Asymmetric high-K dielectric for reducing gate induced drain leakage
View Patent ↗An asymmetric high-k dielectric for reduced gate induced drain leakage in high-k MOSFETs and methods of manufacture are disclosed. The method includes performing an implant process on a high-k dielectric sidewall of a gate structure. The method further includes performing an oxygen annealing process to grow an oxide region on a drain side of the gate structure, while inhibiting oxide growth on a source side of the gate structure adjacent to a source region.
1. A gate structure comprising a gate material on an asymmetrically thick gate dielectric comprising an oxide wherein the asymmetrically thick gate dielectric is thicker on a drain side of the gate structure than a source side of the gate structure, wherein the asymmetrically thick gate dielectric includes a high-k material and an interfacial dielectric layer of fin material under the high-k material, the fin material is on a silicon on insulator (SOI) substrate which includes a source region and a drain region, and a damaged spacer material is only on the drain side of the gate structure.
2. The structure of claim 1 , wherein the oxide is a high-k oxide material.
3. The structure of claim 2 , wherein the high-k oxide material is HfO 2 .
4. The structure of claim 1 , wherein the interfacial dielectric layer comprises nitrogen.
5. The structure of claim 1 , wherein the thick gate dielectric is regrown oxide material on the drain side of the gate structure.
6. The structure of claim 1 , wherein the gate structure is a short channel gate structure.
7. The structure of claim 1 , wherein the damaged spacer material comprises Si 3 N 4 .
8. The structure of claim 1 , wherein the interfacial dielectric layer has a first thickness on the source side and a second thickness on the drain side, the first thickness being different than the second thickness.
9. The structure of claim 1 , wherein the high-k material on the source side of the gate structure comprises a nitrogen implant.
10. The structure of claim 9 , wherein a damaged spacer material on the source side of the gate structure comprises nitrogen.
11. The structure of claim 1 , further comprising sidewalls of the high-k material on the source side and the drain side of gate material.
12. The structure of claim 11 , wherein the interfacial dielectric layer of fin material is thicker on the drain side of the gate structure than the source side of the gate structure.
13. The structure of claim 1 , wherein the high-k material and the damaged spacer material are provided on sidewalls of the gate material.