METHOD OF MANUFACTURING MULTILAYER CERAMIC ELECTRONIC COMPONENT
A method of manufacturing a multilayer ceramic electronic component includes preparing a multilayer structure in which dielectric layers containing an alumina base material and internal electrode layers containing nickel are alternately stacked, plasticizing the multilayer structure by heating to a temperature of 500 to 900° C. at a first heating rate under a first reducing atmosphere at a first hydrogen concentration, sintering the multilayer structure by heating to a temperature of 1,250° C. to 1,400° C. at a second heating rate greater than the first heating rate under a second reducing atmosphere at a second hydrogen concentration higher than the first hydrogen concentration, and then maintaining the temperature of 1,250° C. to 1,400° C., and annealing the multilayer structure by cooling the multilayer structure to room temperature at a first cooling rate.
1 . A method of manufacturing a multilayer ceramic electronic component, the method comprising steps of:
preparing a multilayer structure in which dielectric layers containing an alumina base material and internal electrode layers containing nickel are alternately stacked;
plasticizing the multilayer structure by heating the multilayer structure to a temperature of 500° C. to 900° C. at a first heating rate under a first reducing atmosphere at a first hydrogen concentration;
sintering the multilayer structure by heating the multilayer structure to a temperature of 1,250° C. to 1,400° C. at a second heating rate greater than the first heating rate under a second reducing atmosphere at a second hydrogen concentration higher than the first hydrogen concentration and then maintaining the temperature of 1,250° C. to 1,400° C.; and
annealing the multilayer structure by cooling the multilayer structure to room temperature at a first cooling rate.
2 . The method of claim 1 , wherein the dielectric layer includes 4 wt % to 15 wt % of a sintering aid relative to the alumina base material.
3 . The method of claim 1 , wherein the alumina base material is made of fine particles having an average particle diameter of 500 nm or less.
4 . The method of claim 1 , wherein the internal electrode layer includes 2 wt % to 15 wt % of a ceramic material relative to the nickel.
5 . The method of claim 1 , wherein the first heating rate is in a range of 1.5° C./min to 3° C./min.
6 . The method of claim 1 , wherein the step of plasticizing further comprises maintaining the temperature of 500° C. to 900° C., after heating the multilayer structure to the temperature of 500° C. to 900° C.
7 . The method of claim 1 , wherein the second heating rate is in a range of 5° C./min to 60° C./min.
8 . The method of claim 1 , wherein the first hydrogen concentration and the second hydrogen concentration are in a range of 0.05% to 3.0%.
9 . The method of claim 1 , wherein the sintering is carried out for 1 hour to 4 hours.
10 . The method of claim 1 , further comprising controlling the reducing atmosphere to be at a third hydrogen concentration different from the first hydrogen concentration and the second hydrogen concentration during the sintering.
11 . The method of claim 1 , wherein the first cooling rate is in a range of 1° C./min to 10° C./min.