Light-emitting element and display device
There has been a problem that difference in refractive index between an opposite substrate or a moisture barrier layer provided thereover, and air is maintained large, and light extraction efficiency is low. Further, there has been a problem that peeling or cracking due to the moisture barrier layer is easily generated, which leads to deteriorate the reliability and lifetime of a light-emitting element. A light-emitting element comprises a pixel electrode, an electroluminescent layer, a transparent electrode, a passivation film, a stress relieving layer, and a low refractive index layer, all of which are stacked sequentially. The stress relieving layer serves to prevent peeling of the passivation film. The low refractive index layer serves to reduce reflectivity of light generated in the electroluminescent layer in emitting to air. Therefore, a light-emitting element with high reliability and long lifetime and a display device using the light-emitting element can be provided.
1. A method for manufacturing a display device, the method comprising the steps of:
forming a semiconductor layer over a substrate;
irradiating the semiconductor layer with laser light to form a crystalline semiconductor layer;
forming an insulating layer over the crystalline semiconductor layer;
forming a first electrode over the insulating layer;
forming a light-emitting layer over the first electrode, the light-emitting layer comprising an organic compound;
forming a second electrode over the light-emitting layer;
forming a first organic layer over the second electrode;
forming an inorganic layer over the first organic layer, the inorganic layer comprising a material selected from silicon nitride, silicon oxide, silicon nitride oxide, and silicon oxynitride; and
forming a second organic layer over the inorganic layer,
wherein a refractive index of the second organic layer is lower than a refractive index of the inorganic layer.
2. The method according to claim 1 , wherein the light-emitting layer is formed by a vapor deposition method.
3. The method according to claim 1 , wherein the light-emitting layer is formed by an ink jetting method.
4. The method according to claim 1 , wherein the first organic layer and the second organic layer are in direct contact with the inorganic layer.
5. The method according to claim 1 , further comprising a step of forming a wiring over the insulating layer,
wherein the wiring is electrically connected to the crystalline semiconductor layer and the first electrode.
6. The method according to claim 1 , wherein the first organic layer comprises a material selected from polyimide resin, acrylic resin, and styrene resin.
7. The method according to claim 1 , wherein the light-emitting layer is capable of emitting white light.
8. The method according to claim 1 , wherein the second electrode is capable of transmitting light emitted from the light-emitting layer.
9. The method according to claim 1 , further comprising a step of forming a layer comprising silicon oxide,
wherein the layer is in direct contact with the inorganic layer.
10. A method for manufacturing a display device, the method comprising the steps of:
forming a semiconductor layer over a substrate;
irradiating the semiconductor layer with laser light to form a crystalline semiconductor layer;
forming an insulating layer over the crystalline semiconductor layer;
forming a first electrode over the insulating layer;
forming a light-emitting layer over the first electrode, the light-emitting layer comprising an organic compound;
forming a second electrode over the light-emitting layer;
forming a first organic layer over the second electrode;
forming an inorganic layer over the first organic layer, the inorganic layer comprising a material selected from silicon nitride, silicon oxide, silicon nitride oxide, and silicon oxynitride; and
forming a second organic layer over the inorganic layer,
wherein the crystalline semiconductor layer is electrically connected to the light-emitting layer, and
wherein a refractive index of the second organic layer is lower than a refractive index of the inorganic layer.
11. The method according to claim 10 , wherein the light-emitting layer is formed by a vapor deposition method.
12. The method according to claim 10 , wherein the light-emitting layer is formed by an ink jetting method.
13. The method according to claim 10 , wherein the first organic layer and the second organic layer are in direct contact with the inorganic layer.
14. The method according to claim 10 , further comprising a step of forming a wiring over the insulating layer,
wherein the wiring is electrically connected to the crystalline semiconductor layer and the first electrode.
15. The method according to claim 10 , wherein the first organic layer comprises a material selected from polyimide resin, acrylic resin, and styrene resin.
16. The method according to claim 10 , wherein the light-emitting layer is capable of emitting white light.
17. The method according to claim 10 , wherein the second electrode is capable of transmitting light emitted from the light-emitting layer.
18. The method according to claim 10 , further comprising a step of forming a layer comprising silicon oxide,
wherein the layer is in direct contact with the inorganic layer.