R 7 and R 8 are independently hydrogen, an alkyl, an alkoxycarbonyl, or CO 2 H, and

R 9 is hydrogen or an alkyl, and

R 10 is a hydrogen or an alkyl, and

R 11 is a hydrogen or an alkyl, and

R 12 and R 13 are independently hydrogen or an alkyl.

7. The composition of claim 5 where in the polymer the end group of structure (IIa) is selected from ones having structure (IIIa), structure (IVa), structure (Va) and structure (VIa);

where R 6 is hydrogen, Cl, Br, CN, an alkyl, or a fluoroalkyl, and

R 7 and R 8 are independently hydrogen, an alkyl, an alkoxycarbonyl, or CO 2 H, and

R 10 is an alkyl, and

R 9 , R 14 , R 15 and R 17 are independently hydrogen, an alkyl, a fluoroalkyl, an alkoxy, an aryl, or an alkylenearyl, and

R 16 is hydrogen, an alkyl, a fluoroalkyl, an alkoxy, an alkoxycarbonyl, an alkoxycarbonyloxy, an aryl, an aryloxy, an alkylenearyl, a trialkylsilyl, or a trialkylsiloxy.

8. The composition of claim 5 where the polymer further comprises polymer repeat units not having a pendant triarylmethyl chalcogenide moieties selected from ones having structures (VII), (VIII), (VIV), and (VV),

where X 3 is an alkylene, a fluoroalkylene, an arylene, a fluoroarylene, a carbonyl, a carbonyloxy, or a direct valence bond, X 4 is an alkylene, a fluoroalkylene, an arylene spacer, a fluoroarylene, an oxy, a carbonyl, a carbonyloxy, an oxycarbonyloxy or a direct valence bond, R 18 is H, an alkyl, a fluoroalkyl, a trialkylsilyl, an aryl, a fluoroaryl, or an arylene(trialkylsilyl), R 19 is an alkyl, a fluoroalkyl, a trialkylsilyl, an aryl, a fluoroaryl, or an arylene(trialkylsilyl).

9. The composition of claim 5 where the polymer only comprises an end group (IIa) and repeat units not having a pendant triarylmethyl chalcogenide moieties selected from the group consisting of ones having structures (VII), (VIII), (VIV), (VV), and mixtures of these

where X 3 is an alkylene, a fluoroalkylene, an arylene, a fluoroarylene, a carbonyl, a carbonyloxy, or a direct valence bond, X 4 is an alkylene, a fluoroalkylene, an arylene spacer, a fluoroarylene, an oxy, a carbonyl, a carbonyloxy, an oxycarbonyloxy or a direct valence bond, R 18 is H, an alkyl, a fluoroalkyl, a trialkylsilyl, an aryl, a fluoroaryl, or an arylene(trialkylsilyl), and R 19 is an alkyl, a fluoroalkyl, a trialkylsilyl, an aryl, a fluoroaryl, or an arylene(trialkylsilyl).

10. The composition of claim 1 , wherein said spin casting organic solvent is selected from the group consisting of a glycol ether derivative, a glycol ether ester derivative, a carboxylate, a carboxylate, of a di-basic acid, a dicarboxylates of glycols, a hydroxy carboxylates, a ketone ester, an alkoxycarboxylic acid ester, a ketone derivative, a ketone ether derivative, a ketone alcohol derivative, a ketal, an acetal, gamma-butyrolactone (GBL), an amide derivative, anisole, and mixtures thereof.

11. The composition of claim 1 , wherein said spin casting organic solvent is selected from the group consisting of

a glycol ether derivative selected from the group consisting of ethyl cellosolve, methyl cellosolve, propylene glycol monomethyl ether (PGME), diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, dipropylene glycol dimethyl ether, propylene glycol n-propyl ether, and diethylene glycol dimethyl ether;

a glycol ether ester derivative selected from the group consisting of ethyl cellosolve acetate, methyl cellosolve acetate, and propylene glycol monomethyl ether acetate (PGMEA);

a carboxylate selected from the group consisting of ethyl acetate, n-butyl acetate, and amyl acetate;

a carboxylate of a di-basic acid, selected from the group consisting of diethyloxylate, and diethylmalonate;

a dicarboxylates of a glycol selected from the group consisting of ethylene glycol diacetate and propylene glycol diacetate;

a hydroxy carboxylate selected from the group consisting of methyl lactate, ethyl lactate (EL), ethyl glycolate, and ethyl-3-hydroxy propionate;

a ketone ester selected from the group consisting of methyl pyruvate and ethyl pyruvate;

an alkoxycarboxylic acid ester selected from the group consisting methyl 3-m ethoxypropionate, ethyl 3-ethoxypropionate, ethyl 2-hydroxy-2-methylpropionate, and methylethoxypropionate;

a ketone derivative selected from the group consisting of methyl ethyl ketone, acetyl acetone, cyclopentanone, cyclohexanone, and 2-heptanone;

a ketone ether derivative, selected from the group consisting of diacetone alcohol methyl ether;

a ketone alcohol derivative selected from the group consisting of acetol and diacetone alcohol;

a ketal or acetal selected from the group consisting of 1,3 dioxalane and diethoxypropane;

gamma-butyrolactone (GBL);

an amide derivative selected from the group consisting of dimethylacetamide and dimethylformamide;

anisole;

and mixtures thereof.

12. A process of forming a grafted coating film on a substrate comprised of steps a), b), and c):

a) coating a film on a substrate using the composition of claim 1 ,

b) baking the film at a temperature between 80 to 300° C., and

c) washing the film with a solvent to remove un-grafted polymer leaving behind the grafted film.

13. A process for self-assembly comprised of steps a) to f):

a) coating a film on a substrate using the composition of claim 1 ,

b) baking the film at a temperature between 80 to 300° C.,

c) washing the film with a solvent to remove un-grafted polymer leaving behind the grafted film,

d) coating a film of a block copolymer on the grafted film,

e) applying a solvent bake to remove solvent from coasting step d), and

f) applying an annealing bake to enable self-assembly of the block copolymer.

14. A process of forming a grafted coating film selectively onto metal patterns on a patterned substrate containing metal patterns comprising steps a), b), and c);

a) coating a film on a patterned substrate using the composition of claim 1 where Y is S, Se or Te,

b) baking the film at a temperature between 100 to 250° C., and

c) washing the film with a solvent to remove un-grafted polymer leaving behind the grafted film on the metal patterns.

15. A non-aqueous, graftable coating composition comprised of a homogenous solution of a polymer and a spin casting organic solvent, wherein

the composition does not contain acidic compounds, coloring particles, pigments or dyes, and

the polymer has a linear polymer chain structure which is comprised of repeat units derived from monomers containing a single polymerizable olefinic carbon double bond, and

the polymer contains at least one triarylmethyl chalcogenide containing moiety as an end chain group unit of structure (IIa), and the polymer does not contain any repeat units or end groups containing water ionizable groups, ionic groups, free thiol groups, or free hydroxy groups,

and

where

Y is a chalcogen selected from O, S, Se or Te, and

X 2 is an organic spacer, and

P 2 is an end group moiety derived from a monomer containing a single polymerizable olefinic carbon double bond,

represents a direct valence bond to the linear polymer, and

where R 1 , R 2 , R 3 , R 4 , R 5 , R 1a , R 2a , R 3a , R 4a , R 5a , R 1b , R 2b , R 3b , R 4b , and R 5b are independently a hydrogen, an alkyl, an alkyloxy, an alkyloxycarbonyl, an alkoxyloxycarbonyloxy, a fluoroalkyl, a fluoroalkyloxy, an aryloxy, an aryloxycarbonyl, an aryloxycarbonyloxy, a trialkylsilyl, a trialkylsilyloxy, Cl, Br, or I, and

where the polymer only comprises an end group (IIa) and repeat units not having a pendant triarylmethyl chalcogenide moieties selected from the group consisting of ones having structures (VII), (VIII), (VIV), (VV), and mixtures of these

where X 3 is an alkylene, a fluoroalkylene, an arylene, a fluoroarylene, a carbonyl, a carbonyloxy, or a direct valence bond, X 4 is an alkylene, a fluoroalkylene, an arylene spacer, a fluoroarylene, an oxy, a carbonyl, a carbonyloxy, an oxycarbonyloxy or a direct valence bond, R 18 is H, an alkyl, a fluoroalkyl, a trialkylsilyl, an aryl, a fluoroaryl, or an arylene(trialkylsilyl), and R 19 is an alkyl, a fluoroalkyl, a trialkylsilyl, an aryl, a fluoroaryl, or an arylene(trialkylsilyl).

16. A process of forming a grafted coating film on a substrate comprised of steps a), b), and c):

a) coating a film on a substrate using the composition of claim 15 ,

b) baking the film at a temperature between 80 to 300° C., and

c) washing the film with a solvent to remove un-grafted polymer leaving behind the grafted film.

17. A process for self-assembly comprising steps a) to f):

a) coating a film on a substrate using the composition of claim 15 ,

b) baking the film at a temperature between 80 to 300° C.,

c) washing the film with a solvent to remove un-grafted polymer leaving behind the grafted film,

d) coating a film of a block copolymer on the grafted film,

e) applying a solvent bake to remove solvent from coasting step d), and

f) applying an annealing bake to enable self-assembly of the block copolymer.

Assignments (6)