Semiconductor device and method of forming the same
A semiconductor device and method of forming the same, the semiconductor device includes a first and second fin shaped structures, a first and second gate structures and a first and second plugs. The first and second fin shaped structures are disposed on a first region and a second region of a substrate and the first and second gate structure are disposed across the first and second fin shaped structures, respectively. A dielectric layer is disposed on the substrate, covering the first and second gate structure. The first and second plugs are disposed in the dielectric layer, wherein the first plug is electrically connected first source/drain regions adjacent to the first gate structure and contacts sidewalls of the first gate structure, and the second plug is electrically connected to second source/drain regions adjacent to the second gate structure and not contacting sidewalls of the second gate structure.
1. A semiconductor device, comprising:
a first fin shaped structure and a second fin shaped structures disposed on a first region and a second region of a substrate respectively;
a first gate structure disposed across the first fin shaped structure, the first gate structure comprising a first gate dielectric layer, a first metal layer, a first capping layer and a first spacer surrounded the first gate dielectric layer, the first metal layer and the first capping layer;
a second gate structure disposed across the second fin shaped structure, the second gate structure comprising a second gate dielectric layer, a second metal layer, a second capping layer and a second spacer surrounded the second gate dielectric layer, the second metal layer and the second capping layer;
a dielectric layer disposed on the substrate, covering the first gate structure and the second gate structure;
a first plug disposed in the dielectric layer, the first plug being electrically connected to two first source/drain regions disposed at two sides of the first gate structure and directly contacting the first spacer and the first capping layer of the first gate structure; and
a second plug disposed in the dielectric layer, the second plug being electrically connected to two second source/drain regions disposed at two sides of the second gate structure and not contacting the second spacer and the second capping layer of the second gate structure.
2. The semiconductor device according to claim 1 , wherein the first plug does not contact the dielectric layer, and the second plug directly contacts the dielectric layer.
3. The semiconductor device according to claim 1 , wherein the first region comprises a SRAM region or a logic region, and the second region comprises a non-SRAM region.
4. The semiconductor device according to claim 1 , further comprising:
the first gate structure has a first pitch; and
the second gate structures has a second pitch, wherein the second pitch is greater than the first pitch.
5. The semiconductor device according to claim 1 , further comprising:
a plurality of shallow trench isolations surrounding the first fin shaped structure and the second fin shaped structure.