Fin field-effect transistor (FinFET) with reduced parasitic capacitance
View Patent ↗A semiconductor device includes a substrate, a plurality of fins on the substrate, wherein the plurality of fins each include a fin channel region, first isolation regions on the substrate corresponding to active gate regions, a second isolation region on the substrate corresponding to a dummy gate region, wherein a height of the second isolation region is greater than a height of the first isolation regions, a plurality of active gate structures formed around the fins, and on the first isolation regions, and a dummy gate structure formed on the second isolation region.
1. A method for manufacturing a semiconductor device, comprising:
forming a first hardmask on a semiconductor layer of a substrate;
patterning the semiconductor layer into a plurality of fins;
depositing a first isolation material layer on the substrate and on sides of the fins;
depositing a second hardmask on the first isolation material layer, and on the plurality of fins including the first hardmask thereon;
removing a portion of the second hardmask and portions of the plurality of fins including the first hardmask thereon under the portion of the second hardmask to expose an area of the substrate, and create an opening;
depositing a second isolation material layer in the opening on the exposed area of the substrate, wherein a height of the second isolation material layer is greater than a height of the first isolation material layer;
removing the first and second hardmask layers;
removing part of the first isolation material layer to result in a top surface of the first isolation material layer being adjacent bottom portions of fin channel regions, creating first isolation regions on the substrate;
removing part of the second isolation material layer to result in a top surface of the second isolation material layer being adjacent top portions of the fin channel regions, creating a second isolation region on the substrate, wherein a height of the second isolation region is greater than a height of the first isolation regions;
forming active gate structures around the fins, and on the first isolation regions; and
forming a dummy gate structure on the second isolation region.
2. The method according to claim 1 , wherein the first and second hardmasks comprise silicon nitride (SiN).
3. The method according to claim 1 , wherein the first and second isolation material layers comprise at least one of silicon dioxide (SiO 2 ), low-temperature oxide (LTO), high-temperature oxide (HTO) and field oxide (FOX).
4. The method according to claim 1 , further comprising performing a punchthrough stop (PTS) doping process to create a PTS doped region at a lower portion of each of the fins.
5. The method according to claim 1 , wherein the second hardmask comprises a same material as the first hardmask.
6. The method according to claim 1 , wherein a thickness of the second hardmask is equal or substantially equal to a thickness of the fin channel regions.
7. The method according to claim 1 , wherein the second isolation material layer comprises a same material as the first isolation material layer.
8. The method according to claim 1 , wherein the removing of the parts of the first and second isolation material layers comprises reducing the heights of the first and second isolation material layers by a same amount.
9. The method according to claim 1 , wherein the removing of the parts of the first and second isolation material layers comprises reducing the heights of the first and second isolation material layers by an amount equal to or substantially equal to a thickness of the first hardmask and a thickness of the fin channel regions.
10. The method according to claim 1 , wherein the height of the second isolation material layer over the first hardmask equals or is substantially equal to the thickness of the fin channel regions.
11. The method according to claim 1 , wherein the removing of the parts of the first and second isolation material layers is performed at a same time.
12. The method according to claim 1 , wherein the second isolation region is positioned between source/drain regions of adjacent transistors.
13. A method for manufacturing a semiconductor device, comprising:
forming a first hardmask on a semiconductor layer of a substrate;
patterning the semiconductor layer into a plurality of fins;
depositing a first isolation material layer on the substrate and on sides of the fins;
depositing a second hardmask on the first isolation material layer, and on the plurality of fins including the first hardmask thereon;
removing a portion of the second hardmask and portions of the plurality of fins including the first hardmask thereon under the portion of the second hardmask to expose an area of the substrate, and create an opening;
depositing a second isolation material layer in the opening on the exposed area of the substrate, wherein a height of the second isolation material layer is greater than a height of the first isolation material layer;
removing the first and second hardmask layers;
removing part of the first isolation material layer to create first isolation regions on the substrate;
removing part of the second isolation material layer to create a second isolation region on the substrate, wherein a height of the second isolation region is greater than a height of the first isolation regions;
forming active gate structures around the fins, and on the first isolation regions; and
forming a dummy gate structure on the second isolation region.
14. The method according to claim 13 , wherein the second isolation region is positioned between source/drain regions of adjacent transistors.