Resistive memory and method of fabricating the same
Provided are a resistive memory and a method of fabricating the resistive memory. The resistive memory includes a first electrode, a second electrode, a variable resistance layer, an oxygen exchange layer, and a protection layer. The first electrode and the second electrode are arranged opposite to each other. The variable resistance layer is arranged between the first electrode and the second electrode. The oxygen exchange layer is arranged between the variable resistance layer and the second electrode. The protection layer is arranged at least on sidewalls of the oxygen exchange layer.
1. A resistive memory comprising:
a first electrode and a second electrode arranged opposite to each other;
a variable resistance layer arranged between the first electrode and the second electrode;
a first dielectric layer sandwiched between the variable resistance layer and the second electrode and having an opening, wherein a portion of a top surface of the variable resistance layer is exposed by the opening of the first dielectric layer, and the first dielectric layer is in physical contact with another portion of the top surface of the variable resistance layer;
a protection layer arranged conformally on a bottom and sidewalls of the opening and extending to a top surface of the first dielectric layer, such that the protection layer is sandwiched between the top surface of the first dielectric layer and a bottom surface of the second electrode; and
an oxygen exchange layer filled in the opening, such that the protection layer is arranged on sidewalls of the oxygen exchange layer and sandwiched between the oxygen exchange layer and the variable resistance layer.
2. The resistive memory as recited in claim 1 , wherein the protection layer comprises a high dielectric constant material having a higher dielectric constant than SiO 2 .
3. The resistive memory as recited in claim 2 , wherein the high dielectric constant material comprises metal oxide, and the metal oxide comprises hafnium oxide, lanthanum oxide, gadolinium oxide, yttrium oxide, zirconium oxide, titanium oxide, tantalum oxide, nickel oxide, tungsten oxide, copper oxide, cobalt oxide, iron oxide, or a combination thereof.
4. The resistive memory as recited in claim 1 , wherein the first dielectric layer comprises silicon oxide, silicon nitride, or a combination thereof.
5. The resistive memory as recited in claim 1 , further comprising a barrier layer arranged between the oxygen exchange layer and the second electrode.
6. The resistive memory as recited in claim 5 , wherein the barrier layer comprises metal oxide.
7. The resistive memory as recited in claim 5 , wherein the barrier layer comprises titanium oxynitride, aluminum oxide, hafnium oxide, zirconium oxide, or a combination thereof.
8. The resistive memory as recited in claim 1 , wherein the variable resistance layer comprises hafnium oxide, lanthanum oxide, gadolinium oxide, yttrium oxide, zirconium oxide, titanium oxide, tantalum oxide, nickel oxide, tungsten oxide, copper oxide, cobalt oxide, iron oxide, or a combination thereof.
9. The resistive memory as recited in claim 1 , wherein a width of the oxygen exchange layer is less than a width of the second electrode.