Process for making trisilylamine

1. A system for preparing trisilylamine, the system comprising:

a reactor comprising a reaction mixture of trisilylamine which is in communication with monochlorosilane and ammonia and wherein the density of trisilyamine in the reactor ranges from about 1.5 to about 100 grams/liter which react with the reaction mixture to provide a crude mixture comprising monochlorosilane and dichlorosilane in a liquid phase and an ammonium chloride solid wherein the reactor is substantially free of an added solvent;

a vacuum conveyor for removing the ammonium chloride solid from the reactor; and

a distillation column wherein the crude mixture is transferred from the reactor to the distillation column and purified in the distillation column to provide trisilylamine at a purity level of 90% or greater.

2. The system of claim 1 wherein the reactor is selected from a batch reactor or a continuous stirred tank reactor.

3. The system of claim 2 wherein the reactor comprises the batch reactor.

4. The system of claim 3 wherein the monochlorosilane is added to the reactor before the ammonia is added to the reactor.

5. The system of claim 1 wherein the density of trisilylamine in the reactor comprises about 1.7 g/I or greater.

6. The system of claim 2 wherein the reactor comprises the continuous stirred tank reactor.

7. The system of claim 1 wherein the trisilylamine is added as a solvent in the reactor.

8. The system of claim 1 wherein the vacuum conveyor comprises in situ vacuum removal.

9. The system of claim 1 wherein an inert gas is used to fluidize the ammonium chloride solids in the reactor to provide fluidized solids.

10. The system of claim 9 wherein the fluidized solids are carried out to a venturi vacuum system via the inert gas for collection and disposal.

11. The system of claim 1 wherein a temperature in the reactor ranges from 20 to 120° C.

12. The system of claim 1 wherein a pressure in the reactor ranges from 0.1 to 115 psia.

13. The system of claim 1 further comprising a collector which is communication with the reactor to collect the crude mixture from the reactor.

14. The system of claim 1 wherein the trisilylamine is purified in the distillation column to a purity level of 99% or greater.

15. The system of claim 1 wherein polysilazanes are removed from the reactor by evaporation and collection.

16. The system of claim 1 wherein the reaction mixture comprises up to 30% by weight stoichiometric excess monochlorosilane relative to ammonia.

17. The system of claim 1 wherein the reaction mixture comprises from about 3%® to about 5% by weight stoichiometric excess monochlorosilane relative to ammonia.

18. A method for preparing trisilylamine, the method comprising:

providing a reaction mixture of trisilylamine and monochlorosilane into a reactor wherein the reaction mixture is at a temperature and pressure sufficient to provide trisilylamine in a liquid phase wherein the reaction mixture is substantially free of an added solvent and wherein the trisilyamine in the reactor acts as solvent in the reaction mixture;

contacting the reaction mixture with ammonia to provide a crude mixture comprising trisilylamine and an ammonium chloride solid wherein monochlorosilane is in stoichiometric excess in relation to ammonia; and

purifiying the crude mixture to provide trisilylamine wherein the trisilyamine is produced at purity level of 90% or greater.

19. The method of claim 18 wherein the method further comprises removing the ammonium chloride solid from the reactor.

20. The method of claim 18 wherein the reactor is selected from a batch reactor or a continuous stirred tank reactor.