Methods for depositing films with organoaminodisilane precursors

1. An organoaminodisilane precursor comprising a Si—N bond, a Si—Si bond, and a Si—H 3 group represented by the following Formula I below:

wherein R 1 is selected from a linear or branched C 3 to C 10 alkyl group, a linear or branched C 3 to C 10 alkenyl group, a linear or branched C 3 to C 10 alkynyl group, a C 1 to C 6 dialkylamino group, an electron withdrawing group, and a C 6 to C 10 aryl group; R 2 is selected from hydrogen, a linear or branched C 1 to C 10 alkyl group, a linear or branched C 3 to C 6 alkenyl group, a linear or branched C 3 to C 6 alkynyl group, a C 1 to C 6 dialkylamino group, a C 6 to C 10 aryl group, a linear or branched C 1 to C 6 fluorinated alkyl group, an electron withdrawing group, and a C 4 to C 10 aryl group; optionally wherein R 1 and R 2 are linked together to form a ring selected from a substituted or unsubstituted aromatic ring or a substituted or unsubstituted aliphatic ring; and n=1 or 2; wherein R 1 and R 2 in Formula I cannot both be iso-propyl.

2. The organoaminodisilane precursor of claim 1 wherein the R 1 and R 2 are linked together to form a ring.

3. The organoaminodisilane precursor of claim 1 wherein R 1 and R 2 are the same provided that R 1 and R 2 are not methyl or ethyl.

4. The organoaminodisilane precursor of claim 1 selected from the group consisting of di-sec-butylaminodisilane, di-tert-butylaminodisilane, 2,6-dimethylpiperidinodisilane, 2,2,6,6-tetramethylpiperidinodisilane, cyclohexyl-iso-propylaminodisilane, phenylmethylaminodisilane, phenylethylaminodisilane, di-cyclohexylaminodisilane, trans-decahydroquinolinyldisilane, 1,1-bis(t-butylamino)disilane, 1,1-bis(tert-pentylamino)disilane, 1,1-bis(iso-propylamino)disilane, 1,1-bis(iso-propylmethlamino)disilane, 1,1-dipiperidinodisilane, 1,1-dipyrrolidinodisilane, 1,1-di(2,6-dimethylpiperidino)disilane, 1,1-bis(di-sec-butylamino)disilane.

5. The organoaminodisilane precursor of claim 4 comprising di-sec-butylaminodisilane.

6. The organoaminodisilane precursor of claim 4 comprising 2,6-dimethylpiperidinodisilane.

7. The organoaminodisilane precursor of claim 4 comprising phenylethylaminodisilane.

8. A composition comprising:

(a) at least one organoaminodisilane precursor comprising a Si—N bond, a Si—Si bond, and a Si—H 3 group represented by the following Formula I below:

wherein R 1 is selected from a linear or branched C 3 to C 10 alkyl group, a linear or branched C 3 to C 10 alkenyl group, a linear or branched C 3 to C 10 alkynyl group, a C 1 to C 6 dialkylamino group, an electron withdrawing group, and a C 6 to C 10 aryl group; R 2 is selected from hydrogen, a linear or branched C 1 to C 10 alkyl group, a linear or branched C 3 to C 6 alkenyl group, a linear or branched C 3 to C 6 alkynyl group, a C 1 to C 6 dialkylamino group, a C 6 to C 10 aryl group, a linear or branched C 1 to C 6 fluorinated alkyl group, an electron withdrawing group, and a C 4 to C 10 aryl group; optionally wherein R 1 and R 2 are linked together to form a ring selected from a substituted or unsubstituted aromatic ring or a substituted or unsubstituted aliphatic ring; and n=1 or 2; and

(b) a solvent wherein the solvent has a boiling point and wherein the difference between the boiling point of the solvent and that of the at least one organoaminodisilane is 40° C. or less.

9. The composition of claim 8 wherein the organoaminodisilane comprises at least one selected from the group consisting of di-iso-propylaminodisilane, di-sec-butylaminodisilane, di-tert-butylaminodisilane, 2,6-dimethylpiperidinodisilane, 2,2,6,6-tetramethylpiperidinodisilane, cyclohexyl-iso-propylaminodisilane, phenylmethylaminodisilane, phenylethylaminodisilane, di-cyclohexylaminodisilane, trans-decahydroquinolinyldisilane, 1,1-(N,N′-di-tert-butylethylenediamino)disilane, 1,1-(N,N′-di-iso-propylethylenediamino)disilane, 1,1-bis(t-butylamino)disilane, 1,1-bis(tert-pentylamino)disilane, 1,1-bis(iso-propylamino)disilane, 1,1-bis(iso-propylmethlamino)disilane, 1,1-dipiperidinodisilane, 1,1-dipyrrolidinodisilane, 1,1-bis(diethylamino)disilane, 1,1-bis(di-iso-propylamino)disilane, 1,1-di(2,6-dimethylpiperidino)disilane, 1,1-bis(di-sec-butylamino)disilane.

10. The composition of claim 8 wherein the solvent comprises at least one selected from the group consisting of ether, tertiary amine, alkyl hydrocarbon, aromatic hydrocarbon, tertiary aminoether.

11. A vessel which is used to deliver a precursor for the deposition of a silicon-containing film, the vessel comprising:

at least one organoaminodisilane precursor comprising a Si—N bond, a Si—Si bond, and a Si—H 3 group represented by the following Formula I below:

wherein R 1 is selected from a linear or branched C 3 to C 10 alkyl group, a linear or branched C 3 to C 10 alkenyl group, a linear or branched C 3 to C 10 alkynyl group, a C 1 to C 6 dialkylamino group, an electron withdrawing group, and a C 6 to C 10 aryl group; R 2 is selected from hydrogen, a linear or branched C 1 to C 10 alkyl group, a linear or branched C 3 to C 6 alkenyl group, a linear or branched C 3 to C 6 alkynyl group, a C 1 to C 6 dialkylamino group, a C 6 to C 10 aryl group, a linear or branched C 1 to C 6 fluorinated alkyl group, an electron withdrawing group, and a C 4 to C 10 aryl group; optionally wherein R 1 and R 2 are linked together to form a ring selected from a substituted or unsubstituted aromatic ring or a substituted or unsubstituted aliphatic ring; and n=1 or 2, and

wherein the purity of the precursor is about 98% or greater.

12. The vessel of claim 11 wherein the vessel is comprised of stainless steel.

13. The organoaminodisilane precursor of claim 1 wherein n=2 and R 1 and R 1 are linked together to form a ring.

14. The organoaminodisilane precursor of claim 1 wherein n=2 and R 1 and R 2 are linked together to form a ring.