Contact structure and formation thereof
A semiconductor device and methods of formation are provided. A semiconductor device includes an annealed cobalt plug over a silicide in a first opening of the semiconductor device, wherein the annealed cobalt plug has a repaired lattice structure. The annealed cobalt plug is formed by annealing a cobalt plug at a first temperature for a first duration, while exposing the cobalt plug to a first gas. The repaired lattice structure of the annealed cobalt plug is more regular or homogenized as compared to a cobalt plug that is not so annealed, such that the annealed cobalt plug has a relatively increased conductivity or reduced resistivity.
1. A semiconductor device, comprising:
a silicide;
a dielectric layer;
a metal layer in contact with a sidewall of the dielectric layer and in contact with a top surface of the silicide;
a titanium nitride layer in contact with a sidewall of the metal layer and in contact with the top surface of the silicide; and
an annealed cobalt plug over the silicide, the annealed cobalt plug comprising a repaired lattice structure, the titanium nitride layer between the silicide and the annealed cobalt plug.
2. The semiconductor device of claim 1 , wherein the metal layer is in contact with a top surface of the dielectric layer.
3. The semiconductor device of claim 1 , wherein the titanium nitride layer is in contact with a top surface of the metal layer.
4. The semiconductor device of claim 1 , wherein the metal layer overlies the dielectric layer.
5. The semiconductor device of claim 1 , wherein the titanium nitride layer overlies the dielectric layer.
6. The semiconductor device of claim 1 , wherein:
the metal layer overlies the dielectric layer; and
the titanium nitride layer overlies a portion of the metal layer overlying the dielectric layer.
7. The semiconductor device of claim 6 , wherein the annealed cobalt plug overlies a portion of the titanium nitride layer overlying the portion of the metal layer.
8. The semiconductor device of claim 1 , wherein the annealed cobalt plug overlies the dielectric layer.
9. The semiconductor device of claim 1 , wherein the annealed cobalt plug overlies the metal layer.
10. The semiconductor device of claim 1 , wherein the silicide is disposed within a substrate and the dielectric layer overlies the substrate.
11. The semiconductor device of claim 10 , wherein the dielectric layer is in contact with a top surface of the substrate.
12. A semiconductor device, comprising:
a silicide;
a dielectric layer;
a glue layer in contact with a first sidewall of the dielectric layer, a second sidewall of the dielectric layer, and a top surface of the silicide, wherein the glue layer extends from the first sidewall of the dielectric layer to the second sidewall of the dielectric layer; and
an annealed cobalt plug over the silicide, the annealed cobalt plug comprising a repaired lattice structure, the glue layer between the silicide and the annealed cobalt plug.
13. The semiconductor device of claim 12 , wherein the dielectric layer is in contact with the top surface of the silicide.
14. The semiconductor device of claim 12 , wherein the glue layer is in contact with a top surface of the dielectric layer.
15. The semiconductor device of claim 12 , wherein the annealed cobalt plug is in contact with a top surface of the glue layer.
16. The semiconductor device of claim 12 , wherein:
the glue layer is in contact with a top surface of the dielectric layer; and
the annealed cobalt plug is in contact with a top surface of the glue layer overlying the dielectric layer.
17. The semiconductor device of claim 12 , wherein the dielectric layer overlies the silicide.
18. The semiconductor device of claim 12 , wherein the silicide is disposed within a substrate and the dielectric layer overlies the substrate.
19. The semiconductor device of claim 18 , wherein the dielectric layer is in contact with a top surface of the substrate and a top surface of the silicide.
20. A semiconductor device, comprising:
a silicide;
a dielectric layer overlying the silicide;
a glue layer in contact with a sidewall of the dielectric layer and in contact with a top surface of the silicide; and
an annealed cobalt plug over the silicide, the annealed cobalt plug comprising a repaired lattice structure, wherein the glue layer is between the silicide and the annealed cobalt plug to physically separate a top surface of the silicide from a bottom surface of the annealed cobalt plug.