Anodic bonding of dielectric substrates
View Patent ↗A first ion rich dielectric substrate with a patterned dielectric barrier and a oxidizable metal layer is anodically bonded to a second ion rich dielectric substrate. To bond the substrates, the oxidizable metal layer is oxidized. The dielectric barrier may inhibit the migration of these ions to the bondline, which might otherwise poison the bond strength. Accordingly, when joining the two substrates, a strong bond is maintained between the wafers.
1. A microfabricated device, comprising:
a first and a second ion rich dielectric substrate;
a dielectric barrier that inhibits the flow of ions and is disposed adjacent to at least one of the first and the second substrate;
an oxidizable metal layer disposed over the dielectric barrier;
a metal oxide layer formed from the ion rich substrate and the oxidizable metal layer, wherein the metal oxide layer bonds the two ion rich layers together.
2. The microfabricated device of claim 1 , wherein a thickness of the dielectric barrier is chosen to prevent the flow of ions from the first or the second substrate to the metal layer in the region of the dielectric barrier, at a bonding temperature.
3. The microfabricated device of claim 2 , wherein the thickness of the dielectric barrier is about 0.1 to about 5 microns.
4. The microfabricated device of claim 1 , wherein the dielectric barrier comprises at least one of silicon dioxide and silicon nitride.
5. The microfabricated device of claim 1 , wherein the dielectric barrier is deposited on a surface of at least one of the first and the second substrate.
6. The microfabricated device of claim 1 , wherein the dielectric barrier is formed in a trench on at least one of the first and the second substrate.
7. The microfabricated device of claim 1 , wherein the oxidizable metal is at least one of aluminum (Al) and titanium (Ti), and wherein the dielectric barrier comprises at least one of alumina and titanium dioxide and wherein the first and the second substrates comprise borosilicate.
8. The microfabricated device of claim 1 , wherein the oxidizable metal is unpatterned, and is disposed over all exposed surfaces of at least one of the first and the second substrate, and over the dielectric barrier.
9. The microfabricated device of claim 1 , wherein the oxidizable metal is disposed in a plurality of discrete islands on a surface of at least one of the first and the second substrate.
10. The microfabricated device of claim 1 , wherein the oxidizable metal extends laterally beyond the dielectric barrier, and may be about one and a half times wider than a width of the dielectric barrier.
11. A method for bonding two ion rich dielectric substrates, comprising:
providing a first and a second ion rich dielectric substrate;
forming a patterned dielectric barrier on at least one of the first and the second ion rich dielectric substrates;
forming a layer of an oxidizable metal over the dielectric barrier;
anodically bonding the first to the second ion rich dielectric substrate at the dielectric feature by oxidizing the oxidizable metal layer to form a metal oxide, wherein the dielectric barrier inhibits migration of ions to the oxidizable metal layer, and wherein the metal oxide provides an adhesive force that bonds the substrates together.
12. The method of claim 11 , wherein forming a patterned dielectric barrier comprises forming a barrier between about 0.1 and about 5 microns in thickness by depositing at least one of silicon dioxide and silicon nitride, and patterning it by at least one of etching and liftoff.
13. The method of claim 11 , further comprising:
pressing the first and second substrates together to form a substrate pair;
heating the substrate pair to a bonding temperature of at least about 300 centigrade; and
applying at least about 750V to the substrate pair.
14. The method of claim 11 , wherein the first and the second ion rich substrates are both comprise borosilicate.
15. The method of claim 11 , wherein forming a patterned dielectric barrier comprises forming a barrier to a thickness at which only 1/100 ions is able to cross the dielectric barrier to reach the oxidizable metal at the bonding temperature.
16. The method of claim 11 , wherein forming a layer of an oxidizable metal comprises forming the layer of oxidizable metal over all exposed surfaces of at least one of the first and the second substrates.
17. The method of claim 13 , wherein forming a layer of an oxidizable metal comprises forming the layer of oxidizable metal in a plurality of discrete areas on at least one of the first and the second substrates.
18. The method of claim 11 , further comprising:
forming a trench in at least one of the first or the second substrates; and
forming the dielectric barrier in the trench.
19. The method of claim 11 , further comprising:
forming the dielectric barrier in an area on at least one of the first and the second substrates, wherein the dielectric barrier also defines a standoff, which determines the minimum separation between the substrates.