Self-aligned contact process enabled by low temperature
View Patent ↗Self-aligned contacts of a semiconductor device are fabricated by forming a metal gate structure on a portion of a semiconductor layer of a substrate. The metal gate structure contacts inner sidewalls of a gate spacer. A second sacrificial epitaxial layer is formed on a first sacrificial epitaxial layer. The first sacrificial epitaxial layer is adjacent to the gate spacer and is formed on source/drain regions of the semiconductor layer. The first and second sacrificial epitaxial layers are recessed. The recessing exposes at least a portion of the source/drain regions. A first dielectric layer is formed on the exposed portions of the source/drain regions, and over the gate spacer and metal gate structure. At least one cavity within the first dielectric layer is formed above at least one of the exposed portions of source/drain regions. At least one metal contact is formed within the at least one cavity.
1. An integrated circuit comprising:
at least one semiconductor device, the at least one semiconductor device comprising:
a substrate;
a semiconductor layer formed on the substrate;
a metal gate structure formed on a portion of the semiconductor layer;
a gate spacer formed on the metal gate structure;
a first epitaxial layer formed on source/drain regions of the semiconductor layer and adjacent to the gate spacer;
a second epitaxial layer formed on a top surface of the first epitaxial layer;
a first dielectric layer formed between and in contact with an inner sidewall of the first epitaxial layer and an outer sidewall of the gate spacer;
a second dielectric layer formed between and in contact with a first inner sidewall of the second epitaxial layer and a second inner sidewall of the second epitaxial layer, wherein the dielectric layer is further formed above and in contact with the metal gate structure; and
at least one self-aligned metal contact formed on at least one of the source/drain regions.
2. The integrated circuit of claim 1 , wherein the at least one self-aligned metal contact is in contact with at least a sidewall and a portion of a top surface of the second dielectric layer.
3. The integrated circuit of claim 1 , wherein the at least one semiconductor further comprises:
an oxide layer formed on and in contact with the substrate.
4. The integrated circuit of claim 1 , wherein the semiconductor layer is a fin structure.
5. The integrated circuit of claim 1 , wherein the second dielectric layer contacts the first dielectric layer.
6. The integrated circuit of claim 1 , wherein the self-aligned metal contact contacts sidewalls of the first epitaxial layer and the second epitaxial layer.
7. The integrated circuit of claim 1 , wherein a top surface of the first epitaxial layer and a top surface of the metal gate structure are co-planar.
8. The integrated circuit of claim 1 , wherein a top surface of the second epitaxial layer and a top surface of the second dielectric layer are co-planar.
9. The integrated circuit of claim 1 , wherein the at least one semiconductor further comprises:
a third dielectric layer formed on a top surface of the second epitaxial layer.
10. The integrated circuit of claim 9 , wherein the at least one self-aligned metal contact is in contact with at least a sidewall of the third dielectric layer.
11. The integrated circuit of claim 9 , wherein the third dielectric layer only contacts a portion of the second dielectric layer.
12. The integrated circuit of claim 1 , wherein the at least one semiconductor further comprises:
a silicide area formed on and in contact with at least a portion of the at least one of the source/drain regions.
13. The integrated circuit of claim 12 , wherein the at least one self-aligned metal contact is formed on and in contact with the silicide area.
14. The integrated circuit of claim 1 , wherein the metal gate structure comprises a dielectric spacer and a gate conductor.
15. The integrated circuit of claim 14 , wherein the dielectric spacer contacts inner sidewalls of the gate spacer, sidewalls of the portion of the semiconductor layer, and a top surface of the portion of the semiconductor layer.
16. The integrated circuit of claim 14 , wherein the gate conductor contacts inner walls of the dielectric spacer.
17. The integrated circuit of claim 14 , wherein the dielectric spacer is U-shaped.
18. The integrated circuit of claim 14 , wherein the dielectric spacer is a high-k dielectric spacer.
19. The integrated circuit of claim 1 , wherein second dielectric layer contacts metal gate structure.
20. The integrated circuit of claim 19 , wherein the self-aligned metal contact further contacts sidewalls of the first dielectric layer and the second dielectric layer, and third dielectric layer.