Thin-film capacitor manufacturing method, integrated circuit mounting substrate, and semiconductor device equipped with the substrate
A method for manufacturing a thin-film capacitor in a circuit substrate includes: forming, on a dielectric film formed on a surface of a support member, a first electrode layer of the thin-film capacitor; forming, on the dielectric film and the first electrode layer, an insulating base material of the circuit substrate so as to bury the first electrode layer; removing the support member and exposing a surface of the dielectric film on a side opposite to the first electrode layer; patterning the dielectric film so as to leave a dielectric layer overlapping the first electrode layer; forming a first through hole in the dielectric layer so as to expose a part of a surface, on a dielectric layer side, of the first electrode layer; and forming a second electrode layer of the capacitor so as to overlap the dielectric layer including the inside of the first through hole.
1. A method for manufacturing a thin-film capacitor in a circuit substrate, the method comprising:
a dielectric film forming step of forming a dielectric film on a surface of a support member;
a first electrode forming step of forming a first electrode layer of the thin-film capacitor on the dielectric film in a required pattern;
a base material forming step of forming, on the dielectric film and the first electrode layer, an insulating base material of the circuit substrate so as to bury the first electrode layer;
a removal step of removing the support member and exposing a surface of the dielectric film on a side opposite to the first electrode layer;
a dielectric patterning step of patterning the dielectric film so as to leave a dielectric layer overlapping the first electrode layer, and forming a first through hole in the dielectric layer so as to expose a part of a surface, on a dielectric layer side, of the first electrode layer; and
a second electrode forming step of forming a second electrode layer of the thin-film capacitor so as to overlap the dielectric layer including an inside of the first through hole, wherein:
the circuit substrate is an integrated circuit mounting substrate on which an integrated circuit is to be mounted;
the second electrode forming step includes forming a first external connection portion connected to the first electrode layer, the first external connection portion being configured to be applied with a power supply voltage of one polarity for the integrated circuit, and being configured to be connected to the integrated circuit when the integrated circuit is mounted;
the second electrode layer includes a second external connection portion configured to be applied with a power supply voltage of the other polarity for the integrated circuit, and configured to be connected to the integrated circuit when the integrated circuit is mounted;
the first electrode forming step includes forming a second electrode supplementary portion at a position opposing the second external connection portion of the second electrode layer, the second electrode supplementary portion being connected to the second electrode layer; and
the dielectric patterning step includes forming a second through hole in the dielectric layer by removing the dielectric film at a position opposing the second electrode supplementary portion.
2. The method according to claim 1 , wherein:
the first electrode forming step includes a first plating step of increasing a film thickness of the first electrode layer; and
the second electrode forming step includes a second plating step of increasing a film thickness of the second electrode layer.
3. An integrated circuit mounting substrate comprising:
an insulating base material having a mounting surface on which an integrated circuit is to be mounted; and
a thin-film capacitor formed on a mounting surface side of the insulating base material, and including a first electrode layer, a second electrode layer, and a dielectric layer formed between the first electrode layer and the second electrode layer, wherein:
the first electrode layer of the thin-film capacitor is formed so as to be buried in the insulating base material from the mounting surface;
the dielectric layer includes a first through hole in which a first external connection portion connected to the first electrode layer is formed, the first external connection portion being configured to be applied with a power supply voltage of one polarity for the integrated circuit, and being configured to be connected to the integrated circuit when the integrated circuit is mounted;
the second electrode layer of the thin-film capacitor is formed on the dielectric layer;
the first external connection portion is made of a metal film constituting the second electrode layer;
the second electrode layer includes a second external connection portion configured to be applied with a power supply voltage of the other polarity for the integrated circuit, and configured to be connected to the integrated circuit when the integrated circuit is mounted; and
the dielectric layer includes a second through hole in which the second external connection portion is formed.
4. A semiconductor device comprising:
the integrated circuit mounting substrate according to claim 3 ; and
the integrated circuit mounted on the integrated circuit mounting substrate.
5. The semiconductor device according to claim 4 , wherein:
the integrated circuit is a semiconductor chip; and
the semiconductor chip is flip-chip mounted on the integrated circuit mounting substrate.
6. An integrated circuit mounting substrate comprising:
an insulating base material having a mounting surface on which an integrated circuit is to be mounted; and
a thin-film capacitor formed on a mounting surface side of the insulating base material, and including a first electrode layer, a second electrode layer, and a dielectric layer formed between the first electrode layer and the second electrode layer, wherein:
the first electrode layer of the thin-film capacitor is formed so as to be buried in the insulating base material from the mounting surface;
the dielectric layer includes a first through hole in which a first external connection portion connected to the first electrode layer is formed, the first external connection portion being configured to be applied with a power supply voltage of one polarity for the integrated circuit, and being configured to be connected to the integrated circuit when the integrated circuit is mounted;
the second electrode layer of the thin-film capacitor is formed on the dielectric layer;
the first external connection portion is made of a metal film constituting the second electrode layer;
the second electrode layer includes a second external connection portion configured to be applied with a power supply voltage of the other polarity for the integrated circuit, and configured to be connected to the integrated circuit when the integrated circuit is mounted;
the dielectric layer includes a second through hole in which the second external connection portion is formed;
the thin-film capacitor includes a second electrode supplementary portion made of a metal film constituting the first electrode layer, and connected to the second external connection portion of the second electrode layer; and
the integrated circuit mounting substrate further comprises:
an external connection surface for external connection on a side opposite to the mounting surface;
a connection pad formed on the external connection surface;
a first via plug formed in the insulating base material and connecting the connection pad and the first electrode layer; and
a second via plug formed in the insulating base material and connecting the connection pad and the second electrode supplementary portion.