IP Library Granted Patent US 9,691,634
Granted Patent B2
US 9,691,634 · App. 15/090,164 · Granted Jun 27, 2017

Method for creating through-connected vias and conductors on a substrate

Inventor: Fred Koelling (Foster City, CA)
Assignee: Abexl Inc.
H01L21/486B22F1/0014B22F1/0018B22F3/04B22F3/093B22F5/10B22F7/04H01L23/49827H01L27/12B22F2007/042B22F2301/00B22F2301/25B22F2303/20B22F2304/05B22F2998/10H01L23/147H01L23/15
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,691,634
App. No.
15/090,164
Granted
Jun 27, 2017
Kind
B2
Abstract

A method for creating electrically or thermally conductive vias in both vertical and horizontal orientations in a dielectric material has the steps of: (a) depositing a powder comprising metallic particles on a planar surface of a dielectric material having through or blind vias; (b) drying the deposited powder of metallic particles; (c) polishing the powder of metallic powders into the through or blind vias; (d) repeating steps (a)-(c) on a reverse side of the dielectric material; and (e) repeating steps (a)-(d) until no unfilled vias are detected.

Claims (19)

1. A method for creating electrically or thermally conductive vias in both vertical and horizontal orientations in a dielectric material, the method comprising the steps of:

(a) depositing a dry powder comprising metallic particles on a planar surface of a dielectric material having through or blind vias;

(b) polishing the powder of metallic particles into the through or blind vias;

(d) applying a non-polar solvent to one or more planar surfaces of the dielectric material;

(e) drying the deposited powder of metallic particles to further densify them;

(f) repeating steps (a)-(e) on a reverse side of the dielectric material; and

(g) repeating steps (a)-(f) until no unfilled vias are detected.

2. The method of claim 1 , wherein the metallic particles are comprised of one of a pure metal, an alloyed metal, and a mixture of pure metals.

3. The method of claim 2 , wherein the metal mixture is applied such that a noble metal coating is applied to an exterior surface of a less noble metal core particle, allowing for easier processing better conductivity and hermeticity.

4. The method of claim 2 , wherein the metal mixture is applied such that a noble metal alloy coating is applied to an exterior surface of a less noble metal or metal alloy core particle, allowing for easier processing better conductivity and hermeticity.

5. The method of claim 2 , wherein the powder is comprised of nanometer, sub-nanometer, or sub-micron sized metallic particles.

6. The method of claim 5 , wherein the metal mixture is applied such that a noble metal coating is applied to an exterior surface of a less noble metal core particle, allowing for easier processing better conductivity and hermeticity.

7. The method of claim 5 , wherein the metal mixture is applied such that a noble metal alloy coating is applied to an exterior surface of a less noble metal or metal alloy core particle, allowing for easier processing better conductivity and hermeticity.

8. The method of claim 1 , wherein the powder is comprised of nanometer, sub-nanometer, or sub-micron sized metallic particles.

9. The method of claim 1 , wherein the resulting thermally or electrically conductive vias are planar to a surface of the dielectric material.

10. The method of claim 1 , further comprising the step of utilizing rotational and vibratory forces to achieve a desired fill density of the through or blind vias.

11. The method of claim 1 , further comprising the steps of encapsulating the dielectric material in a polymer envelope and subjecting the envelope to vacuum sealing to create a tight seal between the dielectric material and an inner layer of the polymer envelope.

12. The method of claim 11 , further comprising the step of subjecting the polymer envelope to an isostatic pressure and a constant temperature to maximize via fill density and to cause particle-to-particle bonding or sintering of the metallic particles.

13. The method of claim 12 , wherein the constant temperature is selected based at least on a material type of the metallic particles and a via aspect ratio of the dielectric material.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 15, 2019
From: ABEXL INC.
To: SAMTEC, INC.
Reel/Frame 051016/0275 →
CHANGE OF NAME Recorded May 23, 2017
From: NANOPAC TECHNOLOGIES, INC.
To: ABEXL INC.
Reel/Frame 042483/0656 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 31, 2016
From: KOELLING, FRED
To: NANOPAC TECHNOLOGIES, INC.
Reel/Frame 039605/0881 →
Continuity (2)
Provisional Application 62142458 · Apr 2, 2015
Related Publication 20160293451A1 · Oct 6, 2016