IP Library › Granted Patent US 10,018,887
Granted Patent B2
US 10,018,887 · App. 15/144,916 · Granted Jul 10, 2018

Display device

Inventors: Masatoshi Yokoyama (Tochigi, JP); Shigeki Komori (Tochigi, JP); Manabu Sato (Tochigi, JP); Kenichi Okazaki (Tochigi, JP); Shunpei Yamazaki (Setagaya, JP)
Assignee: Semiconductor Energy Laboratory Co., Ltd.
G02F1/1368G02F1/13439G02F1/133345G02F1/134309G02F1/136213G02F1/136227G02F1/136277H01L27/1222H01L27/1225H01L27/1248H01L27/1255H01L29/04H01L29/24H01L29/42356H01L29/42384H01L29/7869G02F2001/134372G02F2202/02G02F2202/10
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Quick Facts
Patent No.
US 10,018,887
App. No.
15/144,916
Granted
Jul 10, 2018
Kind
B2
Abstract

To suppress a variation in characteristics of a transistor due to a released gas from an organic insulating film so that reliability of a display device is increased. The display device includes a transistor, an organic insulating film which is provided over the transistor in order to reduce unevenness due to the transistor, and a capacitor over the organic insulating film. An entire surface of the organic insulating film is not covered with components (a transparent conductive layer and an inorganic insulating film) of the capacitor, and a released gas from the organic insulating film can be released to the outside from exposed part of an upper surface of the organic insulating film.

Claims (52)

1. A semiconductor device comprising:

a semiconductor layer comprising a channel formation region;

a gate electrode overlapping with the channel formation region;

a first inorganic insulating film over the semiconductor layer and the gate electrode;

an organic insulating film over the first inorganic insulating film; and

a second inorganic insulating film over and in contact with the organic insulating film,

wherein the organic insulating film comprises a region that does not overlap with the second inorganic insulating film and overlaps with the first inorganic insulating film and the semiconductor layer.

2. The semiconductor device according to claim 1 , wherein the gate electrode is located under the semiconductor layer.

3. The semiconductor device according to claim 1 , wherein the semiconductor layer is an oxide semiconductor layer.

4. The semiconductor device according to claim 3 , wherein the oxide semiconductor layer comprises an In—Ga—Zn oxide.

5. The semiconductor device according to claim 1 , wherein the first inorganic insulating film is in contact with the second inorganic insulating film.

6. The semiconductor device according to claim 1 , wherein the second inorganic insulating film comprises silicon and nitrogen.

7. The semiconductor device according to claim 1 , wherein the organic insulating film comprises an organic resin.

8. A semiconductor device comprising:

an oxide semiconductor layer comprising a channel formation region;

a gate electrode overlapping with the channel formation region;

a first conductive layer over and electrically connected to the oxide semiconductor layer;

a second conductive layer over and electrically connected to the oxide semiconductor layer;

a first inorganic insulating film over the oxide semiconductor layer, the gate electrode, the first conductive layer and the second conductive layer;

an organic insulating film over the first inorganic insulating film;

a first transparent conductive layer over the organic insulating film;

a second inorganic insulating film over and in contact with the organic insulating film, the second inorganic insulating film being located over the first transparent conductive layer;

a second transparent conductive layer over the first transparent conductive layer with the second inorganic insulating film interposed therebetween; and

a liquid crystal layer over the first transparent conductive layer and the second transparent conductive layer,

wherein the first transparent conductive layer is a common electrode,

wherein the second transparent conductive layer is a pixel electrode electrically connected to the oxide semiconductor layer through the second conductive layer, and

wherein the organic insulating film comprises a region that does not overlap with the second inorganic insulating film, the first transparent conductive layer and the second transparent conductive layer and overlaps with the second conductive layer, the first inorganic insulating film and the oxide semiconductor layer.

9. The semiconductor device according to claim 8 , wherein the gate electrode is located under the oxide semiconductor layer.

10. The semiconductor device according to claim 8 , wherein the oxide semiconductor layer comprises an In—Ga—Zn oxide.

11. The semiconductor device according to claim 8 , wherein the first inorganic insulating film is in contact with the second inorganic insulating film.

12. The semiconductor device according to claim 8 , wherein the second inorganic insulating film comprises silicon and nitrogen.

13. The semiconductor device according to claim 8 , wherein the organic insulating film comprises an organic resin.

14. A semiconductor device comprising:

an oxide semiconductor layer comprising a channel formation region;

a gate electrode overlapping with the channel formation region;

a first conductive layer over and electrically connected to the oxide semiconductor layer;

a second conductive layer over and electrically connected to the oxide semiconductor layer;

a first inorganic insulating film over the oxide semiconductor layer, the gate electrode, the first conductive layer and the second conductive layer;

an organic insulating film over the first inorganic insulating film;

a first transparent conductive layer over the organic insulating film;

a second inorganic insulating film over and in contact with the organic insulating film, the second inorganic insulating film being located over the first transparent conductive layer;

a second transparent conductive layer over the first transparent conductive layer with the second inorganic insulating film interposed therebetween; and

a liquid crystal layer over the first transparent conductive layer and the second transparent conductive layer,

wherein the first transparent conductive layer is a common electrode,

wherein the second transparent conductive layer is a pixel electrode electrically connected to the oxide semiconductor layer through the second conductive layer,

wherein the organic insulating film comprises a region that does not overlap with the second inorganic insulating film, the first transparent conductive layer and the second transparent conductive layer and overlaps with the second conductive layer, the first inorganic insulating film and the oxide semiconductor layer, and

wherein the oxide semiconductor layer comprises a nanocrystalline oxide semiconductor.

15. The semiconductor device according to claim 14 , wherein the gate electrode is located under the oxide semiconductor layer.

16. The semiconductor device according to claim 14 , wherein the oxide semiconductor layer comprises an In—Ga—Zn oxide.

17. The semiconductor device according to claim 14 , wherein the first inorganic insulating film is in contact with the second inorganic insulating film.

18. The semiconductor device according to claim 14 , wherein the second inorganic insulating film comprises silicon and nitrogen.

19. The semiconductor device according to claim 14 , wherein the organic insulating film comprises an organic resin.

Priority Claims (1)
JP 2012-161726 · Jul 20, 2012 · national
Continuity (3)
Continuation 14746885 · Jun 23, 2015
Continuation 13942468 · Jul 15, 2013
Related Publication 20160246090A1 · Aug 25, 2016