Analysis pretreatment device
View Patent ↗An analysis pretreatment device according to an embodiment includes a chamber capable of containing an analysis object therein. A pressure reducer reduces pressure inside the chamber. An introducing part vaporizes a liquid and introduces the vaporized liquid into the chamber. A first supplier supplies water in a liquid state to the introducing part. A second supplier supplies hydrofluoric acid in a gas state to the introducing part. The introducing part introduces a mixed gas into the chamber. The mixed gas includes vaporized water, which is obtained by vaporizing water in a liquid state, and hydrofluoric acid in a gas state.
1. An analysis pretreatment device comprising:
a chamber configured to contain an analysis object therein;
a pressure reducer reducing pressure connected to inside the chamber;
an introducing part vaporizing a liquid and introducing the vaporized liquid into the chamber;
a tank supplying water in a liquid state to the introducing part; and a cylinder supplying hydrofluoric acid in a gas state to the introducing part, wherein
the introducing part introduces a mixed gas into the chamber, the mixed gas including a vaporized water, which is obtained by vaporizing water in a liquid state, and hydrofluoric acid in a gas state, wherein the introducing part includes;
a sprayer;
the sprayer including:
a liquid-supply opening receiving water in a liquid state from the tank; a gas-supply opening receiving a hydrofluoric acid gas in a gas state from the cylinder;
a spray opening mixing the hydrofluoric acid in a gas state into the water, when spraying the water in a liquid form to vaporize the water.
2. The device of claim 1 , wherein the analysis object is a nitride film or an oxynitride film provided on a substrate.
3. The device of claim 1 , further comprising a collector supplying a chemical liquid onto the substrate after vapor phase decomposition of the analysis object on the substrate, and collecting an object to be measured that remains on the substrate into the chemical liquid.
4. The device of claim 2 , further comprising a collector supplying a chemical liquid onto the substrate after vapor phase decomposition of the analysis object on the substrate, and collecting an object to be measured that remains on the substrate into the chemical liquid.
5. The device of claim 1 , wherein the cylinder contains hydrofluoric acid with a concentration of 99% or more.
6. The device of claim 2 , wherein the cylinder contains hydrofluoric acid with a concentration of 99% or more.
7. The device of claim 3 , wherein the cylinder contains hydrofluoric acid with a concentration of 99% or more.
8. The device of claim 1 , wherein the introducing part includes a gas-liquid separator separating vaporized water and hydrofluoric acid in a gas state from water in a liquid state.
9. The device of claim 2 , wherein the introducing part includes a gas-liquid separator separating vaporized water and hydrofluoric acid in a gas state from water in a liquid state.
10. The device of claim 3 , wherein the introducing part includes a gas-liquid separator separating vaporized water and hydrofluoric acid in a gas state from water in a liquid state.
11. The device of claim 1 , wherein the cylinder contains a hydrofluoric acid gas therein.
12. The device of claim 2 , wherein the cylinder contains a hydrofluoric acid gas therein.
13. The device of claim 3 , wherein the cylinder contains a hydrofluoric acid gas therein.