Integrated structures having gallium-containing regions
Some embodiments include an integrated structure having a gallium-containing material between a charge-storage region and a semiconductor-containing channel region. Some embodiments include an integrated structure having a charge-storage region under a conductive gate, a tunneling region under the charge-storage region, and a semiconductor-containing channel region under the tunneling region. The tunneling region includes at least one dielectric material directly adjacent a gallium-containing material. Some embodiments include an integrated structure having a charge-trapping region under a conductive gate, a first oxide under the charge-storage region, a gallium-containing material under the first oxide, a second oxide under the gallium-containing material, and a semiconductor-containing channel region under the second oxide.
1. An integrated structure, comprising:
a conductive gate;
a charge-storage region under the conductive gate;
a tunneling region under the charge-storage region;
a semiconductor-containing channel region under and directly against the tunneling region, the semiconductor-containing channel region comprising monocrystalline silicon and being part of a monocrystalline-silicon substrate that extends laterally outward beyond the charge-storage region along a cross-section; and
wherein the tunneling region includes a dielectric material consisting essentially of SiO 2 directly adjacent a gallium-containing material and directly adjacent the semiconductor-containing channel region.
2. The integrated structure of claim 1 wherein the gallium-containing material has a vertical thickness within a range of from about 10 Å to about 100 Å.
3. The integrated structure of claim 1 wherein the tunneling region has a vertical thickness of less than or equal to about 100 Å.
4. The integrated structure of claim 1 wherein the tunneling region has a vertical thickness within a range of from about 20 Å to about 80 Å.
5. The integrated structure of claim 4 wherein the gallium-containing material has a vertical thickness within a range of from about 30 Å to about 70 Å.
6. The integrated structure of claim 1 wherein the dielectric material is a first dielectric material and the tunneling region includes the gallium-containing material vertically sandwiched between the first dielectric material and a second dielectric material; the first dielectric material being a first oxide material and the second dielectric material being a second oxide material.
7. The integrated structure of claim 6 wherein the first and second oxide materials have about a same thickness as one another.
8. The integrated structure of claim 6 wherein the first and second oxide materials have different thicknesses relative to one another.
9. The integrated structure of claim 6 wherein the first and second oxide materials have a same composition as one another.
10. The integrated structure of claim 6 wherein the first and second oxide materials have different compositions relative to one another.
11. The integrated structure of claim 1 wherein the gallium-containing material includes gallium and oxygen.
12. The integrated structure of claim 11 wherein the gallium-containing material includes one or more substances selected from the group consisting of silicon, aluminum, hafnium and zirconium.
13. An integrated structure, comprising:
a conductive gate;
a charge-trapping region under the conductive gate;
a first oxide under the charge-trapping region;
a gallium-containing material under the first oxide;
a second oxide consisting essentially of SiO 2 under and directly adjacent to the gallium-containing material; and
a channel region under the second oxide, the channel region comprising monocrystalline silicon that physically contacts the second oxide.
14. The integrated structure of claim 13 wherein the first and second oxides are both silicon dioxide.
15. The integrated structure of claim 13 wherein the first and second oxides are different compositions relative to one another.
16. The integrated structure of claim 13 wherein the gallium-containing material includes gallium and oxygen.
17. The integrated structure of claim 16 wherein a concentration of the gallium within the gallium-containing material is within a range of from about 10 atomic percent to about 50 atomic percent.
18. The integrated structure of claim 16 wherein the gallium-containing material includes one or more substances selected from the group consisting of silicon, aluminum, hafnium and zirconium.
19. The integrated structure of claim 18 wherein the gallium-containing material includes silicon to a concentration within a range of from about 0.1 atomic percent to about 10 atomic percent.
20. The integrated structure of claim 18 wherein the gallium-containing material includes aluminum to a concentration within a range of from about 0.1 atomic percent to about 10 atomic percent.
21. The integrated structure of claim 18 wherein the gallium-containing material includes zirconium to a concentration within a range of from about 0.1 atomic percent to about 10 atomic percent.
22. The integrated structure of claim 18 wherein the gallium-containing material includes hafnium to a concentration within a range of from about 0.1 atomic percent to about 10 atomic percent.