Boron-containing compounds, compositions, and methods for the deposition of a boron containing films

1. A method to deposit a boron-containing film onto at least a surface of a substrate which comprises the steps of:

providing the substrate in a reactor; and

forming the boron-containing film on a surface of the substrate in a deposition process selected from a group consisting of a chemical vapor deposition, an atomic layer deposition-like deposition, and an atomic layer deposition process, wherein the deposition process is conducted at one or more temperatures from room temperature to about 400° C. and repeated until a desired thickness of the boron-containing film is obtained and includes a boron-containing precursor selected from at least one compound having the following formula I and II:

wherein R1 is selected from a linear C 1 to C 10 alkyl group, a branched C 3 to C 10 alkyl group, a linear or branched C 3 to C 10 alkenyl group, a linear or branched C 3 to C 10 alkynyl group, a C 1 to C 6 dialkylamino group, an electron withdrawing group, and a C 4 to C 10 aryl group; R 2 is selected from hydrogen, a linear C 1 to C 10 alkyl group, a branched C 3 to C 10 alkyl group, a linear or branched C 3 to C 6 alkenyl group, a linear or branched C 3 to C 6 alkynyl group, a C 1 to C 6 dialkylamino group, a C 6 to C 10 aryl group, a linear or branched C 1 to C 6 fluorinated alkyl group, and a C 4 to C 10 aryl group; and optionally wherein R 1 and R 2 are linked together to form a ring selected from a substituted or unsubstituted aromatic ring or a substituted or unsubstituted aliphatic ring;

wherein the amount of boron in the boron containing film is 8% or less.

2. The method of claim 1 wherein the boron-containing precursor comprises a compound having formula I.

3. The method of claim 1 wherein the boron-containing precursor comprises at least one member selected from the group consisting of dimethylaminoborane, diethylaminoborane, ethylmethylaminoborane, di-iso-propylaminoborane, di-sec-butylaminoborane, N-ethyl-cyclohexylaminoborane, N-methyl-cyclohexylaminoborane, N-iso-propyl-cyclohexyaminoborane, phenylmethylaminoborane, phenylethylaminoborane, piperidinoborane, 2,6-dimethylpiperidinoborane, di-iso-propylaminodiborane, di-sec-butylaminodiborane, 2,6-dimethylpiperidinodiborane, and 2,2,6,6-tetramethylpiperidinoborane.

4. The method of claim 1 wherein the boron-containing precursor comprises a compound having formula II.

5. The method of claim 1 wherein the precursor further comprises at least one solvent.

6. A boron-containing film produced in accordance with claim 1 .

7. The method of claim 5 wherein the solvent comprises at least one member selected from the group consisting of ether, tertiary amine, alkyl hydrocarbon, aromatic hydrocarbon, tertiary aminoether.