Stretchable electronics for artificial skin
A stretchable electronic device for artificial skin and a method of manufacturing the same are disclosed. The stretchable electronic device for artificial skin includes a first encapsulation layer, a heater disposed on the first encapsulation layer, a second encapsulation layer disposed on the heater, a first sensor array layer disposed on the second encapsulation layer, and a third encapsulation layer disposed on the first sensor array layer.
1. A stretchable electronic device for artificial skin, comprising:
a first encapsulation layer;
a heater disposed on the first encapsulation layer;
a second encapsulation layer disposed on the heater;
a first sensor array layer disposed on the second encapsulation layer; and
a third encapsulation layer disposed on the first sensor array layer;
wherein the first sensor array layer comprises a first passivation layer, a semiconductor pattern disposed on the first passivation layer, a first metal pattern disposed on the semiconductor pattern, and a second passivation layer disposed on the first metal pattern; and
wherein the first sensor array layer comprises a pressure sensor, and the pressure sensor has a cavity in the first passivation layer to expose the semiconductor pattern.
2. The stretchable electronic device of claim 1 , wherein the first sensor array layer comprises at least one selected from a group consisting of a strain sensor, and a temperature sensor.
3. The stretchable electronic device of claim 1 , wherein the semiconductor pattern and the first metal pattern have a serpentine shape.
4. The stretchable electronic device of claim 1 , wherein the semiconductor pattern is a silicon pattern formed by patterning a doped silicon nanomembrane.
5. The stretchable electronic device of claim 1 , wherein the semiconductor pattern is a silicon nanoribbon.
6. The stretchable electronic device of claim 2 , wherein the strain sensor has a Wheatstone bridge configuration.
7. The stretchable electronic device of claim 1 , wherein each of the first encapsulation layer, the second encapsulation layer, and the third encapsulation layer is formed of a silicone polymer or silicone rubber.
8. The stretchable electronic device of claim 7 , wherein the silicone polymer is polydimethylsiloxane (PDMS).
9. A stretchable electronic device for artificial skin, comprising:
a first encapsulation layer;
a heater disposed on the first encapsulation layer;
a second encapsulation layer disposed on the heater;
a first sensor array layer disposed on the second encapsulation layer; and
a third encapsulation layer disposed on the first sensor array layer,
wherein the first sensor array layer comprises a strain sensor and a pressure sensor; and
wherein the strain sensor and the pressure sensor have different curvatures depending on a position of a human body to which the stretchable electronic device is attached, and a strain induced by the human body is further relieved with an increase in the curvature.
10. A stretchable electronic device for artificial skin, comprising:
a first encapsulation layer;
a heater disposed on the first encapsulation layer;
a second encapsulation layer disposed on the heater;
a first sensor array layer disposed on the second encapsulation layer; and
a third encapsulation layer disposed on the first sensor array layer,
wherein the first sensor array layer comprises a temperature sensor, and wherein a divergence between I-V curves of the temperature sensor under different strains is decreased with an increase in a curvature of the temperature sensor.
11. A stretchable electronic device for artificial skin, comprising:
a first encapsulation layer;
a heater disposed on the first encapsulation layer;
a second encapsulation layer disposed on the heater;
a first sensor array layer disposed on the second encapsulation layer; and
a third encapsulation layer disposed on the first sensor array layer,
wherein the heater comprises:
a third passivation layer,
a second metal pattern disposed on the third passivation layer, and
a fourth passivation layer disposed on the second metal pattern.
12. The stretchable electronic device of claim 11 , wherein the second metal pattern has a serpentine shape.
13. A stretchable electronic device for artificial skin, comprising:
a first encapsulation layer;
a heater disposed on the first encapsulation layer;
a second encapsulation layer disposed on the heater;
a first sensor array layer disposed on the second encapsulation layer;
a third encapsulation layer disposed on the first sensor array layer; and
a second sensor array layer disposed on the third encapsulation layer,
wherein the second sensor array layer comprises a humidity sensor and the humidity sensor detects a change in capacitance induced by a change in permittivity of a sixth passivation layer, into which a water molecule is absorbed.
14. The stretchable electronic device of claim 13 , wherein the humidity sensor comprises:
a fifth passivation layer,
a third metal pattern disposed on the fifth passivation layer, and
a sixth passivation layer disposed on the third metal pattern.
15. The stretchable electronic device of claim 14 , wherein the third metal pattern has a serpentine shape.