Semiconductor structures including rails of dielectric material
Methods of forming semiconductor structures that include bodies of a semiconductor material disposed between rails of a dielectric material are disclosed. Such methods may include filling a plurality of trenches in a substrate with a dielectric material and removing portions of the substrate between the dielectric material to form a plurality of openings. In some embodiments, portions of the substrate may be undercut to form a continuous void underlying the bodies and the continuous void may be filled with a conductive material. In other embodiments, portions of the substrate exposed within the openings may be converted to a silicide material to form a conductive material under the bodies. For example, the conductive material may be used as a conductive line to electrically interconnect memory device components. Semiconductor structures and devices formed by such methods are also disclosed.
1. A semiconductor structure, comprising:
rails of dielectric material overlying a substrate;
a conductive material overlying the substrate and extending between the rails of dielectric material;
regions of another dielectric material overlying the conductive material and extending between the rails of dielectric material; and
regions of semiconductor material overlying the conductive material and extending between the rails of dielectric material, the regions of semiconductor material positioned laterally adjacent the regions of another dielectric material.
2. The semiconductor structure of claim 1 , wherein the regions of semiconductor material are separated from the substrate by a continuous void extending in a first direction parallel to the rails of dielectric material.
3. The semiconductor structure of claim 2 , wherein the continuous void extends in a second direction from a first rail of adjacent rails of the dielectric material to a second rail of adjacent rails of the dielectric material.
4. The semiconductor structure of claim 1 , wherein the regions of semiconductor material are separated from the substrate by a continuous void containing a conductive material.
5. The semiconductor structure of claim 4 , wherein the conductive material extends continuously under the regions of semiconductor material, electrically interconnecting each of the regions.
6. The semiconductor structure of claim 4 , wherein a cross-sectional profile of the conductive material is substantially scalloped.
7. A semiconductor structure, comprising:
rails of dielectric material overlying a substrate;
a conductive material overlying the substrate, the conductive material in direct contact with and extending parallel to the rails of dielectric material; and
regions of semiconductor material overlying the conductive material and positioned between the rails of the dielectric material, the regions of semiconductor material spaced apart in a first direction by the rails of dielectric material and spaced apart in a second direction by another dielectric material.
8. The semiconductor structure of claim 7 , wherein the conductive material comprises a polysilicon material, a tungsten material, a titanium nitride material, a titanium silicide material, a tantalum nitride material or a tungsten silicide material.
9. The semiconductor device of claim 7 , wherein the regions of semiconductor material comprise at least one of a p-type polysilicon material and an n-type polysilicon material.
10. The semiconductor device of claim 7 , wherein the rails of dielectric material extend in a direction longitudinal to the substrate.
11. A semiconductor structure, comprising:
regions of semiconductor material between rails of dielectric material and a substrate;
a conductive material disposed between the regions of semiconductor material and the substrate, the conductive material parallel to the rails of dielectric material and in direct contact with the rails of dielectric material; and
a liner on the rails of dielectric material.
12. The semiconductor structure of claim 11 , wherein the regions of semiconductor material between the rails of dielectric material comprise a doped region.
13. The semiconductor structure of claim 11 , wherein the conductive material comprises a non-transition metal silicide.
14. The semiconductor structure of claim 11 , wherein the regions of semiconductor material are spaced apart in a first direction by the rails of dielectric material and spaced apart in a second direction by another dielectric material.
15. The semiconductor structure of claim 11 , further comprising a silicide material on each of the regions of semiconductor material.