Magnetic material sputtering target and method for producing same
Provided is a magnetic material sputtering target produced from a sintered compact having a B content of 17 at % or more and 40 at % or less, and remainder being one or more elements selected from Co and Fe, wherein the target includes a B-rich phase and a B-poor phase, and a number of the B-rich phases in which a maximum inscribed circle having a diameter of 15 μm or more can be drawn is one or less. The B-rich phase is finely dispersed in the magnetic material sputtering target of the present invention, and the machinability of the target is consequently improved. Moreover, significant effects are yielded in that the generation of particles is inhibited and the yield in the production of thin films is improved when the target is used for sputtering with a magnetron sputtering equipment comprising a DC power supply.
1. A magnetic material sputtering target made of a sintered compact consisting of B in a content of 26 at % or more and 40 at % or less and remainder being one or more elements selected from the group consisting of Co and Fe, wherein the target has a structure comprising a B-rich alloy phase containing B and a B-poor alloy phase containing B, wherein a volume ratio of the B-rich alloy phase is greater than a volume ratio of the B-poor alloy phase, and wherein the B-rich alloy phase having a size such that, in an area of 0.01 mm 2 of a cross-sectional face or sputtering face of the sputtering target, a number of particles of the B-rich alloy phase within which a maximum inscribed circle having a diameter of 15 μm or more is able to be drawn is one or less.
2. A magnetic material sputtering target made of a sintered compact consisting of B in a content of 26 at % or more and 40 at % or less, one or more elements selected from the group consisting of Al, Cr, Cu, Hf, Mn, Ni, Ru, Si, Ta, and W in a total amount of 0.5 at % or more and 20 at % or less, and remainder being one or more elements selected from the group consisting of Co and Fe, wherein the target has a structure comprising a B-rich alloy phase containing B and a B-poor alloy phase containing B, wherein a volume ratio of the B-rich alloy phase is greater than a volume ratio of the B-poor alloy phase, and wherein the B-rich alloy phase having a size such that, in an area of 0.01 mm 2 of a cross-sectional face or sputtering face of the sputtering target, a number of particles of the B-rich alloy phase within which a maximum inscribed circle having a diameter of 15 μm or more is able to be drawn is one or less.
3. The magnetic material sputtering target according to claim 2 , wherein a density of the target is 99% or more.
4. The magnetic material sputtering target according to claim 3 , wherein the target comprises a surface finished by surface grinding.
5. A method for producing a magnetic material sputtering target, wherein a raw material powder having a grain size of 300 μm or less and comprising B in a content of 26 at % or more and 40 at % or less and one or more elements selected from the group consisting of Co and Fe is prepared by a gas atomization method, and then the gas atomized raw material powder is sintered to obtain a sintered body for forming the magnetic material sputtering target by machine processing and mechanical surface finishing, the target having a structure which comprises a B-rich alloy phase containing B and a B-poor alloy phase containing B, a volume ratio of the B-rich alloy phase being greater than a volume ratio of the B-poor alloy phase, and the B-rich alloy phase having a size such that, in an area of 0.01 mm 2 of a cross-sectional face or sputtering face of the sputtering target, a number of particles of the B-rich alloy phase within which a maximum inscribed circle having a diameter of 15 μm or more is able to be drawn is one or less.
6. The method for producing a magnetic material sputtering target according to claim 5 , wherein the sintering is performed at a sintering temperature of 900 to 1240° C.
7. The method for producing a magnetic material sputtering target according to claim 6 , wherein the surface finishing is performed via surface grinding.
8. The method for producing a magnetic material sputtering target according to claim 7 , wherein the target further contains one or more elements selected from the group consisting of Al, Cr, Cu, Hf, Mn, Ni, Ru, Si, Ta, and W in a total amount of 0.5 at % or more and 20 at % or less.
9. The method for producing a magnetic material sputtering target according to claim 8 , wherein the structure of the target is characterized in having a density of 99% or more.
10. The method for producing a magnetic material sputtering target according to claim 5 , wherein the surface finishing is performed via surface grinding.
11. The method for producing a magnetic material sputtering target according to claim 5 , wherein the target further contains one or more elements selected from the group consisting of Al, Cr, Cu, Hf, Mn, Ni, Ru, Si, Ta, and W in a total amount of 0.5 at % or more and 20 at % or less.
12. The method for producing a magnetic material sputtering target according to claim 5 , wherein the structure of the target is characterized in having a density of 99% or more.
13. The magnetic material sputtering target according to claim 1 , wherein a density of the target is 99% or more.
14. The magnetic material sputtering target according to claim 1 , wherein the target comprises a surface finished by surface grinding.
15. The method for producing a magnetic material sputtering target according to claim 5 , wherein the raw material powder consists of B in a content of 26 at % or more and 40 at % or less and one or more elements selected from the group consisting of Co and Fe.
16. The method for producing a magnetic material sputtering target according to claim 5 , wherein the raw material powder consists of B in a content of 26 at % or more and 40 at % or less, one or more elements selected from the group consisting of Al, Cr, Cu, Hf, Mn, Ni, Ru, Si, Ta, and W in a total amount of 0.5 at % or more and 20 at % or less, and one or more elements selected from the group consisting of Co and Fe.