Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films
View Patent ↗Bisaminoalkoxysilanes of Formula I, and methods using same, are described herein: R 1 Si(NR 2 R 3 )(NR 4 R 5 )OR 6 I where R 1 is selected from hydrogen, a C 1 to C 10 linear alkyl group, a C 3 to C 10 branched alkyl group, a C 3 to C 10 cyclic alkyl group, a C 3 to C 10 alkenyl group, a C 3 to C 10 alkynyl group, a C 4 to C 10 aromatic hydrocarbon group; R 2 , R 3 , R 4 , and R 5 are each independently selected from hydrogen, a C 4 to C 10 branched alkyl group, a C 3 to C 10 cyclic alkyl group, a C 3 to C 10 alkenyl group, a C 3 to C 10 alkynyl group, and a C 4 to C 10 aromatic hydrocarbon group; R 6 is selected from a C 1 to C 10 linear alkyl group, a C 3 to C 10 branched alkyl group, a C 3 to C 10 cyclic alkyl group, a C 3 to C 10 alkenyl group, a C 2 to C 10 alkynyl group, and a C 4 to C 10 aromatic hydrocarbon group.
1. A method for forming a silicon-containing film on at least one surface of a substrate comprising:
providing the substrate in a reactor; and
forming the silicon-containing film on the at least one surface by a deposition process using at least one precursor comprising a bisaminoalkoxysilane having Formula I:
R 1 Si(NR 2 R 3 )(NR 4 R 5 )OR 6 I
wherein R 1 is a methyl group; R 2 and R 4 are each hydrogen atoms; R 3 and R 5 are each selected from tert-butyl and tert-pentyl; and R 6 is selected from a C 1 to C 3 linear alkyl group and a C 3 to C 5 branched alkyl group.
2. The method of claim 1 , wherein the deposition process is selected from the group consisting of cyclic chemical vapor deposition (CCVD), thermal chemical vapor deposition, plasma enhanced chemical vapor deposition (PECVD), high density PECVD, photon assisted CVD, plasma-photon assisted (PPECVD), cryogenic chemical vapor deposition, chemical assisted vapor deposition, hot-filament chemical vapor deposition, CVD of a liquid polymer precursor, low energy CVD (LECVD), and flowable chemical vapor deposition.
3. The process of claim 2 , wherein the deposition process is flowable chemical vapor deposition (FCVD).
4. The method of claim 1 wherein the at least one precursor comprising a bisaminoalkoxysilane having Formula I is at least one selected from the group consisting of bis(tert-butylamino)methoxymethylsilane, bis(tert-butylamino)ethoxymethylsilane, and bis(tert-butylamino)isoproxymethylsilane.
5. The method of claim 1 wherein the at least one precursor comprising a bisaminoalkoxysilane having Formula I comprises bis(tert-butylamino)ethoxymethylsilane.
6. A method for depositing a silicon-containing film on at least a portion of a substrate having a surface feature in a flowable chemical vapor deposition process, the method comprising the steps of:
placing a substrate having a surface feature into a reactor wherein the reactor is maintained at one or more temperatures ranging from −20° C. to about 400° C.;
introducing into the reactor at least one precursor comprising a bisaminoalkoxysilane compound having a Formula I:
R 1 Si(NR 2 R 3 )(NR 4 R 5 )OR 6 I
wherein R 1 is a methyl group; R 2 and R 4 are each hydrogen atoms; R 3 and R 5 are each selected from tert-butyl and tert-pentyl; and R 6 is selected from a C 1 to C 3 linear alkyl group and a C 3 to C 5 branched alkyl group;
introducing a source selected from an oxygen source, a nitrogen-containing source, or both to react with the bisaminoalkoxysilane compound on the substrate to form a flowable film on at least a portion of the surface feature;
treating the flowable film with an oxygen source at one or more temperatures ranging from about 100° C. to about 1000° C. to form a solid silicon and oxygen containing film on at least a portion of the surface feature.
7. The method of claim 6 further comprising exposing the flowable film to ultraviolet irradiation at one or more temperatures ranging from about 100° C. to about 1000° C.
8. The method of claim 6 wherein at least one of the oxygen sources is selected from the group consisting of water, oxygen plasma, ozone, and a combination thereof.
9. The method of claim 6 wherein the nitrogen-containing source is selected from the group consisting of ammonia, hydrazine, monoalkylhydrazine, dialkylhydrazine, organic amines, a plasma comprising nitrogen and hydrogen, ammonia plasma, nitrogen plasma, and organic amine plasma.
10. The method of claim 6 wherein the steps can be repeated until the surface feature is substantially filled with the solid silicon and oxygen containing film.
11. The method of claim 6 wherein the at least one precursor comprising a bisaminoalkoxysilane having Formula I is at least one selected from the group consisting of bis(tert-butylamino)methoxymethylsilane, bis(tert-butylamino)ethoxymethylsilane, and bis(tert-butylamino)isoproxymethylsilane.
12. The method of claim 6 wherein the at least one precursor comprising a bisaminoalkoxysilane having Formula I comprises bis(tert-butylamino)ethoxymethylsilane.
13. The method of claim 6 wherein the reactor is maintained at one or more temperatures ranging from 0° C. to about 40° C.