IP Library Granted Patent US 10,283,466
Granted Patent B2
US 10,283,466 · App. 15/168,467 · Granted May 7, 2019

Polymer resin and compression mold chip scale package

Inventors: Yusheng Lin (Phoenix, AZ); Soon Wei Wang (Seremban, MY); Chee Hiong Chew (Seremban, MY); Francis J. Carney (Mesa, AZ)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
H01L24/02H01L21/561H01L21/568H01L21/6836H01L21/78H01L23/3185H01L24/03H01L24/05H01L24/13H01L24/94H01L24/96H01L2223/5448H01L2223/54406H01L2224/024H01L2224/0239H01L2224/02315H01L2224/0346H01L2224/0401H01L2224/05571H01L2224/05644H01L2224/05647H01L2224/05655H01L2224/11334H01L2224/11849H01L2224/131H01L2224/13024H01L2224/94H01L2224/96
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Quick Facts
Patent No.
US 10,283,466
App. No.
15/168,467
Granted
May 7, 2019
Kind
B2
Abstract

A method for fabricating a chip scale package, comprising: providing a wafer; applying a polymer resin on at least part of a first surface of the wafer and to one or more sides of the wafer; and applying a compression mold on at least part of a second surface of the wafer and to one or more sides of the wafer, said first and second surfaces opposing each other.

Claims (49)

1. A method for fabricating a chip scale package, comprising:

providing a wafer;

applying a polymer resin on at least part of a first surface of the wafer and to one or more sides of each of a plurality of die comprised in the wafer; and

compression molding a compression mold on at least part of a second surface of the wafer and to one or more sides of each of the plurality of die comprised in the wafer, said first and second surfaces opposing each other;

wherein the polymer resin contacts the compression mold.

2. The method of claim 1 , further comprising:

thinning said wafer;

etching one or more trenches in said first surface of the wafer;

applying a mask to said first surface to facilitate said application of the polymer resin, wherein at least some of said polymer resin fills at least part of said one or more trenches;

applying a metallization to areas of the first surface using the mask;

etching one or more trenches in the second surface to contain at least part of said compression mold;

depositing one or more solder units on said metallization; and

cutting along said one or more trenches in the first and second surfaces of the wafer to produce a chip scale package.

3. The method of claim 2 , wherein thinning the wafer comprises achieving an average wafer thickness of 100 microns to 250 microns.

4. The method of claim 2 , wherein thinning the wafer comprises achieving a wafer thickness along a perimeter of the wafer that is greater than a different wafer thickness at a center of the wafer.

5. The method of claim 2 , wherein applying said metallization comprises performing electroless plating using either copper or a combination of nickel and gold.

6. The method of claim 2 , further comprising applying a photoresist coat to the second surface before etching said one or more trenches in the second surface.

7. The method of claim 2 , wherein etching one or more trenches in the second surface comprises etching through the wafer to the polymer resin contained in the one or more trenches in the first surface.

8. The method of claim 2 , wherein the one or more solder units are solder balls.

9. The method of claim 2 , wherein the one or more solder units are printed onto the metallization, and further comprising reflowing said solder units to form solder bumps.

10. The method of claim 2 , wherein etching said one or more trenches in the second surface comprises using an etching technique selected from the group consisting of: deep reactive-ion etching (DRIE) and narrow saw street etching (NSS).

11. The method of claim 1 , further comprising etching one or more trenches in the first surface to contain at least some of said polymer resin, said etching performed using an etching technique selected from the group consisting of: deep reactive-ion etching (DRIE) and narrow saw street etching (NSS).

12. The method of claim 1 , wherein said polymer resin is selected from the group consisting of: polyimide (PI) and polybenzoxazoles (PBO).

13. A method for fabricating a chip scale package, comprising:

providing a wafer having metallization on a top surface; and

compression molding a compression mold to a bottom surface of said wafer, to side surfaces of each of a plurality of die comprised in said wafer, and to a perimeter of said top surface of the wafer;

wherein an entirety of each of the side surfaces of each of a plurality of die comprised in said wafer are covered by the compression mold.

14. The method of claim 13 , further comprising applying a tape to said top surface, and wherein applying said compression mold comprises using sufficient pressure to cause at least some of said compression mold to seep between said tape and the top surface.

15. The method of claim 13 , wherein said compression mold applied to said perimeter of the top surface forms one or more strips, said one or more strips having an average width between 40 and 60 micrometers, inclusive.

16. The method of claim 13 , further comprising:

using a sputtering technique to deposit a metallic layer on said top surface;

using a photoresist to deposit said metallization on the top surface;

etching away at least part of said metallic layer;

back-grinding said bottom surface;

applying a first tape to said bottom surface;

dividing the wafer into multiple pieces;

flipping the wafer pieces and applying a second tape to the top surfaces of the pieces;

removing the first tape;

removing the second tape after applying said compression mold; and

producing a singulated chip scale package.

17. A method for fabricating a chip scale package, comprising:

forming a first plurality of trenches in a first surface of a wafer;

applying a polymer resin to the first surface of the wafer and within the first plurality of trenches;

forming a second plurality of trenches in a second surface of the wafer opposing the first surface of the wafer, wherein the polymer resin is exposed through a base of each trench of the second plurality of trenches;

contacting the polymer resin with a compression mold through compression molding a compression mold over the second surface of the wafer and into the second plurality of trenches; and

singulating a plurality of chip scale packages through removing a portion of the polymer resin in the first plurality of trenches and a portion of the compression mold in the second plurality of trenches.

18. The method of claim 17 , further comprising thinning the wafer.

19. The method of claim 17 , further comprising applying a metallization layer to the first surface of the wafer, wherein the metallization layer and the polymer resin contact the first surface of the wafer.

20. The method of claim 17 , wherein the first plurality of trenches and the second plurality of trenches are formed through etching.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT REEL 041187, FRAME 0295 Recorded Jun 22, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 064151/0203 →
SECURITY INTEREST Recorded Dec 23, 2016
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 041187/0295 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 31, 2016
From: LIN, YUSHENG; WANG, SOON WEI; CHEW, CHEE HIONG; CARNEY, FRANCIS J.
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 038748/0825 →
Continuity (1)
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