Semiconductor device and manufacturing method thereof

1. A semiconductor device comprising:

a semiconductor die comprising a first die surface and a conductive pad on the first die surface;

a first dielectric layer (DL) on the first die surface and comprising a first DL opening through which the conductive pad is exposed;

a first redistribution layer comprising a first conductive layer on the first dielectric layer and in the first DL opening, where the first conductive layer is electrically connected to the conductive pad through the first DL opening;

a second redistribution layer comprising a second conductive layer on at least a top side of the first conductive layer, wherein the second conductive layer is thinner than the first conductive layer;

an anti-oxidation layer that is directly on at least a top side of the second conductive layer and is thinner than the first conductive layer; and

a second dielectric layer on the anti-oxidation layer and comprising a second DL opening that is laterally displaced from the first DL opening and through which a first portion of a top side of the second conductive layer is exposed,

wherein the anti-oxidation layer covers at least a second portion of the top side of the second conductive layer that is not exposed through the second DL opening, such that the second dielectric layer does not directly contact the top side of the second conductive layer.

2. The semiconductor device of claim 1 , wherein:

the second conductive layer covers the entire first conductive layer; and

the first portion of the top side of the second conductive layer that is exposed through the second dielectric layer is exposed through only a single aperture in the anti-oxidation layer; and

at least a portion of a lateral side surface of the second conductive layer is free of the anti-oxidation layer.

3. The semiconductor device of claim 1 , wherein the anti-oxidation layer comprises an oxide layer formed on the second conductive layer.

4. The semiconductor device of claim 3 , wherein the second conductive layer comprises an intermetallic compound on which the oxide layer is formed.

5. The semiconductor device of claim 1 , comprising a conductive ball on the second conductive layer and extending through the second DL opening, wherein the conductive ball directly contacts the first portion of the top side of the second conductive layer, directly contacts a lateral side of the second dielectric layer, and directly contacts only a lateral side of the anti-oxidation layer.

6. The semiconductor device of claim 1 , wherein:

the first conductive layer is no more than 3 microns thick; and

the second conductive layer is at least 2 microns thick.

7. The semiconductor device of claim 6 , wherein:

the first conductive layer comprises copper; and

the second conductive layer comprises nickel.

8. The semiconductor device of claim 1 , wherein the second conductive layer comprises a copper-tin intermetallic compound.

9. The semiconductor device of claim 1 , wherein the first conductive layer comprises copper (Cu), and the second conductive layer comprises: tin (Sn), silver (Ag), nickel (Ni), titanium (Ti), titanium-tungsten alloy (TiW), aluminum (Al), and/or chromium (Cr).

10. The semiconductor device of claim 1 , wherein an intermetallic compound is formed at an interface between the second conductive layer and the first conductive layer.

11. A method of manufacturing a semiconductor device, the method comprising:

providing a semiconductor die that comprises a first die surface and a conductive pad on the first die surface;

forming a first dielectric layer (DL) on the first die surface and comprising a first DL opening through which the conductive pad is exposed;

forming a first redistribution layer comprising a first conductive layer on the first dielectric layer and in the first DL opening, where the first conductive layer is electrically connected to the conductive pad through the first DL opening;

forming a second redistribution layer comprising a second conductive layer on the first conductive layer, wherein the second conductive layer is thinner than the first conductive layer, and wherein an anti-oxidation layer is directly on a top side of the second conductive layer, and the anti-oxidation layer is thinner than the first conductive layer; and

forming a second dielectric layer on the anti-oxidation layer and comprising a second DL opening that is laterally displaced from the first DL opening and through which a first portion of a top side of the second conductive layer is exposed,

wherein the anti-oxidation layer covers at least a second portion of the top side of the second conductive layer that is not exposed through the second DL opening, such that the second dielectric layer does not directly contact the top side of the second conductive layer.

12. The method of claim 11 , comprising: forming the anti-oxidation layer on the second conductive layer.

13. The method of claim 11 , wherein:

the second conductive layer covers the entire first conductive layer; and

the first portion of the top side of the second conductive layer that is exposed through the second dielectric layer is exposed through only a single aperture in the anti-oxidation layer; and

at least a portion of a lateral side surface of the second conductive layer is free of the anti-oxidation layer.

14. The method of claim 11 , wherein the anti-oxidation layer comprises an oxide layer formed on the second conductive layer, and the method comprises utilizing a flux to remove a portion of the anti-oxidation layer exposed from the second dielectric layer by the second DL opening.

15. The method of claim 11 , comprising forming a conductive ball on the second conductive layer and extending through the second DL opening, wherein the conductive ball directly contacts the first portion of the top side of the second conductive layer, directly contacts a lateral side of the second dielectric layer, and directly contacts only a lateral side of the anti-oxidation layer.

16. The method of claim 11 , wherein:

the first conductive layer is no more than 3 microns thick; and

the second conductive layer is at least 2 microns thick.

17. The method of claim 16 , wherein:

the first conductive layer comprises a copper layer; and

the second conductive layer comprises a nickel layer.

18. The method of claim 11 , wherein the second conductive layer comprises a copper-tin intermetallic compound.

19. The method of claim 11 , wherein the first conductive layer comprises copper (Cu), and the second conductive layer comprises: tin (Sn), silver (Ag), nickel (Ni), titanium (Ti), titanium-tungsten alloy (TiW), aluminum (Al), and/or chromium (Cr).

20. A method of manufacturing a semiconductor device that includes a semiconductor die that comprises a first die surface and a conductive pad on the first die surface, and a first dielectric layer (DL) on the first die surface, the method comprising:

forming a first redistribution layer comprising a first conductive layer over the first dielectric layer and electrically connected to the conductive pad through a first DL opening in the first dielectric layer, where the first conductive layer comprises copper (Cu); and

forming a second redistribution layer comprising a second conductive layer directly on and completely covering the first conductive layer, wherein the second conductive layer is thinner than the first conductive layer and comprises: tin (Sn), silver (Ag), nickel (Ni), titanium (Ti), titanium-tungsten alloy (TiW), aluminum (Al), and/or chromium (Cr), and wherein an anti-oxidation layer is directly on a top side of the second conductive layer, the anti-oxidation layer is thinner than the first conductive layer, and the anti-oxidation layer comprises an oxide layer that protects the first conductive layer;

forming a second dielectric layer on the anti-oxidation layer and comprising a second DL opening that is laterally displaced from the first DL opening and through which an exposed portion of the anti-oxidation layer is exposed; and

removing the exposed portion of the anti-oxidation layer.