IP Library Granted Patent US 9,786,636
Granted Patent B2
US 9,786,636 · App. 15/008,444 · Granted Oct 10, 2017

Semiconductor device and structure

Inventors: Zvi Or-Bach (San Jose, CA); Brian Cronquist (San Jose, CA)
H01L25/0657H01L21/743H01L21/76898H01L23/36H01L23/481H01L23/485H01L23/522H01L23/5225H01L25/50H01L27/0688H01L27/088H01L29/66621H01L27/092H01L29/4236H01L29/78H01L2225/06506H01L2225/06537H01L2225/06544H01L2225/06589H01L2924/0002H01L2924/01104H01L2924/12032H01L2924/12042H01L2924/13091H01L2924/2064H01L2924/351
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Quick Facts
Patent No.
US 9,786,636
App. No.
15/008,444
Granted
Oct 10, 2017
Kind
B2
Abstract

An Integrated Circuit device, including: a base wafer including single crystal, the base wafer including a plurality of first transistors; at least one metal layer providing interconnection between the plurality of first transistors; a first wire structure constructed to provide power to a portion of the first transistors; a second layer of less than 2 micron thickness, the second layer including a plurality of second single crystal transistors, the second layer overlying the at least one metal layer; and a second wire structure constructed to provide power to a portion of the second transistors, where the second wire structure is isolated from the first wire structure to provide a different power voltage to the portion of the second transistors.

Claims (60)

1. An Integrated Circuit device, comprising:

a base wafer comprising single crystal, said base wafer comprising a plurality of first transistors;

at least one metal layer providing interconnection between said plurality of first transistors;

a first wire structure constructed to provide power to a portion of said first transistors;

a second layer of less than 2 micron thickness, said second layer comprising a plurality of second single crystal transistors, said second layer overlying said at least one metal layer; and

a second wire structure constructed to provide power to a portion of said second transistors,

wherein said second wire structure is isolated from said first wire structure to provide a different power voltage to said portion of said second transistors.

2. An Integrated Circuit device according to claim 1 , further comprising:

at least one conductive structure underneath at least one of said second single crystal transistors, said at least one conductive structure is constructed to provide a back-bias to at least one of said second single crystal transistors.

3. An Integrated Circuit device according to claim 1 , further comprising:

at least one thermal conduction path from at least one of said second single crystal transistors to an external surface of said Integrated Circuit device.

4. An Integrated Circuit device according to claim 1 , further comprising:

a heat-spreader layer disposed between said first layer and said second layer.

5. An Integrated Circuit device according to claim 1 ,

wherein at least a portion of said second wire structure is controlled by at least one of said transistors.

6. An Integrated Circuit device according to claim 1 , further comprising:

a conductive layer disposed underneath said second layer,

wherein said conductive layer provides power to at least one of said second single crystal transistors.

7. An Integrated Circuit device according to claim 1 , further comprising:

a conductive pad overlying at least one of said second single crystal transistors.

8. An Integrated Circuit device, comprising:

a base wafer comprising single crystal, said base wafer comprising a plurality of first transistors;

at least one metal layer providing interconnection between said plurality of first transistors;

a second layer of less than 2 micron thickness, said second layer comprising a plurality of second transistors, said second layer overlying said at least one metal layer; and

at least one conductive structure constructed to provide power to a portion of said second transistors,

wherein said provide power is controlled by at least one of said transistors.

9. An Integrated Circuit device according to claim 8 ,

wherein at least one of said second transistors comprises a back-bias structure.

10. An Integrated Circuit device according to claim 8 , further comprising:

at least one thermal conduction path from at least one of said second transistors to an external surface of said Integrated Circuit device.

11. An Integrated Circuit device according to claim 8 , further comprising:

a shielding layer,

wherein said shielding layer provides shielding for said at least one metal layer from heat resulting from optical annealing of said second transistors.

12. An Integrated Circuit device according to claim 8 ,

wherein said at least one conductive structure is disposed between said base wafer and said second layer.

13. An Integrated Circuit device according to claim 8 , further comprising:

a conductive pad overlying at least one of said second transistors.

14. An Integrated Circuit device according to claim 8 , further comprising:

at least one thermal conduction path from said at least one conductive structure to an external surface of said Integrated Circuit device.

15. An Integrated Circuit device, comprising:

a base wafer comprising single crystal, said base wafer comprising a plurality of first transistors;

at least one metal layer providing interconnection between said plurality of first transistors;

a second layer of less than 2 micron thickness, said second layer comprising a plurality of second transistors, said second layer overlying said at least one metal layer,

at least one conductive structure constructed to provide power to a portion of said second transistors,

wherein said provide power is controlled by at least one of said transistors;

a plurality of conductive pads,

wherein at least one of said conductive pads overlays at least one of said second transistors; and

at least one I/O circuit,

wherein said at least one I/O circuit is adapted to interface with external devices through at least one of said plurality of conductive pads.

16. An Integrated Circuit device according to claim 15 ,

wherein at least one of said second transistors comprise a back-bias structure.

17. An Integrated Circuit device according to claim 15 , further comprising:

at least one thermal conduction path from at least one of said second transistors to an external surface of said Integrated Circuit device.

18. An Integrated Circuit device according to claim 15 , further comprising:

a shielding layer,

wherein said shielding layer provides shielding for said at least one metal layer from heat resulting from optical annealing of said second transistors.

19. An Integrated Circuit device according to claim 15 , further comprising:

at least one heat spreader layer underneath said second layer.

20. An Integrated Circuit device according to claim 15 ,

wherein said at least one conductive structure is disposed between said base wafer and said second layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 15, 2017
From: OR-BACH, ZVI; CRONQUIST, BRIAN
To: MONOLITHIC 3D INC.
Reel/Frame 042385/0826 →
Continuity (4)
Continuation In Part 14541452 · Nov 14, 2014
Continuation 14198041 · Mar 5, 2014
Continuation 13726091 · Dec 22, 2012
Related Publication 20160141274A1 · May 19, 2016