System and method for laser assisted bonding of semiconductor die
View Patent ↗A system and method for laser assisted bonding of semiconductor die. As non-limiting examples, various aspects of this disclosure provide systems and methods that enhance or control laser irradiation of a semiconductor die, for example spatially and/or temporally, to improve bonding of the semiconductor die to a substrate.
1. A method of manufacturing a semiconductor device, the method comprising:
positioning a semiconductor die on a substrate; and
irradiating the semiconductor die with a laser beam to reflow interconnection structures between the semiconductor die and the substrate,
wherein said irradiating comprises varying a spot size of the laser beam during said irradiating.
2. The method of claim 1 , wherein said irradiating the semiconductor die with a laser beam comprises irradiating the semiconductor die with a flat-top laser beam.
3. The method of claim 1 , wherein said varying a spot size comprises varying the spot size between a first spot size that covers less than the entire semiconductor die and a second spot size that covers at least the entire semiconductor die.
4. The method of claim 1 , wherein said varying a spot size comprises increasing the spot size during a first time period at a controlled rate of increase.
5. The method of claim 4 , wherein said irradiating comprises maintaining the spot size at a constant size during a second time period.
6. The method of claim 5 , wherein said varying a spot size comprises decreasing the spot size during a third time period at a controlled rate of decrease.
7. The method of claim 1 , comprising forming a laser beam absorbing layer on the semiconductor die.
8. A method of manufacturing a semiconductor device, the method comprising:
positioning a semiconductor die on a substrate; and
irradiating the semiconductor die with a laser beam to reflow interconnection structures between the semiconductor die and the substrate,
wherein said irradiating comprises varying a spot size of the laser beam during said irradiating in accordance with a predetermined spot-size profile that is a function of time.
9. The method of claim 8 , wherein the predetermined spot-size profile comprises a first time window during which the spot size is increased as a first function of time.
10. The method of claim 9 , wherein the predetermined spot-size profile comprises a second time window during which the spot size is maintained at a constant size.
11. The method of claim 10 , wherein the predetermined spot-size profile comprises a third time window during which the spot size is decreased as a third function of time.
12. The method of claim 11 , wherein the second time window immediately follows the first time window, and the third time window immediately follows the second time window.
13. The method of claim 11 , wherein the first function of time and/or the third function of time is a linear function.
14. The method of claim 11 , wherein a magnitude of the rate of increase of the spot size during the first time window is different from a magnitude of the rate of decrease of the spot size during the third time window.
15. The method of claim 8 , wherein said irradiating comprises maintaining a constant beam intensity as the spot size is varied.
16. The method of claim 8 , wherein said irradiating comprises maintaining total laser energy at a constant level as the spot size is varied.
17. The method of claim 8 , further comprising, prior to said irradiating, forming a laser absorbing layer on the semiconductor die, wherein the laser absorbing layer is configured to enhance reflow of the interconnection structures when the laser absorbing layer is laser-irradiated.
18. The method of claim 8 , wherein said irradiating comprises:
transmitting laser radiation through at least a beam filter, wherein laser radiation output from at least the beam filter simultaneously:
irradiates a first region of the semiconductor die with a first flat-top laser beam at a first intensity level; and
irradiates a second region of the semiconductor die with a second flat-top laser beam at a second intensity level different from the first intensity level.
19. A method of manufacturing a semiconductor device, the method comprising:
positioning a semiconductor die on a substrate; and
irradiating the semiconductor die with a plurality of laser beams to reflow interconnection structures between the semiconductor die and the substrate,
wherein said irradiating comprises varying a spot size of at least one of the plurality of laser beams during said irradiating.
20. The method of claim 19 , wherein said irradiating comprises varying the spot size in accordance with a predetermined spot-size profile that comprises a first time window during which the spot size is increased as a first function of time.