Materials containing metal oxides, processes for making same, and processes for using same
View Patent ↗Compositions having a high metal content comprising a metal salt solution, a stabilizer and one or more optional additives, wherein the metal salt solution comprises a metal ion, a counter ion and a solvent. The compositions are useful for forming films on substrates in the manufacture of solid state and integrated circuit devices.
1. A composition comprising:
a metal salt solution comprising:
a metal ion selected from the group consisting of Zr, Al, Ti, Hf, W, Mo, Sn, In, Ga, Zn and combinations thereof; and
a counter ion selected from the group consisting of nitrates, sulfates, acetates, fluorinated alkylacetates, fluorinated alkylsulfonates, acrylates, methacrylates and combinations thereof; and
a solvent;
a stabilizer comprising a lactone, wherein the stabilizer is present in the composition at a content of not more than 10 wt %; and
an optional additive selected from the group consisting of catalysts, crosslinkers, photoacid generators, organic polymers, inorganic polymers, surfactants, wetting agents, anti-foam agents, thixotropic agents and combinations thereof.
2. The composition of claim 1 wherein the composition has an organic content from the counterion and optional additive that is no more than 25 wt %.
3. The composition of claim 1 having a total solid content ranging from 2 wt % to 40 wt %.
4. The composition of claim 1 wherein the metal ion is Zr.
5. The composition of claim 1 wherein the metal ion is Al.
6. The composition of claim 1 wherein the counterion is selected from the group consisting of alkylsulfonates and nitrates.
7. The composition of claim 1 wherein the metal salt is selected from the group consisting of zirconyl nitrate, aluminum nitrate, zirconyl methacrylate, aluminum sulfate, titanium oxysulfate, aluminum trifluoroacetate, aluminum trifluoromethylsulfonate, and combinations thereof.
8. The composition of claim 1 wherein the solvent is selected from the group consisting of water, alcohols, esters, alkylcarboxylic acids, ketones, lactones, diketones, and combinations thereof.
9. The composition of claim 1 wherein the lactone is selected from the group consisting of α-acetolactone, β-propiolactone, gamma-valerolactone, gamma-butyrolactone and combinations thereof.
10. The composition according to claim 1 wherein the organic content from the counterion and optional additive is not more than 10 wt %.
11. The composition according to claim 1 wherein the organic content from the counterion and optional additive is not more than 5 wt %.
12. A process for making an aluminum trifuoromethylsulfonate composition comprising the step of dissolving aluminum trifluoromethylsulfonate in a mixture comprising a solvent and a lactone to form a solution of aluminum trifluoromethylsulfonate in the mixture comprising the lactone and the solvent.
13. A process for coating a substrate comprising the steps of:
applying a composition on the substrate; and
heating the coated substrate to form a cured film,
wherein the composition comprises:
a metal salt solution comprising:
a metal ion selected from the group consisting of Ti, Zr, Hf, W, Mo, Sn, Al, In, Ga, Zn and combinations thereof; and
a counter ion selected from the group consisting of nitrates, sulfates, acetates, fluorinated alkylacetates, fluorinated alkylsulfonates, acrylates, methacrylates and combinations thereof; and
a solvent;
a stabilizer comprising a lactone, wherein the stabilizer is present in the composition at a content of not more than 10 wt %; and
an optional additive selected from the group consisting of catalysts, crosslinkers, photoacid generators, organic polymers, inorganic polymers, surfactants, wetting agents, anti-foam agents, thixotropic agents and combinations thereof.